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SEMI S23-0705 © SEMI 2005 5 9.3 The u n its used i n Table 1 are those used in SEMI E6 , “Guide f or Semiconductor Equi pment Ins tallation Documentation” which co ntains criteria for documenting all utility requirements…

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7 Life Cycle Assessment (LCA) of Energy Usage
7.1 Analyzing energy use during various stages in the life cycle of semiconductor manufacturing equipment can
yield valuable information for promoting energy conservation.
7.2 There are many ways the equipment life cycle can be conceptually divided into different stages.
7.3 This guide focuses only on the use (or use) stage of equipment life cycle.
7.4 Other life cycle stages may include
raw materials procurement,
manufacturing,
packaging,
transportation (shipment),
decommissioning, and
disposal.
7.5 The use stage can be further divided into processing, idling, maintenance and service. This guide only addresses
processing and idling.
7.6 Using the model methods of this guide, the equipment supplier may also analyze maintenance and service.
NOTE 5: The SEAJ standard “SEAJ-E-003E Guideline for conducting an LCA of Semiconductor Manufacturing Equipment
– Energy Saving Perspective ” may be referenced for an example of a more complete life cycle analysis.
8 Baseline Process(es)
8.1 The measurement, conservation monitoring, improvement, and reporting methods should be based on one or
several supplier baseline process(es). The equipment supplier is encouraged to consider baseline process(es) which
also meet the needs of the users.
8.2 Considering the range of use a supplier intends for the equipment, several baseline processes may be used when
utilities and materials use rate measurements are conducted.
8.3 The use rate and energy impact of any particular baseline process recipe can vary depending on the equipment
optional hardware that is installed, whether the optional hardware is participating in the process or not (it may
consume utilities and materials even when idle). Therefore, when baseline process(es) are designed, the particular
hardware configuration can be a significant parameter and should be considered.
NOTE 6: In the course of analysis, the supplier may discover that for two or more recipes which have the same desired effect,
one recipe is more energy efficient than another.
NOTE 7: For users to make effective cost of ownership or energy impact comparisons between equipment, it is useful to have
supplier data derived from the same baseline process (i.e. achieving the same desired effect on a substrate or other material). It is
recommended that suppliers discuss this with the users and gather data that will facilitate effective comparisons.
9 Utilities and Materials Use rate Measurement
9.1 A first step in determining the energy impact of a particular piece of equipment during any life cycle stage is to
measure the use rate of utilities and materials in that stage.
9.2 Table 1 contains the recommended minimum set of utility and material parameters to measure while the
equipment is performing its intended material processing function (according to a particular recipe) and while it is
idling.
NOTE 8: Related Information 1 contains additional use rate information that may be useful.
NOTE 9: Many different chemicals may be used in the processing step. Process chemicals are not included in Table 1 because
equivalent energy conversion factors are generally not available for them. The equipment supplier may, however, wish to
measure and record their use rate anyway.
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9.3 The units used in Table 1 are those used in SEMI E6, “Guide for Semiconductor Equipment Installation
Documentation” which contains criteria for documenting all utility requirements for every connection point on a
piece of equipment. If the measurement equipment used to gather data does not report values in the indicated units,
appropriate conversion factors should be used.
9.4 For the processing measurements, the average value of each parameter over the course of several processing
cycles should be recorded as well as the length of the cycle.
9.5 For the idling measurements, the average value of each parameter over a period of idling should be recorded as
well as the length of the period.
NOTE 10: See Related Information 1 for additional recommendations.
Table 1
Utility or Material Basic Use rate Metrics and Units Related SEMI E6
Sections
(0303 Version)
Exhaust Pressure (Pa)
Flow (m
3
/hr)
Inlet Temp (°C)
Outlet Temp (°C)
§18
Vacuum Pressure (Pa)
Flow (m
3
/hr)
§17
Dry Air
Nitrogen (N2)
Pressure (Pa)
Flow (m
3
/hr)
§16
Cooling Water
Supply Pressure (KPa)
Return Pressure (KPa)
Flow (m
3
/hr)
Inlet Temp (°C)
Outlet Temp (°C)
§13
Ultra Pure Water (UPW) Purity Requirements
Inlet Temp (°C)
Flow (m
3
/hr)
§13
Electricity Real Power (Watts) §12
#1
“Ultra Pure Water” is sometimes known as “De-Ionized Water”.
