semi合集-English.pdf - 第7065页

SEMI S18-1102 © SEMI 2002 3 American Conference of Go ve rnmental Industrial Hygienists.) [SEMI F6]. 5.2.8 TWA — Time Weighted Average  As defined by the American Confer ence of Governmental Industrial Hygienists (ACGIH…

SEMI S18-1102 © SEMI 2002

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S4 — Safety Guideline for the

Segregation/Separation of Gas Cylinders Contained in

Cabinets

SEMI S5 — Safety Guideline for Flow Limiting

Devices

SEMI S6 — Safety Guideline for Ventilation

SEMI S10  Safety Guideline for Risk Assessment

SEMI S13  Safety Guideline for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI S14  Safety Guidelines for Fire Risk

Assessment and Mitigation for Semiconductor

Manufacturing Equipment

4.2 NFPA

Standards

NFPA 13  Installation of Sprinkler Systems

NFPA 70  National Electrical Code

NFPA 318  Standard for the Protection of

Cleanrooms

4.3 Compressed Gas Association

CGA P-20  Standard for the Classification of Toxic

Gas Mixtures

CGA P-23  Standard for Categorizing Gas Mixtures

Containing Flammable and Nonflammable Components

4.4 Other Documents

High Pressure Gas Safety Law

The High Pressure Gas Safety Institute of Japan

(KHK), Application Guide for the High Pressure Gas

Safety Law

Santa Clara County Toxic Gas Ordinance No. NS-

517.44

SSA Journal

,  Volume 11 No. 4, Winter 1997

1 National Fire Protection Association, 1 Batterymarch Park, PO Box

9101, Quincy, MA 02269-9101

2 Compressed Gas Association, 1725 Jefferson Davis Highway, Suite

1004, Arlington, Virginia 22202-4102

3 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,

Tokyo 105-8447

4 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,

Tokyo 105-8447

5 Santa Clara County TGO

6 SSA Journal, SSA Journal Headquarters 1313 Dolly Madison Blvd.

Suite402, McLean, VA22101

4.5 US Code of Federal Regulations

Uniform Fire Code (UFC)

Sections 51, 79 and 80 

Semiconductor Facility-Specific Sections

29CFR 1910.1200

,  “Hazard Communication”

(OSHA)

NIOSH Pocket Guide  available online at

http://www.cdc.gov/niosh/topreq.html

4.6 EU Directive

The Safety Sheets Directive 93/112 EEC

5 Terminology

5.1 Terminology defined in SEMI S2 should be

referred to except if otherwise specified below.

5.2 Abbreviations and Acronyms

5.2.1 ACGIH

— American Conference of

Governmental Industrial Hygienists. (ACGIH is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.2.2 ESOV  Emergency Shut Off Valve.

5.2.3 IDLH  Immediately Dangerous to Life and

Health, concentration of airborne contaminants,

normally expressed in parts per million or milligrams

per cubic meter, which represents the maximum level

from which one could escape within thirty minutes

without any escape-impairing symptoms or irreversible

health effects. This level is established by the National

Institute of Occupational Safety and Health (NIOSH).

[SEMI F6]

5.2.4 MSDS  Material Safety Data Sheet, a

document that provides information on the properties of

a chemical material in a format specified by a

regulation such as OSHA 29 CFR 1910.1200, “Hazard

Communication”.

5.2.5 PTFE  Poly Tetra Fluoro Ethylene.

5.2.6 SSCS  silane safety control system. SSCSs are

integrated systems of detection devices that, when

monitored as a group, provide for an overall status of

the safety of the hazardous gas handling system (e.g.,

pressure transducers linked to valve status monitors and

valve cycle counting programs or excess-flow

monitoring interlocked to shutdown the source).

5.2.7 TLVs

 Threshold Limit Values for chemical

substances in the work environment adopted by

ACGIH

(TLV

is a registered trademark of the

7 Uniform Fire Code, 5360 South Workman Mill Road, Whitter, CA

90601

8 Occupational Safety and Health Administration U.S. Department

of Labor, http://www.osha.gov

SEMI S18-1102 © SEMI 2002

American Conference of Governmental Industrial

Hygienists.) [SEMI F6].

