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SEMI S13-0305 © SEMI 1998, 2005 4 Decontami nation and dec ommissioning NOTE 7: Some documentation criteria r egarding Safe ty interlock systems are given in Appe ndix 1 of this guideline at the time of publication. 6.…
SEMI S13-0305 © SEMI 1998, 2005 3
5 Terminology
NOTE 3: Terminology defined in SEMI S1, SEMI S2, SEMI S6, SEMI S8, SEMI S10, SEMI S12, SEMI S14 and SEMI S16 is
incorporated herein by reference.
5.1 Definitions
5.1.1 consumable parts — parts which are recognized by the equipment supplier as having a useful lifetime which
is expected to be significantly less than the lifetime of the equipment.
NOTE 4: Consumable parts include some parts that degrade gradually (such as o-rings) and some that degrade suddenly (such as
drive belts).
5.1.2 decommissioning — the process of removing equipment from service for disposition by sale, storage, or
disposal.
5.1.3 documents provided to the equipment user — documents provided by the equipment supplier, such as
operation manual, maintenance manual, installation manual, safety manual, or OEM manual, which are intended for
use with equipment.
NOTE 5: Additional safety features provided in the equipment according to the equipment user’s requisition or request may be
described separately. Documents concerning the additional safety features may be provided with the documents provided to the
equipment user as a separate attachment.
5.1.4 evaluation report — a report describing the results of an evaluation to determine the conformance of
equipment to a SEMI document.
5.1.5 supporting device — a device which is prepared to assist in the use of equipment.
5.1.6 unjamming — service task used to loosen automated material handler from entanglement.
6 General Criteria of Documents Provided to the Equipment User
6.1 The EHS information needed to perform a task should either be included in the document provided to the user
that describes how to perform a task or be provided separately in another document. In latter case, the document
provided to the user describing the task should identify where to find EHS information relevant to the task.
6.2 Documents provided to the equipment user should provide specific instructions to enable safe installation,
operation, maintenance, decontamination and decommissioning of the equipment.
EXCEPTION: Any procedure that is to be performed only by the equipment supplier’s personnel does not need to
be described in the documentation provided to the equipment user.
NOTE 6: A service manual may be included in the documents provided by the equipment supplier based on the contract.
6.2.1 The documents provided to the equipment user should describe the hazards inherent in equipment, warn of the
potential of exposure to hazards, and provide information as to how to minimize risk.
6.3 The equipment supplier should identify, within the documents provided to the equipment user, the intended
audience for each equipment document supplied to the user.
6.4 The equipment supplier should provide, in the documents provided to the equipment user, at least the EHS
information related to items in the following list. Other SEMI “S” series documents address these subjects for
inclusion in documents provided to the equipment user.
Safety interlocks
Emergency shutdown
Ergonomics
Seismic performance
Environmental performance
Industrial Hygiene
Fire Protection
SEMI S13-0305 © SEMI 1998, 2005 4
Decontamination and decommissioning
NOTE 7: Some documentation criteria regarding Safety interlock systems are given in Appendix 1 of this guideline at the time
of publication.
6.5 Where contractually agreed upon, it is recommended that the documents provided to the equipment user should
be provided in the primary languages of the location in which the equipment is to be used.
NOTE 8: Where required by law, the documents provided to the equipment user must be provided in the primary languages of
the location in which the equipment is to be used.
6.6 Each document should identify the language(s) in which it was originally written.
6.7 Procedures needed to maintain the effectiveness of safety design features or devices should be described in the
documents provided to the equipment user.
6.8 The documentation provided to the user may state that the user is responsible for analyzing and controlling the
risks of work not described in the documentation.
6.9 The Equipment supplier should provide information in the documents provided to the equipment user about
how to check if the documents are applicable for the particular model.
6.9.1 Each document provided to the equipment user (e.g., operations, maintenance, installation, drawings, sub-
systems) should include at least a reference to a list of all documents that are necessary to compose a complete set of
documents for the equipment model. Reference may be made to a website containing the list.
7 Hazards Inherent in Equipment
7.1 The hazards inherent in equipment identified as part of the SEMI S2 evaluation should be described in the
documents provided to the equipment user.
7.2 The summary should include the location and the type of each hazard in a safety section of the documents
provided to the equipment user.
