semi合集-English.pdf - 第2644页
SEMI E94.1-1104 © SEMI 2001, 2004 5 Attribute Name Attribute Da ta Form: SECS-II Structure “PauseEvent” L,n n = number of colle ction events 1 . <CEID 1 > … n . <CEID n > “ProcessingCtrlSpec” L,p p = number o…
SEMI E94.1-1104 © SEMI 2001, 2004 4
Attribute Name Attribute Data Form: SECS-II Structure
“MtrlOutByStatus” L,n n = number of status dispositions
1. L,2
1. 51 (U1) MaterialStatus
1
2. L,2 DestinationMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. L,2 DestinationMap
n
1. <CARRIERID
n,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
If m = 0, the substrates may be placed by the equipment in any available slot.
“MtrlOutSpec” L,p p = number of mapping source/destination pairs
1. L,2
1. L,2 SourceMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
2. L,2 DestinationMap
1
1. <CARRIERID
1,2
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
p. L,2
1. L,2 SourceMap
p
1. <CARRIERID
p,1
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>
2. L,2 DestinationMap
p
1. <CARRIERID
p,2
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>
SEMI E94.1-1104 © SEMI 2001, 2004 5
Attribute Name Attribute Data Form: SECS-II Structure
“PauseEvent” L,n n = number of collection events
1. <CEID
1
>
…
n. <CEID
n
>
“ProcessingCtrlSpec” L,p p = number of process jobs assigned to control job
1. L,3
1. <PRJOBID
1
>
2. L,m ControlRule
1
1. L,2
1. 20 (A) RuleName
1
2. (Any format) RuleValue
1
…
m. L,2
1. 20 (A) RuleName
m
2. (Any format) RuleValue
m
3. L,n OutputRule
1
1. L,2
1. 51 (U1) MaterialStatus
1
2. (Any format) OutputRuleValue
1
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. (Any format) OutputRuleValue
n
…
p. L,3
1. <PRJOBID
p
>
2. L,m ControlRule
p
1. L,2
1. 20 (A) RuleName
1
2. (Any format) RuleValue
1
…
m. L,2
1. 20 (A) RuleName
m
2. (Any format) RuleValue
m
3. L,n OutputRule
p
1. L,2
1. 51 (U1) MaterialStatus
1
2. (Any format) OutputRuleValue
1
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. (Any format) OutputRuleValue
n
ControlRule
1) m = 0 indicates no ControlRule specified
2) RuleName and RuleValue are equipment specific
OutputRule
1) n = 0 indicates no OutputRule specified
2) There is no defined OutputRuleValue. The content and format of OutputRuleValue
is equipment dependent per SEMI E94 intent.
SEMI E94.1-1104 © SEMI 2001, 2004 6
Attribute Name Attribute Data Form: SECS-II Structure
“ProcessOrderMgmt” 51 (U1) ProcessOrderMgmt
ProcessOrderMgmt is enumerated as follows:
1 = ARRIVAL
2 = OPTIMIZE
3 = LIST
“PRJobStatusList”
L,n n = number of process jobs defined in the control job
1. L,2
1. <PRJOBID
1
>
2. <PRSTATE
1
>:
n. L,2
1. <PRJOBID
n
>
2. <PRSTATE
n
>
“StartMethod” 11 (BOOLEAN) StartMethod
StartMethod is as follows:
TRUE – Auto
FALSE – UserStart
“State” 51 (U1) State
State is enumerated as follows:
0 = QUEUED
1 = SELECTED
2 = WAITINGFORSTART
3 = EXECUTING
4 = PAUSED
5 = COMPLETED
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