semi合集-English.pdf - 第2434页
SEMI E87-0705 © SEMI 1999, 2005 3 5.2.17 object instantiatio n — the act of storing of in formation related to a physical or lo gical entity so that it can be recalled on de mand based on its public ide ntifier. 5.2.18 o…
SEMI E87-0705 © SEMI 1999, 2005 2
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services
NOTICE: As listed or revised, all documents cited shall be the latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — Automated Guided Transport
5.1.2 AGV — Automated Guided Vehicle
5.1.3 AMHS — Automated Material Handling System
5.1.4 FIMS — Front-Opening Interface Mechanical Standard
5.1.5 FOUP — Front Opening Unified Pod
5.1.6 GEM — Generic Equipment Model
5.1.7 OHT — Overhead Hoist Transport
5.1.8 PGV — Person Guided Vehicle
5.1.9 PIO — Parallel Input/Output Interface
5.1.10 RGT — Rail Guided Transport
5.1.11 RGV — Rail Guided Vehicle
5.2 Definitions
5.2.1 Automated Material Handling System — an automated system to store and transport materials within the
factory.
5.2.2 automation — the degree to which activities of machines or production systems are self-acting. In this
standard automation provides methods that will reduce the amount of operator intervention required.
5.2.3 buffer — a set of one or more locations for holding carriers at/inside the production equipment.
5.2.4 carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates.
5.2.5 CarrierID — a readable and unique identifier for the carrier.
5.2.6 CarrierID read — the process of the equipment reading the CarrierID from the carrier.
5.2.7 carrier ID tag (tag, ID tag) — a physical device for storing Carrier ID and other information. There are two
basic types of tags, read-only tags and read/write tags. [SEMI E99]
5.2.8 Collection Event —
a collection event is an event (or grouping of related events) on the equipment that is
considered to be significant to the host.
5.2.9 docked position — the position where the carrier is ready for substrate extraction or insertion.
5.2.10 FIMS port — the substrate access port where the FOUP is opened and closed.
5.2.11 fixed buffer equipment — production equipment that has only fixed load ports and no internal buffer for
carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing.
5.2.12 host — the factory computer system or an intermediate system that represents the factory and the user to the
equipment.
5.2.13 internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports.
5.2.14 internal buffer equipment — equipment that uses an internal buffer.
5.2.15 load — the operation of placing a carrier on a load port.
5.2.16 load port — the interface location on the equipment where carriers are loaded and unloaded.
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5.2.17 object instantiation — the act of storing of information related to a physical or logical entity so that it can be
recalled on demand based on its public identifier.
5.2.18 on-line equipment — equipment that is con-nected to, and able to communicate fully with, the host.
5.2.19 process equipment — equipment used to produce product, such as semiconductor devices. This excludes
metrology and material handling equipment.
5.2.20 production equipment — equipment used to produce product, such as semiconductor devices, including
substrate sorting, process, and metrology equipment and excluding material handling equipment.
5.2.21 properties — a set of name value pairs assigned to an object or used in a service message to include
additional information about the object (i.e., carrier, port, etc.).
5.2.22 re-initialization — a process where production equipment is either powered off then on or when some kind
of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On
production equipment that contains some kind of mass storage device this can also be called a “reboot”.
5.2.23 read position — any position on a load port or in an internal buffer from which the tag on a carrier can be
read.
NOTE 1: This position may vary on any particular equipment depending on the read technology selected by the end user. Some
technology/load ports may allow the carrier to be moved during reading. Equipment may have more than one read position.
5.2.24 single communication connection — exactly one physical connection using exactly one logical session and a
standard set of messages.
5.2.25 slot map –– the information that relates which slots in a carrier hold substrates, both correctly and
incorrectly.
5.2.26 slot map read –– the process of the equipment reading the slot map for substrate position and placement
within the carrier.
5.2.27 standard message set — messages conforming to standard message specifications.
5.2.28 substrate — material held within a carrier. This can be product, or durables such as reticles.
5.2.29 substrate port — the carrier location from which substrates are accessed by the equipment.
5.2.30 transfer unit — maximum number of carriers allowed in a specific transfer service:
AA is the maximum number of carriers allowed for acquisition at the transfer source.
BB is the maximum number of carriers allowed for deposit at the transfer destination.
CC is the maximum number of carriers allowed for transfer in one transport vehicle.
The transfer unit is the minimum of AA, BB, and CC.
5.2.31 undocked — the status of a carrier on a load port or in an internal buffer that is not at the docked position.
5.2.32 unload — the operation of removing a carrier from a load port.
5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a carrier can be
written to. This position may vary on any particular equipment depending on the write technology selected by the
end user. Some technology/load ports may allow the carrier to be moved during writing. The read position and the
write position may or may not be the same position.
6 Requirements
6.1 Carrier Management Standard (CMS) compliant equipment is required to provide certain capabilities defined by
other standards: accessibility to status infor-mation, event reporting, alarm management, and equipment control.
These requirements shall be satisfied through compliance to the following sets of standards:
6.2 Generic Equipment Model Standard (GEM) SEMI E30
Event Notification
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Status Data Collection
Equipment Constants
Alarm Management
Equipment Control
6.3 Object-Based Standards
Object Services Standard (SEMI E39)
Event Reporting (SEMI E53)
Exception Management (SEMI E41)
7 Conventions
7.1 Objects
7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage
information concerning these entities, it is useful to treat these entities as objects that comply with the basic
requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large
number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is
difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to
get information related only to a specific one out of many.
7.1.2 By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type
of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest.
7.1.3 Object Properties
7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The
name is a formally reserved text string that represents the property, and the value is the current setting for that
property.
7.1.3.2 Properties shall be accessible to the host via the service GetAttr for the Carrier object. Using SEMI E39
Object Services Standard, for example, it is possible to:
get the list of IDs for the current carriers at the equipment, and
get the specified properties for one or more individual carriers.
7.1.4 Rules for Object Properties
Attributes with RO access can not be changed using SetAttr service as defined in OSS.
Attributes with RW access can be changed using SetAttr service as defined in OSS.
Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting
with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.
7.1.5 Object Attribute Table
7.1.5.1
The object attribute table is used to list all the attributes related to the defined object as shown below the
access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the
attribute is required for implementation. Finally, the Form column is used to specify the format of that particular
attribute.
Table 1 Object Attribute Table
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “Carrier”