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SEMI F4-1000 © SEMI 1990 , 2000 4 8.6.1 Cy li nder valves shall be opera t e d alternatel y thro ugh mi nimum a nd maxi mum te mpe rat ures specified i n Section 8.1.2 in 1000 cy cle increments until completion of t he s…
SEMI F4-1000 © SEMI 1990, 20003
7 Optional Design Requirements
7.1 Flow Limiting Device — Provision for limiting
flow, per SEMI S5, shall be supplied when specified.
7.2 Pressure Relief Devices — Pressure relief devices
must be required in accordance with CGA S-1.1 or S-7.
7.3 Disconnect Shutoff — A disco nnect shutoff shall
be supplied when specified.
7.4 Manual Locking Device — A manual locking
device shall be supplied when specified.
7.5 Electropolish — Cylinder valves shall be
electropolished per SEMI F19 when specified.
7.6 Cleanliness — Cleaning above the minimum
requirements of CGA G-4.1 may be specified.
7.7 Position Indicator — A device for visual
confirmation of open or closed position may be
specified.
8 Qualification Requiremen ts
8.1 General — Any new cylinder valve design or
substantially revised cylinder valve design shall be
tested prior to production to demonstrate compliance
with this specification.
8.1.1 Leakage — Cylinder valves shall be leak tested
using the methods and leak rate limits specified in
SEMI F1 for qualification of components.
8.1.2 Operating Temperature Range — The cylinder
valves shall perform satisfactorily at any temperature
between -40°C (-40°F) and 55°C (131°F).
8.2 Qualification Cylinder Valve Samples — Nine
cylinder valves shall be selected at random from the
pre-production manufacturing phase of the product for
qualification to this specification.
a. One cylinder valve shall be used for the Flow
Coefficient and Transportation Vibration Tests.
b. Three cylinder valves shall be used for the Pressure
Tests.
c. Three cylinder valves shall be used for the
Endurance Test.
d. Two cylinder valves shall be used for the Tip-Over
Tests.
8.3 Flow Coefficient Test — The flow coefficient of a
fully open cylinder valve tested without a flow
restrictor shall be a minimum of 0.1. The method of test
for determining the flow coefficient shall be as
prescribed by SEMI F32.
8.4 Transportation Vibration Test — After being
subjected to vibration for one hour at a frequency of
3400 to 3600 vibrations per minute at an amplitude of
0.8 mm (0.031 in.) to 1.6 mm (0.063 in.), the cylinder
valve shall not exceed the inboard, outboard, and
internal leak rate limits specified.
8.5 Pressure Tests
8.5.1 Back Pressure — The cylinder valve shall not
exceed the internal leak rate limits specified in SEMI
F1 with the cylinder valve closed, the rated pressure
applied at the outlet, and the inlet connected to the leak
detector.
8.5.2 Proof Pressure — The proof p ressure at normal
temperature shall be a minimum of 1.67 times the rated
pressure. Tests shall be conducted following the back
pressure test with the cylinder valve open, the outlet
capped, and the pressure relief port capped or plugged.
After exposure to an aerostatic proof pressure for ten
minutes, the cylinder valve shall not exceed the
inboard, internal, and outboard leak rate limits specified
in SEMI F1.
8.5.3 Burst Pressure — The burst pressure at normal
temperature shall be a minimum of three times the rated
pressure. Tests shall be conducted hydrostatically
following the proof pressure test with the cylinder valve
open, the outlet capped, and the pressure relief port
capped or plugged. Visible outboard leakage is not
permitted during the burst test. After testing, the
cylinder valve need not be functional.
8.5.3.1 Pressure Rating Determination — The rated
pressure shall be less than or equal to the pressure
determined from the burst pressure test as follows:
P ≤ 0.33BT
m
/T
a
Where:
P = Rated pressure
B = The lowest burst pressure recorded for the three
specimens tested
T
a
= The actual tensile strength of the failed test
specimen material obtained from Certified Material
Test Reports.
T
m
= The specified minimum tensile strength of the failed
specimen material.
NOTE 2: The factor of T
m
/T
a
is included to normalize
between the particular steel stock from which the test
specimens were made and the minimum tensile strength of the
specified steel.