#2
“Real Power” is sometimes known as “True Power”.
10 Conversion Factors for Equivalent Energy
10.1 Conversion factors can be used to convert the utility and material use rate data gathered for a particular
baseline process recipe into equivalent energy consumption data.
10.2 The actual electrical energy required to provide a particular utility or material will, of course, vary among the
locations where the equipment will be installed. Therefore, the output of the conversion calculation will not be
correct for any particular location. However, if a reasonable set of conversion factors are used, the output of the
conversion can be used to identify those utilities and materials which, generally speaking, have a higher
environmental impact.
NOTE 11: The use of a standard set of conversion factors also allows comparison of results from tests of various equipment.
10.3 It is recommended that equivalent energy be reported on a per year basis.
10.4 In Table 1, the use rate metrics have a per-hour basis. Therefore, the number of hours the equipment spends
processing and idling must be estimated to calculate per-year data.
10.5 Table 2 contains a recommended set of conversion factors.
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NOTE 12: Related Information 1 contains additional conversion factor information that may be useful.
10.6 The output units of all conversions are estimated kWh (kilowatt hours). This can be understood as the energy
impact of the particular utility or material used.
NOTE 13: See Related Information 1 for example calculations.
10.7 The equipment supplier may also use an alternate set of conversion factors.
NOTE 14: If alternate conversion factors are used, it is recommended that the factors be documented in the report of the results.
10.8 A conversion factor is better if it accurately represents the actual electrical energy required to create and
distribute a particular utility or material at the equipment’s end use location.
10.9 Determining reasonable energy conversion factors for most process chemicals has not yet entered the state of
the art. Therefore, conversion factors are not recommended for them.
NOTE 15: See Related Information 1 for additional information.
Table 2 Recommended Energy Conversion Factors
Utility or Material Energy Conversion Factor Basis of Conversion Factor (other units)
Exhaust 0.004 kWh
m
3
Exhaust pressure:
2kPa
(200 mm Aq; 8 in H
2
O)
Vacuum 0.075 kWh
m
3
Vacuum pressure:
58.8E + 2 Pa
(600 mm Aq)
Dry Air 0.147 kWh
m
3
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
Cooling Water
(20–25°C)
1.78 kWh
m
3
Water cooled by refrigeration process
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
Cooling Water
(32–37°C)
0.250 kWh
m
3
Water cooled by open cooling tower
Supply pressure:
4.9E + 5 Pa
(71 psi; 5 kg/cm
2
)
UPW / DIW
(under pressure)
10.2 kWh
m
3
Supply pressure:
19.6E + 4 Pa
(28.4 psi; 2 kg/cm
2
)
UPW / DIW
(ambient pressure)
10.0 kWh
m
3
Power for distilling.
Removal via Air 3.24 × 10
-4
kWh
m
3
°C
Specific Heat and Density of Air.
Removal via
Water
1.16 kWh
m
3
°C
Specific Heat and Density of Water.
Heat Load
Burden 0.382 kWh
kWh
Refrigeration (air conditioning) efficiency.
N
2
(Volume calculated at one
atmosphere pressure and 20 °C.)
0.250
kWh
m
3
Supply pressure:
7.93E + 5 Pa
(115 psi; 8.1 kg/cm
2
)
Electricity 1 × (V
RMS
× I
RMS
) × measurement
period = kWh
This is electrical energy supplied. This is not the same
as energy used to generate the electricity.
#1
Source except N
2
: SEAJ-E-002E Guideline for Energy Quantification on Semiconductor Manufacturing Equipment and Utilities.