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SEMI M48-1101 © SEMI 2001 9 R nominal Figure 5 Single-Diameter High-Density Me asurement Sites Figure 6 Edge Scan Location
SEMI M48-1101 © SEMI 2001 8
Y
site
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site
Figure 4
Cartesian Measurement Site Patterns
SEMI M48-1101 © SEMI 2001 9
R
nominal
Figure 5
Single-Diameter High-Density Measurement Sites
Figure 6
Edge Scan Location
SEMI M48-1101 © SEMI 2001 10
-100
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0
20
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-100 -80 -60 -40 -20 0 20 40 60 80 100
Figure 7
Spiral Scan Example - 200 mm Diameter Wafer, 81 Points
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