semi合集-English.pdf - 第4998页

SEMI M13-1103 © SEMI 1988, 2003 10

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SEMI M13-1103 © SEMI 1988, 2003 9
APPENDIX 1
SEMI OCR CHARACTER OUTLINES
NOTICE: The material in this appendix is an official part of SEMI M13 and was approved by full letter ballot procedures on
July 12, 1998.
SEMI M13-1103 © SEMI 1988, 2003 10
SEMI M13-1103 © SEMI 1988, 2003 11