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SEMI E134-0305 © SEMI 2004, 2005 2 15.2 DCPCons u mer ............................................................................................................................... .................. 56 16 Requirements …

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SEMI E134-0305 © SEMI 2004, 2005 1
SEMI E134-0305
SPECIFICATION FOR DATA COLLECTION MANAGEMENT
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 11, 2004 and August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published July 2004.
E
This standard was editorially modified in November 2004 to correct editorial errors in Figures 21 and 22.
NOTICE: The designation of SEMI E134 was updated during the 0305 publishing cycle to reflect the creation of
SEMI E134.1.
1 Purpose .......................................................................................................................................................................2
2 Scope ..........................................................................................................................................................................2
2.1 In-scope ...............................................................................................................................................................2
2.2 Out-of-scope ........................................................................................................................................................2
3 Limitations..................................................................................................................................................................2
3.1 Abstract Model ....................................................................................................................................................2
4 Referenced Standards .................................................................................................................................................3
4.1 Non-SEMI Standards...........................................................................................................................................3
4.2 SEMI Standards...................................................................................................................................................3
5 Terminology ...............................................................................................................................................................3
5.1 Abbreviations and Acronyms...............................................................................................................................3
5.2 Definitions ...........................................................................................................................................................3
6 Conventions................................................................................................................................................................4
6.1 Terms...................................................................................................................................................................4
6.2 Notation ...............................................................................................................................................................4
7 Background.................................................................................................................................................................6
7.1 Equipment Data Collection .................................................................................................................................6
8 Overview ....................................................................................................................................................................8
8.1 Data Collection Concepts....................................................................................................................................8
8.2 Trace Data...........................................................................................................................................................8
8.3 Events ..................................................................................................................................................................8
8.4 Exceptions............................................................................................................................................................9
8.5 Data Collection Plans..........................................................................................................................................9
8.6 Equipment Operational Performance Monitoring...............................................................................................9
8.7 Ad-hoc Data Requests..........................................................................................................................................9
9 Data Collection Plan Management ...........................................................................................................................10
9.1 DataCollectionManager Interface.....................................................................................................................10
10 DCP Privilege Model..............................................................................................................................................27
10.1 Privileges.........................................................................................................................................................27
11 Data Collection Plan Definition..............................................................................................................................29
11.1 DataCollectionPlan .........................................................................................................................................29
12 Data Collection Plan State Models .........................................................................................................................35
12.1 DataCollectionPlan State Model.....................................................................................................................35
12.2 DataCollectionPlan-Active State Model..........................................................................................................38
12.3 Trace Request State Model ..............................................................................................................................41
13 Operational Performance Monitoring.....................................................................................................................44
13.1 Operational Performance Conditions State Model .........................................................................................44
14 Data Collection Report Formats .............................................................................................................................45
14.1 Data Collection Reports ..................................................................................................................................45
14.2 Parameter Values ............................................................................................................................................50
14.3 Primitive Parameter Values.............................................................................................................................51
14.4 Structured and Enumerated Parameter Values ...............................................................................................53
14.5 Time Format ....................................................................................................................................................55
15 DCP Consumer Interface........................................................................................................................................56
SEMI E134-0305 © SEMI 2004, 2005 2
15.2 DCPConsumer.................................................................................................................................................56
16 Requirements for Compliance ................................................................................................................................60
1 Purpose
1.1 This specification describes a method for data acquisition consumers to request process and operational data
from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the
consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for
enabling or disabling a large number of data sources, and to allow consumers to organize related data into groups
according to their purpose.
2 Scope
2.1 In-scope
2.1.1 This specification provides a means to acquire event, exception, and trace data from semiconductor equipment
through the use of a named data collection plan. This specification defines what form a data collection plan takes,
the meaning of its contents, and an interface for managing them that is to be supported by the equipment.
