semi合集-English.pdf - 第7062页

SEMI S17-0701 © SEMI 2001 10 R1-6.4 Sh ield devices, when ch osen, should prevent simul ta neous load/un load operation by a floor-travel i ng vehicle or person and a space-traveling vehicle. R1-6. 5 Protective Device In…

SEMI S17-0701 © SEMI 20019

RELATED INFORMATION 1

PROTECTIVE DEVICE OPTION CONSIDERATION FOR LOAD/UNLOAD

OPERATIONS AT SEMICONDUCTOR MANUFACTURING EQUIPMENT

LOAD STATIONS

NOTE: This Related Information is not an official balloted part of SEMI S17. It is included to assist the user of the

document in making decisions about possible options.

R1-1 Purpose

R1-1.1 This Related Information should act as an

application note for consideration and selection of

safety devices that may be provided to protect

load/unload operations where risks are generated by

space traveling vehicles.

R1-1.2 Space traveling vehicle suppliers are not

required to provide such devices, except as necessary to

comply with local jurisdictional requirements.

NOTE R1-1: Refer to the main document for devices

recommended for protecting equipment.

R1-2 Scope

R1-2.1 Protective Devices  As related to UTV

equipment, devices designed to protect personnel or

equipment from injury or damage during raising or

lowering of loads into position.

R1-2.2 Protective devices should be considered when

space-traveling vehicles with hoisting mechanisms are

present.

R1-2.3 Protective devices function to warn of, or

prevent transfer of, loads when personnel or equipment

are at risk.

R1-2.3.1 This application note covers the following

types of devices:

• Sensors

• Shields

• Alarms

• Signs and visual alerts

• Communication protocol

NOTE R1-2: This should not be considered a complete list

there could be many other solutions.

R1-3 Limitations

R1-3.1 This Related Information is not intended to

apply to situations where load ports are installed only

in locations inaccessible to personnel walking on the

factory floor (such as SEMI E15.1 Option 2 load ports).

R1-3.2 This Related Information does not apply to

factories using only floor-traveling vehicles or PGVs.

R1-4 Considerations

R1-4.1 Protective devices should be considered for

preventing transfer of loads when personnel or

equipment are at risk.

R1-4.2 Protective device integration should be

considered a coordinated effort between UTV supplier,

manufacturing equipment supplier and the end user

customer.

R1-5 Lookdown Sensors

R1-5.1 Lookdown Sensors  Such sensors surround

the hoisting mechanism and look down to the loadport

to determine if anything is within the path of descent.

R1-5.2 Lookdown sensors are one type of protective

device that allows for the overhead vehicle to “see” if

there is anything in the expected path of descent.

R1-5.3 Lookdown sensors can serve the function of

protecting equipment from impact.

R1-5.4 Lookdown sensors should be capable of

communicating the need for operator intervention back

to a location that can notify the proper personnel.

R1-6 Shield Options

R1-6.1 Shield Device  Shield devices are physical

shielding which is placed to block access to a hazard

area.

R1-6.2 Shield devices, when selected, should be

capable of fitting within the dimensional limitations of

the load ports. (See SEMI E15.1 for dimensional

requirements and exclusion zones for 300 mm load

ports.)

R1-6.3 Shield device types include:

• Curtain Sensor

• Safety Guard

• Automatic Doors

SEMI S17-0701 © SEMI 2001 10

R1-6.4 Shield devices, when chosen, should prevent

simultaneous load/unload operation by a floor-traveling

vehicle or person and a space-traveling vehicle.

R1-6.5 Protective Device Interlocks — These

confirmation signals from shield devices are used to

interrupt the transfer process if a shield is breached.

R1-6.5.1 In the case of UTV systems, protective device

interlocks should communicate to the UTV equipment

either directly or through the manufacturing equipment.

R1-6.5.2 Communication should be via a protected-

path communications protocol that is fail safe.

R1-7 Alarms

R1-7.1 Alarms  Alarms consist of audible and visual

notices of hazards that may be approaching.

R1-7.2 Alarms may also be selected as protective

devices.