5.2.8 TWA — Time Weighted Average  As defined

by the American Conference of Governmental

Industrial Hygienists (ACGIH

) [SEMI F6].

5.2.9 VMB — Valve Manifold Box.

5.3 Definitions

5.3.1 abatement system — a system used to modify the

effluent from a process in order to make it safe to emit

from the facility or to reduce emissions of hazardous

materials to safe levels.

5.3.2 authorized personnel  those persons trained

and capable of performing activities involving the risks

associated with the defined tasks.

5.3.3 carriage  a hand cart for carrying one or two

gas cylinders.

5.3.4 chlorosilane  dichlorosilane or trichlorosilane.

5.3.5 controlled condition  when related to silane

family gases, a condition in which the gas is controlled

within the confines of an approved piping system with

controls that can determine if the safe parameters of the

piping system have failed.

5.3.6 exhaust treatment system  a system similar to

an abatement system, except it handles only the

airborne emissions from a process in order to make

them safe to emit or to reduce the levels of hazardous

materials to safe emission levels.

5.3.7 fail-safe  designed so that a failure does not

result in an increased risk [SEMI S2].

5.3.8 flammable gas  any gas that forms an ignitable

mixture in air at 20 degrees C (68°F) and 101.3 kPa

(14.7 psia) [SEMI S2].

5.3.9 Flow Limiting Device  a device installed in a

valve that is designed to reduce the maximum flow

from the valve under full flow conditions [SEMI F5]

[One such device is a Restricted Flow Orifice (RFO)].

5.3.10 foolproof  designed so that any single human

error or misuse does not result in unacceptable risk.

5.3.11 occupational exposure limits (OELs)  Various

terms are used to refer to OELs, such as permissible

exposure levels, Threshold Limit Values

, maximum

acceptable concentrations, maximum exposure limits,

and occupational exposure standards. When OELs are

used to specify work-area criteria in this document ,

OELs are generally established on the basis of an eight

hour workday. When OELs are used to specify criteria

in this document for alarm or warning in non-

occupational area, OELs established on shorter

exposure basis may be used. However, the criteria

used in determining OELs can differ among the various

countries that have established values. Refer to the

national bodies responsible for the establishment of

OELs. (Threshold Limit Value is a registered trademark

of the American Conference of Governmental Industrial

Hygienists.)

5.3.12 oxidizer gas  a gas which will support

combustion or increase the burning rate of a

combustible material with which it may come in contact

[SEMI S4].

5.3.13 pyrophoric gas  “a gas which upon contact

with air will ignite spontaneously at or below a

temperature of 54°C (130°F) [SEMI S4]” at a pressure

of 101.3kPa (14.7psia).

5.3.14 safe shutdown condition  a condition in which

all hazardous energy sources are removed or suitably

contained and hazardous production materials are

removed or contained, unless this results in additional

hazardous conditions.

5.3.15 safe state  a condition in which the equipment

does not present any uncontrolled hazards to itself or to

personnel. It does not allow hazardous production

chemicals to flow.

An acceptable safe state is

determined by the designer of the equipment and is

based on the hazards in the design.

5.3.16 silane  any of monosilane, disilane, or

trisilane.

5.3.17 unacceptable risks — risks of a degree or type

which are not acceptable to the person who approves a

design or procedure.

5.3.18 unsafe gas condition  a condition in which the

gas is not safely contained within the designed

parameters of the equipment process, or which could

lead to a gas emission or gas hazard.

6 General Principles

6.1 Since silane family gases have several hazardous

properties, personnel should wear appropriate

protective equipment when working with silane family

gas sources.

6.1.1 Monosilane (SiH

), disilane (Si

) and trisilane

(Si

) are pyrophoric. If these gases are mixed with

stronger oxidizing gases than air, combustion and

explosion energies can radically increase.