7.3 The documents provided to the equipment user should include a list of hazardous materials (e.g., lubricants,
cleaners, and coolants) required for maintenance, ancillary equipment or peripheral operations.
NOTE 9: See §11 for discussion of MSDSs.
7.4 Hazards related to by-products and effluents of supplier-characterized baseline processes should be described in
the documents provided to the equipment user.
7.5 The documents provided to the equipment user should describe the safety measures in the equipment that
mitigate risk in the event of fire, explosion or chemical leakage within the equipment or of earthquake.
8 Hazardous Energy Control Procedures
8.1 Any source of hazardous energy (such as electrical, chemical, thermal, mechanical, radiation, pneumatic or
hydraulic energy) that exists in equipment and which may pose a risk to workers maintaining or servicing the
equipment should be described in the documents provided to the equipment user along with the procedures for
isolation (“lockout/tagout”) and control of each of the hazardous energies.
NOTE 10: The procedures must allow compliance with requirements at the locations of use. In the USA, the procedure must be
consistent with 29 CFR1910.147.
9 Hazard Alerts
9.1 The equipment supplier should explain, in the documents provided to the equipment user, the meaning of
hazard alerts. Examples of hazard alerts include: visual alerts, auditory alarms, safety labels, status indicators; or
hazard alert systems integral with the equipment’s operating system (e.g., displayed through the video display).
9.2 Descriptions of the label locations and, if appropriate, additional safety information relating to the hazards they
describe should also be provided.
9.3 Pictographs or symbols may be used to represent the hazard alerts in the document provided to the equipment
user.
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NOTE 11: Pictographs or symbols may also be adapted to help communicate safety information in installation instructions,
operation and maintenance manuals, and other similar written communication relating to a product.
NOTE 12: If pictographs or symbols are used instead of text, then it is recommended that the documentation include
explanations of the pictographs or symbols. This recommendation does not apply if the pictographs are used with text messages,
as is the common practice in Hazard Alert Labels that conform to SEMI S1.
10 Hazards Inherent in Tasks
10.1 In the documents provided to the equipment user, hazards inherent in each task should be indicated using the
signal words “Danger,” “Warning,” or “Caution”, as described in SEMI S1. The signal word and the explanation of
the hazard should be highlighted in the documentation (e.g., by enlarged lettering or by being enclosed in a box).
The equipment supplier should include the definitions of “Danger,” “Warning,” and “Caution” that are provided in
SEMI S1 in the documents provided to the equipment user if those terms are used.
10.2 Specific instructions should be provided for routine Type 4 energized electrical work tasks (as defined in
SEMI S2), excluding troubleshooting. General procedures for troubleshooting, including Type 4 work, should be
provided.
NOTE 13: SEMI S2 provides guidance that suppliers should design the equipment to minimize the need to calibrate, modify,
repair, test, adjust, or maintain equipment while it is energized, and to minimize work that must be performed on components
near exposed energized circuits. SEMI S2 also states that the supplier should move as many tasks as practical from category
Type 4 to Types 1, 2, or 3.
NOTE 14: NFPA70E describes the identification of the Flash Protection Boundary in the USA.
10.3 Specific instruction may be provided for the unjamming task.
NOTE 15: “Unjamming” (also called “jam clearing”) is considered to be a service task.
10.4 Each maintenance and service task should include a list of the materials required for the task.
11 Material Safety Data Sheet (MSDS)
11.1 The equipment supplier should provide MSDSs covering those chemical substances which are inherent in, or
shipped with, the equipment.
11.2 For those chemical substances which are used for processing, maintenance, or service of equipment, but are
not provided in or with the equipment, the documents provided to the equipment user should state that the user must
obtain the MSDSs from their chemical suppliers, rather than from the equipment supplier. The user is responsible
for obtaining process related MSDSs and should contact their suppliers to obtain them.
NOTE 16: The equipment user may request, from the equipment supplier, the list of chemicals prepared in accordance with the
chemical section in SEMI S2.
NOTE 17: International Labor Convention No. 170 and ANSI Z400.1 call for MSDSs to describe:
Product and company identification
Composition
Hazard identification
First aid measures
Fire fighting measures
Accidental release measure
Handling and storage
Exposure controls / Personal protection
Physical and chemical properties
Stability and reactivity
Toxicological information