semi合集-English.pdf - 第2959页
SEMI E109.1-0704 © SEMI 2002, 2004 5 Parameter Name Parameter Range SECS-II Data Item RPMAcknowledge Enumerated: 0 = Acknowledge, servic e h a s been performed 1 = Service does not exist 2 = Cannot perform now 3 = At lea…
SEMI E109.1-0704 © SEMI 2002, 2004 4
Parameter Name Parameter Range SECS-II Data Item
PodPropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
PortID U1(101–255) PTN
PortList List of PortID L,n
1.<PTN
1
>
:
n.<PTN
n
>
ReticleAttributeData Any ATTRDATA
ReticleAttributeID 1–40 characters ATTRID
ReticleLocation-
AttributeData
Any ATTRDATA
ReticleLocation-
AttributeID
1–40 characters ATTRID
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
RETPLACEINSTR
ReticlePodLocationID 1–80 characters CATTRID
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
RETREMOVEINSTR
ReticleID 1–64 characters RETICLEID
ReticleLocation-
PropertiesList
List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.<ATTRID
n
>
2.<ATTRDATA
n
>
ReticlePropertiesList List of AttributeID and AttributeData L,n
1.L,2
1.<ATTRID
1
>
2.<ATTRDATA
1
>
:
n.L,2
1.< ATTRID
n
>
2.< ATTRDATA
n
>
SEMI E109.1-0704 © SEMI 2002, 2004 5
Parameter Name Parameter Range SECS-II Data Item
RPMAcknowledge Enumerated:
0 = Acknowledge, service has been performed
1 = Service does not exist
2 = Cannot perform now
3 = At least parameter is invalid
4 = Acknowledge, service will be performed with completion
notified later with parameters for response
5 = Service is not completed or prohibited
6 = no such objects exist
7–63 Reserved
SVCACK
RPMStatus List of RPMAcknowledge and Status L,2
1.<SVCACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
ServiceStatus “ServiceStatus” PARAMNAME
ServiceStatusValue Enumerated:
OUT OF SERVICE = 0
IN SERVICE = 1
PARAMVAL = U1
SourceLocation 1–80 characters RPMSOURLOC
Status List of n errors L,n
1.L,2
1.<ERRCODE
1
>
2.<ERRTEXT
1
>
:
n.L,2
1.<ERRCODE
n
>
2.<ERRTEXT
n
>
5.4 Object Service Parameter Mapping
5.4.1 Table 3 maps the SEMI E109 service parameters that use S14F19 to SECS-II data items.
Table 3 Object Service Parameters for SECS-II
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectAction “CancelMoveReticle”
“MoveReticle”
“OktoUseReticle”
“RejectReticle”
“Re-qualifyReticle”
SVCNAME 20
ObjectAction-
ParameterRequest
List of one or more arguments (parameters) providing
additional information concerning the action requested.
Structure composed of ServiceParameterName and
ServiceParameterValue
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPVAL
m
>
SEMI E109.1-0704 © SEMI 2002, 2004 6
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectActionParameter
Result
List on one or more arguments (parameters) providing
additional information concerning the result of the action
requested.
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPIVAL
m
>
RPMAcknowledge Enumerated SVCACK 10
ServiceParameterName " ReticleID"
" PortID"
" DestinationLocation"
" SourceLocation"
" QualificationIntervalTime"
“Status”
SPNAME 20
ServiceParameterValue Depends on parameter used SPVAL 10, 20, 51, 52
Status List of one or more arguments (parameters) providing
information concerning the result of the action requested.
Structure composed of ErrorText and ErrorCode.
L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
ErrorCode Enumerated ERRCODE 51
ErrorText Text ERRTEXT 20
5.5 SECS-II Data Items without Corresponding E109 Parameters
5.5.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E109 service parameters.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used by S3,F17 to differentiate between “Bind”,
“CancelPod”, “CancelPodNotification”, “CancelPodOut”,
“CancelPodAtPort”, “CancelBind”, “Clamp”,
“ClosePod”, “IndexDown”, “IndexUp”, “OpenPod”,
“PodComplete”, “PodIn”, “PodNotification”, “PodOut”,
“PodRelease”, “PodTagReadData”, “PodTagWriteData”,
“ProceedWithPod”, and “Unclamp” services.
Note: the text between the quotes is the actual value used
in the parameter CARRIERACTION.
CARRIERACTION
Used to satisfy SECS-II conventions for linking a multi-
block inquiry with a subsequent multi-block message.
Neither required nor specified by RPMS.
DATAID
Used to inform receiver of total message length size for
SECS-II multi-block conventions. Neither required nor
specified by SEMI E109.
DATALENGTH
Used to satisfy SECS-II multi-block requirements.
Neither required nor specified by SEMI E109.
GRANT