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SEMI E51-0200 © SEMI 1995 , 2000 5 Gas Ser vice Supply Temp . Supply Pressure Filtration (absolute ) Specificati o n POC Material POC Fitting Notes Natura l Ga s - 7–21 kPa (1–3 psig) -- - N P T Proce ss Va cuum - 53–58 …

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SEMI E51-0200 © SEMI 1995, 2000 4
Table 1 Typical Facilities Services and Termination Matrix Example — United States
Water Service Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water 4°C - amb
(40°F - amb)
S = 258–552 kPa
(40–80 psig)
N/A non-human
consumption
Cu/
PVC SCH 40/
PVC SCH 80
NPT
Ultra Pure Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ 18+ M ohms
RES
PVDF/PFA stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Deionized Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
0.1–0.2 µ 17.5 M ohms
RES
PVC SCH80/
PVDF/PFA
stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Hot Ultra Pure
Water
60–90°C
(140–194°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ site-specific PVDF stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Fire Protection amb NFPA 13 N/A NFPA 13 N/A Carbon
Steel/SS
Process
Cooling Water
10–16°C
(50–60°F)
S = 310–552 kPa
(45–80 psig)
R = 0–207 kPa
(0–30 psig)
1.0–40 µ 50 K ohms RES PVC SCH80/
Cu/SS
NPT
Gas Service Supply Temp. Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra
Pure
amb 586–655 kPa
(85–95 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Process amb 552–621 kPa
(80–90 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Non-
Process
amb 552–655 kPa
(80–95 psig)
0.01–0.1 µ - Cu/SS face seal
Compressed Air amb 655–758 kPa
(95–110 psig)
0.1–5.0 µ –73 to –40°C
(–100 to –40°F)
dew point
Cu/SS compression
Oxygen amb 552–586 kPa
(80–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Hydrogen, Bulk amb 414–552 kPa
(60–80 psig)
0.01–0.1 µ - 316L EP SS face seal See NOTE
2.
Argon amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Helium amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal
SEMI E51-0200 © SEMI 1995, 20005
Gas Service Supply Temp. Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Natural Gas - 7–21 kPa
(1–3 psig)
-- -NPT
Process Vacuum - 53–58 cm Hg
(21–23 in. Hg)
- - SS/Brass/ PVC
SCH 80
NPT
Specialty Gases - site-specific 0.01–0.1 µ site-specific site-specific face seal See NOTE
3.
Drains Waste Temp. Pressure Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acid Waste < 43°C
(110°F)
See NOTE 1.
atm - - CPVC SCH80/
PVC SCH 80
stub See NOTE
4.
H
2
SO
4
See NOTE 1. atm - - PVDF/PVC SCH
80/CPVC
SCH 80/ PP
flare type
compression
See NOTE
4.
Solvent Waste See NOTE 1. atm - * Review
Chemistry Flash
Point
Carbon Steel /
304 SS
NPT or
p. flange
See NOTE
4.
Industrial < 43°C
(110°F)
See NOTE 1.
atm - - PVC SCH 40/
PVC SCH 80
stub
DI Reclaim Varies
See NOTE 1.
atm - - PVC SCH 40/
PVC SCH 80/
PVDF
stub
Fluoride Waste See NOTE 1. atm - - PP/PVC SCH
80/PVDF
stub See NOTE
4.
HF Reclaim See NOTE 1. - - No water dilution PVDF/PFA stub See NOTE
4.
Slurry See NOTE 1. - - - PVC SCH 40
CLEAR/
PVC SCH 40/
PVC SCH 80/ PP
stub
Bulk Chemical
Distribution
Supply
Temp.
Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acids, Bases,
Oxidizers
amb - 0.1 µ PFA Filtration PVC SCH 40
Clear/PP for
secondary, PFA
for primary
5 cm (2 in.)
FNPT for
secondary,
flare type
compression
for primary
Capability of
secondary
containment to
tool interior
Solvents amb - 0.1 µ - 316 SS face seal/
compression
See NOTE 4.
SEMI E51-0200 © SEMI 1995, 2000 6
Exhaust Temp. Supply Filtration
(absolute)
Specification POC Material POC Fitting Notes
Heat/General - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304
SS/Galv./Acid
Res. SS
stub/s.m.
flange
within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Solvent - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304 SS/Galv. stub/s.m.
flange
within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Vacuum Pump - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304 SS NW flange within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Acid - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
--Acid Res.
SS/PVC SCH
40/PP
stub/p. flange within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
NOTE 1: Review waste composition, concentration, and temperature for material compatibility.
NOTE 2: Tool to have POC mechanical joint secondarily-contained and exhausted.
NOTE 3: Tool to have POC mechanical joint for toxic or hazardous gas POC mechanical joint secondarily-contained and exhausted.
NOTE 4: Tool to have POC mechanical joint secondarily-contained.
Electrical Services
Applicable Code See NFPA 70 (National Electrical Code).
Supply Voltage, Nominal 120/208V and 277/480V single-phase, 208/120V and 480/277V three-phase
Typical Supply Voltage Range See Figure 2.
EMI Noise See SEMI E33.
ESD Ambient See SEMI E33.
Ground Currents See IEEE 1100.
Computer Interfaces See SEMI E30.
Electrical Interface See SEMI E7.
UPS Electrical standards as described by customer