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SEMI F62-0701 © SEMI 2001 6 Figure 3 Ambient Temperature Test Procedure Flow Chart Install DUT M=1 Tem=Tmin MFC Setpoint N=1 0% N=2 25% N=3 50% N=4 75% N=5 100% Record Tem & Qam @ time intervals 10 Times N=5 Setpoint…

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SEMI F62-0701 © SEMI 20015
Figure 1b
Gas Temperature Effect Test Apparatus
NOTE 5: Flow Standard may be located upstream or down stream.
Step m T
em
1. T
min
2. T
min
+ 1/4 (T
max
- T
min
)
3. T
min
+ 1/2 (T
max
- T
min
)
4. T
min
+ 3/4 (T
max
- T
min
)
5. T
max
6. T
min
+ 3/4 (T
max
- T
min
)
7. T
min
+ 1/2 (T
max
- T
min
)
8. T
min
+ 1/4 (T
max
- T
min
)
9. T
min
Figure 2
Ambient Temperature Setpoint (T
em
)
DUT
Tg
Flow
Standard
Ts
Hot Plate or Heater Tape
Surrounding MFC Base
not MFC electronics
N2
Heat Exchangers
TB
TE
Vii Vio
SEMI F62-0701 © SEMI 2001 6
Figure 3
Ambient Temperature Test Procedure Flow Chart
Install DUT
M=1
Tem=Tmin
MFC Setpoint
N=1 0%
N=2 25%
N=3 50%
N=4 75%
N=5 100%
Record Tem &
Qam @ time
intervals 10 Times
N=5
Setpoint=0
N=N+1
Set
Te=Te(M+1)
Record Te and Qind for zero
setpoint @ time intervals
Te Stable?
M=8 ?
END
M=M+1
No
Yes
No
Yes
Yes
No
SEMI F62-0701 © SEMI 20017
Figure 4
Gas Temperature Test Procedure Flow Chart
Te=25
O
C
Tg=Te
N=1
Record Tg, Te, Qa
Tg=Te+10
O
C
Record Tg, Te, Qa
N=5N=N+1
End
MFC Setpoint
N=1 0%
N=2 25%
N=3 50%
N=4 75%
N=5 100%
No
Yes