semi合集-English.pdf - 第2888页

SEMI E107-1102 © SEMI 2001, 2002 13 1 8 18 0.12345000e+ 03 0.91234000e+ 03 1.06367000e+ 03 7.27391000e+ 03 0.51789500 e+ 0 3 4.16879000e+ 03 0.78889000e + 03 6.2 1024000e+ 03 4.8991962 3e+ 06 " block-f ail" 2 1…

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SEMI E107-1102 © SEMI 2001, 2002 12
<AnalogDataUnit>8 18 100 CONTACT –0.600 V 200 IDD 125.0 mA PASS 300 IDDS 100.0 uA
PASS</AnalogDataUnit>
<AnalogDataUnit>9 18 100 CONTACT –0.567 V 200 IDD 120.2 mA PASS 300 IDDS 321.0 uA
FAIL</AnalogDataUnit>
<AnalogDataUnit>10 18 100 CONTACT –0.612 V 200 IDD 123.4 mA PASS 300 IDDS 99.4 uA
PASS</AnalogDataUnit>
<AnalogDataUnit>11 18 100 CONTACT 99999 V 200 IDD 99999 mA PASS 300 IDDS 99.4 uA
PASS</AnalogDataUnit>
</AnalogData>
<ErrorTotal>234</ErrorTotal>
<TestDie>3</TestDie>
<Map>
R1-2 Example Datafile
Map = {
FormatRevision = “2.00"
CreateDate = “03-18-2000 15:07:50”
ProductId = " product1234"
LotId = " lot1234"
WaferId = “wafer1234”
Status = “prerepair_map”
Comment = " Engineering Test"
TestProgramName = " pro123a"
TestEquipmentId = “tester1”
WaferOrientation = 180
WaferSize = 200
DieSizeX = 4.8987000000e+ 03
DieSizeY = 8.7395000000e+ 03
ReferenceDieList = {
PosX = -2030.55 PosY = 1427.98
}
WaferCoordinate = “TopLeft”
DieCoordinate = “BottomLeftXY”
MapType = “Die”
BinType = “Decimal”
BinList = {
Code = 001 Count = 35 Quality = “Pass”
Code = 002 Count = 4 Quality = “Fail”
Code = 003 Count = 1 Quality = “Fail”
}
Data = {
007 018 001
008 018 002
009 018 003
010 018 002
}
ErrorClassList = {
Class = “0” Quality = " bit-fail"
Class = “1” Quality = " line-fail"
Class = “2” Quality = " block-fail"
}
FailBitDataTemplate = Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize Area
DefectCate
FailBitData = {
SEMI E107-1102 © SEMI 2001, 2002 13
1 8 18 0.12345000e+ 03 0.91234000e+ 03 1.06367000e+ 03 7.27391000e+ 03
0.51789500e+ 03 4.16879000e+ 03 0.78889000e+ 03 6.21024000e+ 03 4.89919623e+ 06 " block-fail"
2 10 18 3.03120000e+ 03 3.03210000e+ 03 1.58330000e+ 03 1.58580000e+ 03
3.03165000e+ 03 1.58455000e+ 03 9.00000000e-01 2.50000000e+ 00 2.25000000e+ 00 " bit-fail"
}
AnalogDataTemplate = XAddress YAddress TestNumber Note Measure
MeasureUnit TestNumber Comment Measure MeasureUnit TestResult
TestNumber Comment Measure MeasureUnit TestResult
Invalid = “99999”
AnalogData = {
8 18 100 “CONTACT” –0.600 “V” 200 “IDD” 125.0 “mA” “PASS” 300 “IDDS” 100.0 “µ A”
“PASS”
9 18 100 “CONTACT” –0.567 “V” 200 “IDD” 120.2 ”mA” “PASS” 300 “IDDS” 321.0 “µ A”
“FAIL”
10 18 100 “CONTACT” –0.612 “V” 200 “IDD” 123.4 “mA” “PASS” 300 “IDDS” 99.4 “µ A”
“PASS”
11 18 100 “CONTACT” 99999 “V” 200 “IDD” 99999 “mA” “PASS” 300 “IDDS” 99.4 “µ A”
“PASS”
}
ErrorTotal = 234
TestDie = 3
}
Table R1-1 Items and Attributes Used Yield Management specific part
Name Element or Attribute Define In Mandatory and Optional Relation Items
Comment Attribute Yms Map Data Items Optional ---
TestProgramName Attribute Yms Map Data Items Optional ---