R1-7.3 Alarms may be field configurable to allow for

selection of type of audible or visual allowed, or to

allow for selection of either audible or visual and

elimination of the other type.

R1-8 Signs and Visual Alerts

R1-8.1 Signs such as “Caution”, “Warning”, or other

sign appropriate to the potential hazard may be selected

as a method of protection.

R1-8.2 Signs should be compatible with SEMI S1, or

should be approved by the local jurisdictional authority.

R1-8.3 Visual Alerts  an indicator applied to floors

or vertical surfaces surrounding a potential are of

delivery, which indicates to persons present that a

potential hazard exists in the area.

R1-8.4 Visual alerts may include:

• Striped tape on the floor

• Warning barriers

• Railings

NOTE R1-3: This should not be considered a complete list

there could be many other solutions.

R1-9 Communication Protocol

R1-9.1 Communication Protocol  A method of

communicating the status of the equipment to a

centrally monitored location. This may be direct or

through the equipment communication path.

R1-9.2 Protective devices offered should be capable of

communicating with floor-traveling and space-traveling

UTVs through some type of interface.

R1-10 Providing Information

R1-10.1 If protective devices are offered, the UTV

supplier should provide documentation to the end user

customer about protective devices available.

R1-10.2 Information should be provided to the user to

explain the function of any protective devices that may

be offered.

R1-10.3 Information may also be needed by suppliers

of other equipment to insure adequate communication

between equipment types.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the guideline set

forth herein for any particular application. The

determination of the suitability of the guideline is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. This

guideline is subject to change without notice.

The user’s attention is called to the possibility that

compliance with this guideline may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guideline, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this guideline. Users of this guideline

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S18-1102 © SEMI 2002

SEMI S18-1102

ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SILANE

FAMILY GASES HANDLING

This guideline was technically approved by the Global Environmental, Health, and Safety Committee and is

the direct responsibility of the Japan Environmental, Health, and Safety Committee. Current edition approved

by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org

September 2002; to be published November 2002.

NOTICE: Paragraphs entitled “NOTE” are not an

official part of this document and are not intended to

modify or supersede the official guideline. The task

force has supplied them to clarify and to enhance usage

of the guideline by equipment designers.

1 Purpose

1.1 This guideline is intended as a minimum set of

safety and health criteria for silane family gases

handling related to equipment and facilities used in

semiconductor or Flat Panel Display (FPD)

manufacturing.

2 Scope

2.1 Silane family gases which are described in this

guideline are: monosilane (SiH

), disilane (Si

trisilane (Si

), dichlorosilane (SiH

) and

trichlorosilane (SiHCl

2.2 This guideline includes the following sections:

• Purpose

• Scope

• Limitations

• Referenced Standards

• Terminology

• General Principles

• Education and Training

• Leak Detection and Alarm Systems

• Fire Detection, Suppression and Alarm Systems

• Emergency Response

• Materials, Components, and Construction for

Silane Family Gas Handling Equipment and

Facilities.

• Pressurization and Leak Testing

• Storage

• Supply Systems

• Distribution Systems for Gas Supply

• Equipment Using Silane Family Gases

• Exhaust Systems and Plumbing

• Exhaust Treatment Systems

• Related Documents

2.3 This safety guideline does not purport to address all

of the safety issues associated with its use. It is the

responsibility of the users of this guideline to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document is not intended to impart

requirements on any party.

3.2 This document is not intended to apply to gas

manufacturers or distribution companies.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

4.1 SEMI Standards

SEMI F1 — Specification for Leak Integrity of High

Purity Gas Piping Systems and Components

SEMI F3 — Guide for Welding Stainless Steel Tubing

for Semiconductor Manufacturing Applications

SEMI F4 — Specification for Pneumatically Actuated

Cylinder Valves

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F6 — Guide for Secondary Containment of

Hazardous Gas Piping Systems

SEMI F13 — Guide for Gas Source Control Equipment

SEMI F14 — Guide for the Design of Gas Source

Equipment Enclosures

SEMI F15 — Test Method for Enclosures Using Sulfur

Hexafluoride Tracer Gas and Gas Chromatography

SEMI S1 — Safety Guideline for Equipment Safety

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