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SEMI E102-0600 © SEMI 2000 32 31: setMat erialTra ckingLocat ion(mate rialTrac kingLocat ion stk9MTL1 ) 40: se tMateria lTrackin gLocation (mater ialTrack ingLocatio n NULL) 41: Durable LocationCh angedEve nt 42: m akeMa…

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SEMI E102-0600 © SEMI 200031
R1-2 Scenarios
R1-2.1 Scenario One — Interactions at the Interface Level
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine Stk9, DestPort Stk9/Manual)
3: returns Job Handle TrJob1
7: makeInTransit()
20: setMaterialTrackingLocation(materialTrackingLocation Ohs2)
21: DurableLocationChangedEvent
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
10: Transfer (aaa, Bay_Out) (Internal Interface)
11: Transfer Command to Stk4 (src Stk4, dest st4/Bay_Out) (Stocker SEM)
12: Transfer Command Updates (Stocker SEM)
13: Transfer Command Complete (Stocker SEM)
14: Transfer complete (Internal Interface)
16: Transfer (aaa, stk4/Bay_Out, stk9/Bay_In) (Internal Interface)
17: Transfer Command to Ohs2 (src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
18: Transfer Command Update (IBSEM)
19: Transfer Update (Internal Interface)
23: Transfer Command Complete (IBSEM)
24: Transfer Complete (Internal Interface)
25: Transfer (carrier aaa, src Bay_In, dest Man_Out) (Internal Interface)
26: Transfer Command to stk9 (src Bay/In, dest Man_Out) (Stocker SEM)
27: Transfer Command Updates (Stocker SEM)
28: Transfer Command Complete CarrierStoredAltEvent (Stocker SEM)
29: Transfer Complete CarrierStoredAlt (Internal Interface)
8: MaterialContainerStateChangedEvent
MTSC determines AMHS Route (Internal Service)
9: getUnit()
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
15: removeMaterial(MaterialContainer aaa)
22: addMaterialToTrack(MaterialContainer aaa)
1: setUnit( unitvalue)
30: getMaterialTrackingLocation("stk9MTL")
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-2
Scenario Case 1
SEMI E102-0600 © SEMI 2000 32
31: setMaterialTrackingLocation(materialTrackingLocation stk9MTL1)
40: setMaterialTrackingLocation(materialTrackingLocation NULL)
41: DurableLocationChangedEvent
42: makeManualControl()
43: MaterialContainerStateChangedEvent
45: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
38: CarrierRemoved (Stocker SEM)
39: Carrier Removed (Internal Interface)
37: removeMaterial(MaterialContainer aaa)
33: removeMaterial(MaterialContainer aaa)
34: addMaterialToTrack(MaterialContainer aaa)
44: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
46: removeFinishedJob(Job TrJob1)
47: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
35: Transfer CommandResumed Event (Stocker SEM)
36: Transfer Command Complete (Stocker SEM)
32: DurableLocationChangedEvent
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-3
Scenario Case 1 (continued)
SEMI E102-0600 © SEMI 200033
R1-2.2 Scenario Two — Base Scenario for Delivery from Production Equipment to Stocker
MTSC reserves and manages AMHS Equipment Capacity(internal)
MTSC determines AMHS route(internal)
10: Transfer Command to Agt1(carrier bbb, src. eq.1, dest. Stk. 2/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt1 (IBSEM)
14: Transfer Command Complete (IBSEM)
17: Transfer Command to Stk. 2 (carrier bbb, src. Stk. 2/Bay_In, dest. Stk. 2/Bay_out)(StockerSEM)
18: Transfer Command Updates from Stk. 2 (Stocker SEM)
19: Transfer Command Complete (StockerSEM)
20: Transfer Command to Ohs1(carrier bbb, src. Stk. 2/Bay_Out, dest. Stk. 4/Bay_In)(IBSEM)
21: Transfer Command Updates from Ohs1 (IBSEM)
24: Transfer Command Complete (IBSEM)
7: makeInTransit()
12: setMaterialTrackingLocation( MaterialTrackingLocation Agt1)
15: setMaterialTrackingLocation( MaterialTrackingLocation Stk.2)
22: setMaterialTrackingLocation( MaterialTrackingLocation Ohs1)
25: setMaterialTrackingLocation(MaterialTrackingLocation Stk.4)
2: requestJob(Jobtype Transport, Priority 1, Deadline Time1, container bbb, SourceMachine eq. 1, SourcePort 1, DestinationMachine stk7)
3: Return Job Handle TrJob1
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
23: DurableLocationChangedEvent
26: DurableLocationChangedEvent
8: MaterialContainerStateChangedEvent
MTSC determines relay
priortiy(internal)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
1: setUnit(unitvalue)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-4
Scenario Case 2