semi合集-English.pdf - 第5660页
SEMI P10-0705 © SEMI 1990, 2005 155 START_ORDER MS999 SEMI_REVISION P10-0704 !<mask_order> CUSTOMER COMPANY NAME VENDOR ULTIMATE MASK COMPANY FILE_DATE_TIME 13-APR-1992, 13:00:00Z MASK_SET_ID 9999 !<mask_set>…
SEMI P10-0705 © SEMI 1990, 2005 154
RELATED INFORMATION 2
SEMI PHOTOMASK ORDER DATA FILE EXAMPLE
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not
intended to modify or supercede the official standard. Rather, this example is offered as an aid to visualizing
possible output from software which might implement the standard.
EXAMPLE: A pair of 4-die 5 reticles with separate scribe, barcode, and rms alignment marks. Critical dimensions
are defined as pattern options.
barcode
rms
mark
mask title 1
mask title 2
rms
mark
SEMI P10-0705 © SEMI 1990, 2005 155
START_ORDER MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00Z
MASK_SET_ID 9999 !<mask_set>
BILLING_CONTACT Jean Doe, Accounts Payable !<mask_set_options>
BILLING_ADDRESS Company Name
BILLING_ADDRESS Street Address
BILLING_ADDRESS City, State ZIP
BILLING_PHONE 4085551212
PRICE_UNITS USD
SHIPPING_CONTACT Joe Doe, Wafer Fab
SHIPPING_ADDRESS Company Name
SHIPPING_ADDRESS Street Address
SHIPPING_ADDRESS City, State ZIP
SHIP_CD_DATA T
START_SHIP_TO CD
EMAIL_ADDRESS CD_Engineer@Fab.com
END_SHIP_TO CD
SHIP_CD_DATA T
START_SHIP_TO CD Data
EMAIL_ADDRESS MaskEngineer@Fab.com
END_SHIP_TO CD Data
DATA_MEDIUM 9 TRACK_TAPE
DATA_ID DEVICE 9999
DATA_FORMAT MEBES
DATA_DENSITY 1600BPI
DATA_PATTERN_NAME VT9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME VT9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
END_DATA_MEDIUM 9 TRACK_TAPE
STD_PATTERN_NAME GCARMSB-OX-AA
PATTERN_FORMAT MEBES_RETICLE
END_MASK_SET_OPTIONS 9999
!
MASK_GROUP_ID 5X !<mask_group>
BLANKET_PO_NUMBER 101055C
RELEASE_NUMBER 42
MILESTONES T
SEMI P10-0705 © SEMI 1990, 2005 156
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE BINARY
TITLE_TYPE DEVICE
TITLE_LOCATION 12500,58500
END_TITLE 1
START_TITLE 2
TITLE_TYPE MASK
TITLE_LOCATION 12500,56500
END_TITLE 2
START_BARCODE A
BARCODE_TYPE GCA
BARCODE_LOCATION -50000,57500
END_BARCODE A
MIRROR_MASK T
START_SUBSTRATE S1
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTANCE_CHROME
RESIST_TYPE POSITIVE
END_SUBSTRATE S1
START_REGISTR RG1
REGISTR_ERROR 0.25
REGISTR_REF_MASK_ID 2
END_REGISTR RG1
START_CD SPECIFICATION
CD_TOLERANCE 0.25
CD_RANGE 0.3
END_CD SPECIFICATION
START_DEFECT_DEFINITION C
DEFECT_SIZE 2.0
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
PACKAGE H60-51-63A09
END_MASK_GROUP_OPTIONS 5X
!
PLACEMENT_TOP_CELL C1
!
MASK_ID 1 !<mask_definition>
DELIVERABLE_MASK T
LINE_ITEM_NUMBER 1
STATUS NEW
DUE_DATE_TIME_REQUESTED 1992-04-20, 14:00Z