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SEMI E54.16-0705 © SEMI 2005 38 Table 64 A ssembly-ISPM#1 Object Instanc e Net work Services Assembly-ISPM#1 Profile ID = 180.84, Instance ID = 01 Service Request Code Service Name SDM Tag Request Parameters Result Param…

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SEMI E54.16-0705 © SEMI 2005 37
Table 60 Sensor-AI-MNS Object Instance Network Services
Sensor-AI-MNS
Profile ID = 180.21, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.8 Sensor-AI-Counter — The presentation of the Sensor Analog Input Counter (Sensor-AI-Counter) object
instance attributes are as indicated in Table 61. The presentation of Sensor-AI-Counter object services are indicated
in Table 62.
Table 61 Sensor-AI-Counter Object Instance Network Variables
Sensor-AI-Counter
Profile ID = 180.15, Instance ID = 01 through 1024
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO CounterA1 SNVT_switch
129 Full Sacle CP CounterA2 SCPTmaxRange
130 Alarm Settling Time CP CounterA3 SCPTalrmSetT2
131 Warning Settling Time CP CounterA4 SCPTalrmSetT1
132 Upper Size CP CounterA5 SCPTminRange
133 Lower Size CP CounterA6 SCPTmaxRange
Table 62 Sensor-AI-Counter Object Instance Network Services
Sensor-AI-Counter
Profile ID = 180.15, Instance ID = 01 through 1024
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.9 Assembly-ISPM#1 — The presentation of the Assembly #1 In-Situ Particle Monitor (Assembly-ISPM#1)
object instance attributes is as indicated in Table 63. The presentation of Assembly-ISPM#1 object services are
indicated in Table 64.
Table 63 Assembly-ISPM#1 Object Instance Network Variables
Assembly-ISPM#1
Profile ID = 180.84, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
SEMI E54.16-0705 © SEMI 2005 38
Table 64 Assembly-ISPM#1 Object Instance Network Services
Assembly-ISPM#1
Profile ID = 180.84, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.10 Assembly-ISPM#2 — The presentation of the Assembly #2 In-Situ Particle Monitor (Assembly-ISPM#2)
object instance attributes is as indicated in Table 65. The presentation of the Assembly-ISPM#2 object services are
indicated in Table 66.
Table 65 Assembly-ISPM#2 Object Instance Network Variables
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 66 Assembly-ISPM#2 Object Instance Network Services
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.11 Assembly-ISPM#3 — The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3)
object instance attributes is as indicated in Table 67. The presentation of Assembly-ISPM#3 object services are
indicated in Table 68.
Table 67 Assembly-ISPM#3 Object Instance Network Variables
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 68 Assembly-ISPM#3 Object Instance Network Services
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
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9.3.12 Assembly-ISPM#4 — The presentation of the Assembly #4 In-Situ Particle Monitor (Assembly-ISPM#4)
object instance attributes is as indicated in Table 69. The presentation of Assembly-ISPM#4 object services are
indicated in Table 70.
Table 69 Assembly-ISPM#4 Object Instance Network Variables
Assembly-ISPM#4
Profile ID = 180.87, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 70 Assembly-ISPM#4 Object Instance Network Services
Assembly-ISPM#4
Profile ID = 180.87, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.13 Assembly-ISPM#5 — The presentation of the Assembly #5 In-Situ Particle Monitor (Assembly-ISPM#5)
object instance attributes is as indicated in Table 71. The presentation of Assembly-ISPM#5 object services are
indicated in Table 72.
Table 71 Assembly-ISPM#5 Object Instance Network Variables
Assembly-ISPM#5
Profile ID = 180.88, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 72 Assembly-ISPM#5 Object Instance Network Services
Assembly-ISPM#5
Profile ID = 180.88, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.14 Assembly-ISPM#6 — The presentation of the Assembly #6 In-Situ Particle Monitor (Assembly-ISPM#6)
object instance attributes is as indicated in Table 73. The presentation of Assembly-ISPM#6 object services are
indicated in Table 74.