TestEquipmentId Attribute Yms Map Data Items Optional ---
DieCoordinate Attribute Yms Map Data Items Optional WaferLocation
ErrorClassList Element Yms Map Data Format Optional ---
ErrorClassNumber Attribute Yms Map Data Items Optional ErrorClassList
ErrorQuality Attribute Yms Map Data Items Optional ErrorClassList
ErrorDescription Attribute Yms Map Data Items Optional ErrorClassList
FailBitDataTemplate Element Yms Map Data Format Optional ---
FailBitData Element Yms Map Data Format Optional FailBitDataTemplate
AnalogDataTemplate Element Yms Map Data Format Optional ---
Invalid Attribute Yms Map Data Items Optional ---
AnalogData Element Yms Map Data Format Optional AnalogDataTemplate
ErrorTotal Attribute Yms Map Data Items Optional ErrorClassList
TestDie Attribute Yms Map Data Items Optional ---
SEMI E107-1102 © SEMI 2001, 2002 14
Table R1-2 Attributes Used for FailBitData
Item Name Item or Attribute Define In Mandatory and Optional Relation Items
Seq Attribute Map Data Items Mandatory ---
XAddress Attribute Map Data Items Mandatory WaferLocation
YAddress Attribute Map Data Items Mandatory WaferLocation
XMin Attribute Map Data Items Mandatory DieCoordinate
XMax Attribute Map Data Items Mandatory DieCoordinate
YMin Attribute Map Data Items Mandatory DieCoordinate
YMax Attribute Map Data Items Mandatory DieCoordinate
XCenter Attribute Map Data Items Mandatory DieCoordinate
YCenter Attribute Map Data Items Mandatory DieCoordinate
XSize Attribute Map Data Items Mandatory DieCoordinate
YSize Attribute Map Data Items Mandatory DieCoordinate
Area Attribute Map Data Items Mandatory DieCoordinate
DefectCate Attribute Map Data Items Mandatory ErrorClassList
XMinPhysic Attribute Map Data Items Mandatory DieCoordinate
XMaxPhysic Attribute Map Data Items Mandatory DieCoordinate
YMinPhysic Attribute Map Data Items Mandatory DieCoordinate
YMaxPhysic Attribute Map Data Items Mandatory DieCoordinate
IoNumber Attribute Map Data Items Mandatory DieCoordinate
XMinLogic Attribute Map Data Items Mandatory DieCoordinate
XMaxLogic Attribute Map Data Items Mandatory DieCoordinate
YMinLogic Attribute Map Data Items Mandatory DieCoordinate
YMaxLogic Attribute Map Data Items Mandatory DieCoordinate
Table R1-3 Attributes Used for AnalogData
Item Name Item or Attribute Define In Mandatory and Optional Relation Items
XAddress Attribute Map Data Items Mandatory WaferLocation
YAddress Attribute Map Data Items Mandatory WaferLocation
TestNumber Attribute Map Data Items Mandatory ---
Note Attribute Map Data Items Optional ---
Measure Attribute Map Data Items Optional ---
MeasureUnit Attribute Map Data Items Optional ---
Std Attribute Map Data Items Optional ---
Parameter Attribute Map Data Items Optional ---
ParameterUnit Attribute Map Data Items Optional ---
UpperLimitData Attribute Map Data Items Optional ---
LowerLimitData Attribute Map Data Items Optional ---
TestResult Attribute Map Data Items Optional ---