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SEMI E98-1102 © SEMI 2000, 2002 51 NOTICE: SEMI makes no warranties or representations as to the su itability of the provisional standards set fort h herein for any particular appl ication. The determination of the su it…
SEMI E98-1102 © SEMI 2000, 2002 50
Table R4-1 Relationships between EquipmentIOElement and Generic Device Model
EquipmentIODevice
Attribute Name
Generic Device Model
Object Name
Corresponding Attribute Name
ObjType — —
ObjID — —
AlgorithmID — —
Cycles*
(units may be time)
SAC Run Hours (SacA5)
Description* — —
DeviceType Device Manager Device Type (DmA1)
Function* — —
HardwareRevision Device Manager Hardware Revision Level (DmA6)
ImmutableID* DeviceManager Serial Number (optional) (DmA7)
InService* — —
ModelNumber Device Manager Manufacturer Model Number (DmA4)
NumberofObservables — —
SoftwareRevision Device Manager Software or Firmware Revision Level (DmA5)
Supplier* Device Manager Device Manufacturer Identifier (DmA3)
Observable
I
DataDimension Sensor-Analog Input Class
element
—
Datatype Sensor-Analog Input Class or
Actuator-Analog Output Class or
Controller Class element
Datatype SaiA66or AaoA66 or Controller CA19
(translated for host as necessary to conform to SECS-II
format types (10,11,20, etc.)
DeltaValue Sensor of Sensor-Analog Input
Class element
ReportDelta (SaiA70)
InterlockStatus — —
Name Sensor or Actuator or Controller Text strings “SenIn” or “ActIn” or “CntIn” where n
represents the instance number of the corresponding
device object (Table 2, E54.1)
NominalValue — —
ObservableType — —
Possible Units — —
Range — —
ReadRate — —
ReportChange Sensor-Analog Input Class
element
EnableReportROC SaiA71
ReportRate Sensor-Analog Input Class
element
ReportROC SaiA72
Timestamp Device Manager Date and Time (DmA21)
Units Sensor-Analog Input or Actuator-
Analog Output Class element
DataUnits (SaiA67 or Aao67)
Value Sensor or Actuator or Controller Value or Setting (nA16) or Setpoint (CA16)
SEMI E98-1102 © SEMI 2000, 2002 51
NOTICE: SEMI makes no warranties or
representations as to the suitability of the provisional
standards set forth herein for any particular application.
The determination of the suitability of the provisional
standard is solely the responsibility of the user. Users
are cautioned to refer to manufacturer’s instructions,
product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein.
These provisional standards are subject to change
without notice.
The user’s attention is called to the possibility that
compliance with this provisional standard may require
use of copyrighted material or of an invention covered
by patent rights. By publication of this provisional
standard, SEMI takes no position respecting the validity
of any patent rights or copyrights asserted in connection
with any item mentioned in this provisional standard.
Users of this provisional standard are expressly advised
that determination of any such patent rights or
copyrights, and the risk of infringement of such rights,
are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E98.1-1102 © SEMI 2001, 2002 1
SEMI E98.1-1102
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR THE
OBJECT-BASED EQUIPMENT MODEL
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved by
the North American Regional Standards Committee on August 29, 2002. Initially available at www.semi.org
September 2002; to be published November 2002. Originally published March 2002.
1 Purpose
1.1 This document maps the services and data of SEMI
E98 Object-Based Equipment Model (OBEM) to
SECS-II streams and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of
OBEM that use the SECS-II message protocol (SEMI
E5).
2.2 This specification is provisional. To remove the
provisional status, the SECS-II format for the attributes
of the remaining object defined in OBEM must be
included in Section 6:
• EquipmentIODevice
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services
Standard (OSS)
SEMI E98 — Provisional Standard for the Object-
Based Equipment Model (OBEM)
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
4 Services Mapping
4.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the services defined in OBEM.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Message Name
Abort S14,F19/20 Generic Service Request/Acknowledge
AddElement S14,F19/20 Generic Service Request/Acknowledge
AddProcessCapability S14,F19/20 Generic Service Request/Acknowledge
ChangeService S14,F19/20 Generic Service Request/Acknowledge
Cleanup S14,F19/20 Generic Service Request/Acknowledge
GetDateTime S14,F19/20 Generic Service Request/Acknowledge
GetProgramDirectory S14,F19/20 Generic Service Request/Acknowledge
Pause S14,F19/20 Generic Service Request/Acknowledge
RemoveProcessCapability S14,F19/20 Generic Service Request/Acknowledge
RemoveElement S14,F19/20 Generic Service Request/Acknowledge
Resume S14,F19/20 Generic Service Request/Acknowledge
SelectProgram S14,F19/20 Generic Service Request/Acknowledge
SetDateTime S14,F19/20 Generic Service Request/Acknowledge
Shutdown S14,F19/20 Generic Service Request/Acknowledge
Start S14,F19/20 Generic Service Request/Acknowledge
Startup S14,F19/20 Generic Service Request/Acknowledge
Stop S14,F19/20 Generic Service Request/Acknowledge