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SEMI F68-1101 © SEMI 2001 6 Purge Gas DUT Pure Gas (>9N Purity ) AP IM S or Ultra trace An aly tical Instr umen tatio n Impurity Analy zer P1 Legend DUT = Devic e Unde r Test P1 = Test Pr essure R1 = Pu re Gas 0–100 p…

SEMI F68-1101 © SEMI 20015

8.3.7.2 When the impurity level is in the range of the

APIMS or ultratrace analytical instrumentation, Close

V13 and Open V12. Close V9 and V10, Open V11.

8.3.7.3 Monitor impurity level until stable.

8.3.8 Initiate Impurity Challenge:

8.3.8.1 Isolate the DUT and APIMS or ultratrace

analytical instrumentation. Close V7 and V12, open

V13.

8.3.8.2 Open V3 and adjust R2 to the suggested

operating pressure range of 275–415 kPa (40–60 psig).

Open V5 and set MFC2 to the desired flow. (See

Appendix 1 to determine the desired flow for MFC2).

8.3.8.3 Verify test gas impurity. Close V5 and V11,

Open V4, V8, and V10 supplying test gas to the

impurity analyzer. Monitor test gas impurity until

stable and verified to theoretical impurity value (See

Appendix 1).

8.3.8.4 Initiate test. Isolate impurity analyzer, Close

V8 and V10, Open V11. Input test gas through the

DUT to the APIMS or ultratrace impurity analyzer,

Open V6 and V7. Close V13 and Open V12.

8.3.8.5 Monitor and record the outlet impurity level

until stable.

8.3.8.6 If necessary, repeat the test for a different

challenge gas mixture.

8.3.9 Determination of instantaneous purifier

efficiency:

8.3.9.1 The test may be done on newly activated media

or may be done using existing media that has been

regenerated. The test may be destructive to the DUT

(purifier).

8.3.9.2 Repeat the test as necessary to provide a

statistically valid number of test results. A discussion

of what is statistically valid is beyond the scope of this

document.

9 Exposure Precautions

9.1 The APIMS or ultratrace analytical instrument

should not be exposed to high levels of impurities.

After installation of the purifier, it should be purged

well, per the manufacturer’s recommendation. A

typical recommendation might be to purge a minimum

of 150 bed volumes before directing the flow to the

APIMS.

9.2 Alternative instrumentation should be used to

measure the challenge gas when the concentration of

the challenge gas is greater than the normal calibration

range of the APIMS or other ultratrace analytical

instrumentation.

10 Calculation of Instantaneous Purifer

Efficiency

10.1.1.1 Use the following formula to calculate the

Instantaneous Purifier Efficiency:

1001% ×

−=

impurityinlet

impurityoutlet

eff

Example: Let impurity outlet = 10 ppb and impurity

inlet = 10 ppm,

9.99100

000,10

1% =×

−=eff

11 Reporting Results

11.1 The following test conditions should be reported:

11.1.1 Date and time of test,

11.1.2 Operator,

11.1.3 Pure gas flow rate (slpm),

11.1.4 Challenge gas flow rate (sccm),

11.1.5 Test pressure kPa (psig or psia),

11.1.6 DUT operating temperature (° C),

11.1.7 Purifier manufacturer, model, and serial

number, and volume,

11.1.8 Ultratrace analytical instrumentation used,

11.1.9 Test gas impurities and levels (Table 1), and

11.1.10 Calibration certificates for the mass flow

devices, pressure gauges and ultratrace analytical

instrumentation.

12 Related Documents

SEMI F30 — Start-up and Verification of Purifier

Performance Testing for Trace Gas Impurities and

Particles at an Installation Site.

SEMI F43 — Test Method for Determination of

Particle Contribution by Point-Of-Use Purifiers.

NOTE 2: Unless otherwise indicated, all documents cited

shall be the latest published versions.

SEMI F68-1101 © SEMI 2001 6

Purge Gas

DUT

Pure Gas

(>9N Purity)

APIMS

Ultratrace

Analytical

Instrumentation

Impurity Analyzer

Legend

DUT = Device Under Test

P1 = Test Pressure

R1 = Pure Gas 0–100 psig Regulator

R2 = Challenge Gas 0–100 psig Regulator

R3 = Vent Gas 0–100 psig Back Pressure Regulato

V1 = Pure Gas Source Isolation Valve

V2 = Pure Gas System Isolation Valve

V3 = Challenge Gas Source Isolation Valve

V4 = Challenge Gas System Isolation Valve

V5 = Challenge Gas Vent Isolation Valve

Challenge Gas

(~1% Impurity)

V6 V7

Vent

V10

V11

MFC1

6 = DUT Inlet Isolation Valve

V7 = DUT Outlet Isolation Valve

V8 = DUT Bypass Inlet Isolation Valve

V9 = DUT Bypass Outlet Isolation Valve

V10 = Impurity Analyzer Sample Isolation Valve

V11 = Impurity Analyzer Purge Gas Isolation Valve

V12 = APIMS/UAI Sample Isolation Valve

V13 = APIMS/UAI Purge Gas Isolation Valve

MFC1 = Pure Gas Mass Flow Controller

MFC2 = Challenge Gas Mass Flow Controller

V13

V12

MFC2

Figure 1

Suggested Point of Use Purifier Efficiency Test Setup

Table 1 Efficiency Of DUT Parameters

EFFICIENCY OF DUT

Impurity Pure Gas Flow Challenge Flow Inlet Conc Outlet Conc Zero Gas Analyzer

(slpm) (sccm) (ppm) (ppb) (ppb)

NMHC

APPENDIX 1

MFC SIZING

NOTE: The material in this appendix is an official part of SEMI F68 and was approved by full letter ballot

procedures on August 27, 2001.

A1-1 To determine purifier efficiency, the

concentration of impurity entering the purifier and the

quantity of impurity downstream of the purifier must be

determined.

A1-2 Determine the manufacturer’s recommended

flow rate for the purifier. As an example, assume a

flow rate of 5 slpm.

A1-3 Determine the flow rate challenge gas required.

As an example, 5 sccm of a 1% challenge gas would be

blended into 4,995 sccm of pure gas to create at 10 ppm

test gas.

PPM 10

sccm 4,995sccm 5

sccm 5PPM 10,000

Gas Test =

As a large scale system, with a flow of 1,000 slpm, a

flow of 1 slpm of challenge gas (1% impurity) is

required to create a 10 ppm challenge.

PPM 10

slpm 999slpm 1

slpm 1PPM 10,000

Gas Test =

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