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SEMI E141-0705 © SEMI 2005 10 NOTICE: SEMI makes no warranties or representatio ns as to the suitability of th e standards set forth herein for any particular application. Th e determination of the suitability of the sta…
SEMI E141-0705 © SEMI 2005 9
NOTE: The P C S A configuration is shown for a single-wavelength ellipsometer. For other configurations, see
¶6.4.1.
Figure 1
Schematic of an Ellipsometer System
Layer 1: N
1
: n
1
, k
1
Layer 2: N
2
: n
2
, k
2
Substrate medium: N
s
: n
s
, k
s
Layer i: N
i
: n
i
, k
i
Ambient medium: N
a
: n
a
, k
a
Figure 2
Illustration of the Layer Counting Principle
SEMI E141-0705 © SEMI 2005 10
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