8.6 Endurance Test — The cycle l ife of the cylinder
valve shall be at least 5,000 operational cycles. During
and after 5,000 operations, the cylinder valve shall not
exceed the inboard, internal, and outboard leak rate
limits specified in SEMI F1. A cycle shall consist of
one opening and one closing of the cylinder valve.
SEMI F4-1000 © SEMI 1990, 2000 4
8.6.1 Cylinder valves shall be opera ted alternately
through minimum and maximum temperatures
specified in Section 8.1.2 in 1000 cycle increments until
completion of the specified number of cycles. The first
thermal cycle shall take the cylinder valves to
maximum temperature. Cylinder valves shall be at
thermal equilibrium while mechanically cycling.
Initially, and at the completion of every 1000 cycles,
the cylinder valves shall not exceed the inboard,
internal, and outboard leakage tests specified in SEMI
F1 at normal temperature.
8.6.2 The cylinder valve inlet pressu re shall be the
cylinder valve rated pressure. Cylinder valves shall be
cycled at a rate of one cycle per ten seconds, equally
divided between opening and closing. During the off
cycle, the cylinder valve's downstream pressure shall be
allowed to decay to 50% or less of the inlet pressure.
8.7 Tip-Over Test
After being s ubjected to tip-over
tests the cylinder valves shall show no evidence of
structural damage, shall not exceed the inboard,
internal, and outboard leak rates specified in SEMI F1,
and shipping caps or other protective devices shall be
able to be removed or adjusted so that the valve can be
operated.
8.7.1 Tip-over testing shall be conducted in
accordance with CGA V-9, Section 5.2.6.4.
8.7.2 The tip-over tests shall be performed with the
cylinder valve installed on a 166 kPa (2400 psig), 250
mm (10 inches) diameter by 1550 mm (61 inches) long
(including cap) gas cylinder, or onto a smaller cylinder
if the valve is restricted by the manufacture for use on
the smaller cylinder.
8.7.3 A shipping cap or other protec tive device shall
be installed onto the cylinder during the tip-over tests.
If a special cap or protective device is used it shall
conform to the requirements of CGA V-9, Appendix E-
49 CFR cylinder drop protocol.
9 Manufacturing Requirements
9.1 Acceptance Testing
9.1.1 Each cylinder valve shall be acceptance tested
for inboard, internal, and outboard leakage per SEMI
F1.
9.1.2 Each actuator shall be tested fo r leakage of less
than 1 sccm at 550 kPa (80 psig).
9.1.3 Each cylinder valve shall be vi sually inspected
for cleanliness, damage, proper markings, and actuator
function, as a minimum.
9.2 Marking — Each cylinder valve shall be
permanently identified with the following minimum
information:
9.2.1 Manufacturer’s name or logo.
9.2.2 Manufacturer’s part number or part number
code.
9.2.3 Outlet type (CGA number or other specification
identification).
9.2.4 Pressure relief device marked in accordance with
CGA pamphlet S-1.1 or other specification
identification.
9.2.5 Manufacturer’s serial number or code that will
provide traceability for materials, test data, and
assembly date.
9.2.6 Flow limiting information when the flow
limiting device is integral to the cylinder valve and not
intended for removal.
9.3 Traceability — The manufacturer shall use a
program to qualify raw materials, parts, assemblies, and
purchased components and to provide traceability of all
components (manufactured or purchased) used in
production of cylinder valves.
9.4 Instructions
9.4.1 Clear, concise instructions and diagrams stated
in terms clearly understandable and adequate for proper
installation and safe operation shall be provided with
each cylinder valve.
9.4.2 Instructions for periodic maintenance or repair,
as required, shall be made available by the
manufacturer. No repairs or maintenance shall be
conducted without these instructions. Parts that require
replacement shall be identified.
9.5 Maintenance — Ideally, the cylinder valve shall be
capable of fulfilling the performance and qualification
requirements of this specification after any of the
maintenance procedures specified by the cylinder valve
manufacturer. Maintenance shall be performed by only
those persons the cylinder valve manufacturer deems
qualified.
10 Related Documents
10.1 Military Specification
5
MIL-DTL-2E — Valves, Cylinder, Gas
5 Military Specification, Commanding Officer, Naval Publications
and Forms Center, Attention: MPFC 105, 5801 Tabor Avenue,
Philadelphia, PA 19120
SEMI F4-1000 © SEMI 1990, 20005
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user's attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.