semi合集-English.pdf - 第1160页

SEMI E5-1104 © SEMI 1982, 2004 102 Stream,Function Name (Mnemonic) Direction S4,F0 Abort Transaction (S4F0) S,H->E Description Same form as S1,F 0. Structure Exception Stream,Function Name (Mnemonic) Direction S4,F1 R…

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SEMI E5-1104 © SEMI 1982, 2004 101
Default values, tl = 10 sec., t2 = 60 sec., t3 = 70 sec.
NOTE 6: t1, t2, t3 defined for Stream 4 are not to be confused with timeouts T1, T2, T3, and T4 defined in SEMI E4 (SECS-I).
Figure 5
Material Control-Handshake Flowchart
SEMI E5-1104 © SEMI 1982, 2004 102
Stream,Function Name (Mnemonic) Direction
S4,F0 Abort Transaction (S4F0) S,H->E
Description
Same form as S1,F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S4,F1 Ready to Send Materials (RSN) S,H<->E,reply
Description
The sender advises the receiver that some material is awaiting transfer.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F2 Ready to Send Acknowledge (RSA) S,H<->E
Description
Acknowledge or error
Structure
<RSACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F3 Send Material (SMN) S,H<->E
Description
The receiver advises the sender that it is ready to receive material and that its transfer mechanism is running.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F4 Not Used
SEMI E5-1104 © SEMI 1982, 2004 103
Stream,Function Name (Mnemonic) Direction
S4,F5 Handshake Complete (HCN) S,H<->E
Description
Receiver advises sender that the handshake is complete. The sender may now stop its transfer mechanism.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F6 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F7 Not Ready to Send (ABN) S,H<->E
Description
Sender advises receiver that no material is being sent. The receiver may now stop its transfer mechanism.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F8 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F9 Stuck in Sender (SSN) S,H<-E
Description
An error from the sender to the host. The time between the receipt of Material (SMN) and the material leaving the sender’s
sensor exceeds the sender’s t1 timeout. The sender goes to a hold state until the disposition of the stuck material is determined.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F10 Not Used