semi合集-English.pdf - 第3089页

SEMI E123.1-0703 © SEMI 2003 12 (tray/tube). <--S6,F11 Event : PortLoaded Host Acks Event S6,F12--> ... Handler cycles devices ... ... for each device report internal states. <--S6,F11 Event : DeviceClearsInput …

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SEMI E123.1-0703 © SEMI 2003 11
R1-1.4 Multi-Site Run Scenario
R1-1.4.1 This is a run scenario with 64 test-sites and optional GEM events all turned on with no errors of any type
occurring.
COMMENT HOST EQUIPMENT COMMENT
Host selects GEM Alarms S5,F3-->
to enable (list).
<--S5,F54 Alarms xyz ON.
Host selects GEM Events S2,F37-->
to enable (list).
<--S2,F38 Events xyz ON.
Host selects Trace S2,F23-->
Data Item(s).
<--S2,F24 Trace Data Item x ON.
Host selects S2,F41-->
process program.
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host requests S2,F41-->
start-of-lot report.
<--S2,F42 Equip sends report items.
Host commands S2,F41-->
start-of-lot.
<--S2,F42 Equip Acks Start.
... for each trace item
period.
<--S6,F1 Trace Event x SEND.
Host receives and S6,F2-->
Acks Trace Item x.
... for each port event
SEMI E123.1-0703 © SEMI 2003 12
(tray/tube).
<--S6,F11 Event : PortLoaded
Host Acks Event S6,F12-->
... Handler cycles devices ...
... for each device report
internal states.
<--S6,F11 Event : DeviceClearsInput
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceEntersTemp
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceClearsTemp
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceEntersQueue.x
Host Acks Event S6,F12-->
<--S6,F11 Event : StartTest.Contactor.x
Host Acks Event S6,F12-->
<--S6,F11 Event : EndTestReceived.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceBinReceived.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceClearsContactor.x
Host Acks Event S6,F12-->
<--S6,F11 Event:DeviceEntersUnloadQueue.x
Host Acks Event S6,F12-->
<--S6,F11 Event : DeviceUnloaded.HardbinX
Host Acks Event S6,F12-->
... for each full/empty tray/tube on
input,output.
<--S5,F1 Alarm : ContainerReplaceRequest.x
Host Acks request. S5,F2-->
Note that the messages reporting the above internal states may require sub-addressing
of test-sites and ports similar to the tester SEM.
SEMI E123.1-0703 © SEMI 2003 13
Handler cycles devices...
... random messages
(e.g., ... variable request)
Host asks for variable S6,F15-->
x (devices tested).
<--S6,F16 Handler sends variable.
...
... eventually ends
<--S6,F11 Event : HandlerEmpty
Host Acks Event S6,F12-->
Host commands S2,F41-->
end-of-lot.
<--S2,F42 Handler acks Rmt.Cmd
Stopping
<--S6,F11 Event : Lot
Completed
Host Acks Event S6,F12-->
Idle
Host requests S6,F15-->
end-of-lot report.
<--S6,F16 Handler sends report.
R1-1.5 Continuous Load Scenario
R1-1.5.1 This is a run scenario where there are more units that need to be processed with same recipe and
configuration but were not loaded to Handler inputs initially (due to limited input space, material delays etc.) This
scenario assumes no direct link between Test Equipment and Handler, Host directs all run-to-run processing
between the two equipments. Host and Station Controller represent the same entity here.
Test Equipment Host (Station Control) Handler
Host waits for
UnitsReady event…
!
S6,F11 Event: UnitsReady
ACK: Event S6,F12
"
!
Start Processing on
Test Equipment.
Waiting for command…
Testing units…
Event: Test
Complete (w/
bin list for
multiple test
sites).
"