2.1.2 This specification defines the behavior associated with the execution of data collection plans in the form of
finite state machines. The formats for data produced as a result of executing a data collection plan are also defined,
as is the interface that must be supported by consumers of data collection plan output.
2.1.3 This specification defines a way for the equipment to notify consumers when the combination of activities on
the equipment, including data acquisition, are causing the equipment to perform below supplier-defined criteria.
2.1.4 This specification defines a way for consumers to make ad-hoc on-demand requests for data from the
equipment, outside of a data collection plan.
2.2 Out-of-scope
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Abstract Model
3.1.1 This specification does not define a convention for naming or identifying sources, parameters, events, or
exceptions. This document assumes that all such entities can be identified separately and represented as text. Such
conventions shall be fully specified by any implementation mapping of this specification.
3.1.2 This specification does not define the mechanism used for identifying or authenticating consumers or
enforcing privileges. It assumes that consumers can be uniquely identified by a text value, and that the equipment is
capable of enforcing the standard privileges defined in this document. Such mechanisms shall be fully specified by
any implementation mapping of this specification.
3.1.3 This specification does not define the mechanism used for determining how to locate consumers that are to
receive the events defined by this specification. It assumes that the equipment has established a communications
context with any consumers that can submit requests and has provided any context necessary to send events to those
consumers. Such mechanisms shall be fully specified by any implementation mapping of this specification.
3.1.4 This specification does not define any algorithms or heuristics to use for detecting degrading equipment
operational performance. Such techniques are specific to the equipment’s internal hardware and software
architecture and will very likely be unique to each class and/or model of equipment. It assumes that it is possible to
detect such conditions and to identify which systems comprising the equipment are affected.
3.1.5 This specification is an abstract model only. Adjunct specifications must be developed to map this
specification to an implementation technology.
SEMI E134-0305 © SEMI 2004, 2005 3
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Provisional Specification for Control Job Management
4.2 Non-SEMI Standards
International Standards Organization (ISO) 11578:1996
1
— Information technology Open Systems Interconnection
– Remote Procedure Call definition of UUID
ISO 8601
2
— Representations of dates and times, 1988-06-15
ISO 8601 Draft Revision — Representations of dates and times, draft revision, 2000
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67
3
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 Descriptions of many of the abbreviations and acronyms used in this specification may be found in the SEMI
Compilation of Terms, available on the SEMI web site, http://www.semi.org/. In most cases, these terms are not
included in this section.
5.1.2 DCP — Data Collection Plan
5.1.3 UML — Unified Modeling Language
5.2 Definitions
5.2.1 Definitions or descriptions of many of the terms used in this specification may be found in the SEMI
Compilation of Terms, available on the SEMI web site, http://www.semi.org/. In most cases, these terms are not
included in this section.
5.2.2 Related Information, Section 1, contains useful definitions of UML terms taken directly from the UML
standard. UML terms used in this document conform to these definitions. Please refer to this Section as needed.
5.2.3 collection result — the set of data values obtained during trace data collection.
5.2.4 collection frequency — the rate at which the collection of one or more data values is performed. This is not
the same as the frequency with which the equipment internally samples these data from its components.
5.2.5 data source — a physical or logical entity associated with the equipment that is capable of providing data
values independently of other equipment entities.
5.2.6 event source — a physical or logical entity associated with the equipment that is capable of generating events
independently of other equipment entities
5.2.7 exception source — a physical or logical entity associated with the equipment that is capable of generating
exceptions independently of other equipment entities
5.2.8 parameter source — a physical or logical entity associated with the equipment that is capable of providing
parameters independently of other sources. This term may be used interchangeably with ‘data source’.
5.2.9 source id — a name or other token that uniquely identifies a specific origin or producer of information from
among possible sources.
1 http://www.iso.ch/cate/d2229.html
2 http://www.iso.ch/cate/d26780.html
3 http://www.omg.org/technology/documents/modeling_spec_catalog.htm