6.1.2 Dichlorosilane (SiH

) is pyrophoric and

trichlorosilane (SiHCl

) is flammable. Dichlorosilane

(SiH

) and trichlorosilane (SiHCl

) are also

corrosive gases. If these gases are mixed with

SEMI S18-1102 © SEMI 2002

moisture, corrosivity can radically increase and

pyrophoric byproduct gases might also be produced.

NOTE 2: The most recent and best research on DCS puts the

AIT (Auto Ignition Temperature) at 44 degrees C plus/minus

3 degrees C, or about 111 degrees F. It should be noted

however, that unlike silane, DCS is not expected to autoignite

in almost all ambient conditions where we would find it in

use. For fire protection purposes it can be treated as a highly

flammable gas.

6.2 Risk Management Strategies  Fundamental

concepts of safety and accident prevention are:

6.2.1 An understanding of facilities, piping and

equipment, from storage to gas abatement, is essential

for safe handling of silane family gases in

semiconductor or FPD manufacturing facilities.

6.2.2 The safety of facilities can be enhanced by

implementation of designs for sources, piping and

equipment that use devices with fail-safe, foolproof,

self-diagnostic and predictive functions.

6.2.3 Safety systems should detect current safety status

and generate notices that indicate conditions of elevated

risk, through computer self-diagnosis and dedicated

SSCS devices. If the SSCSs cannot confirm normal

operation of assigned silane family gas handling system

or unit, the silane family gas supply should

automatically be shut off.

6.2.3.1 SSCSs can determine if a safe status has been

achieved before proceeding to the next step in a silane

family gas handling process.

6.2.3.2 SSCSs should be provided in distribution

facilities, cylinder cabinets, process equipment, gas

treatment systems, and the like.

6.2.4 Safe design depends on equipment designers’ and

facilities designers’ understanding of silane family gas

properties and hazards. Design methods for controlling

these hazards require full integration of measures from

all portions of the delivery and use systems.

NOTE 3: Information on silane family gases’ hazards is

available from various sources, including: regulations,

MSDSs, Factory Mutual Loss Prevention Data Sheets, NFPA

Standards, consensus Building Codes, and various research

papers.

6.2.4.1 The supplier should complete, prior to use, a

hazard identification and risk assessment [such as

Process Hazard Analysis (PHA), Hazard and

Operability Analysis (Haz-Op), Failure Mode Effects

Analysis (FMEA)], for all silane family gas systems.

6.2.4.2 The results of the analysis should be reported

using the SEMI S10 risk matrix.

6.2.5 Minimization of Quantity  The quantity of any

silane family gas online and in use should be limited to

the smallest amount necessary for effective production.

NOTE 4: Separation and setback considerations for silane

family gas storage and dispensing areas must be in

accordance with jurisdictional requirements.

6.2.6 Periodic accident prevention assessments should

be performed to assist in minimizing incident

frequency.

6.3 Isolation (Lockout/Tagout)  Isolation (“lock

out/tag out”) capability should be provided for all silane

sources at all levels necessary to perform service or

maintenance safely on silane family gas systems.

6.3.1 Energy isolation of all other energy sources (e.g.,

electrical, mechanical) should be performed, as

appropriate, to provide safety for personnel working on

energy systems associated with silane family gases.

NOTE 5: Maintenance on energized non-hazardous electrical

systems may not be safe when a silane family gas is present in

the system.

6.4 Access Control

6.4.1 Multiple level access control, to each point where

any hazard may exist in a normal or failure state, should

be provided for all silane family gas systems.

6.5 All personnel concerned in silane family gas

handling should be trained for the jobs they are to

perform and hazards to which they will be exposed. All

such training should be formally documented and if

regulations apply then the documentation should be in

accordance with the regulations.

6.5.1 Audits of system status and equipment condition

should be performed and documented on a periodic

basis.

6.5.2 The operator or technician should be capable of

checking the current status and any abnormal condition

before beginning work on any system or sub-system.

6.5.3 Evacuation and Purging

6.5.3.1 When connecting silane family gas piping to

equipment, the air in the piping should be purged out

with inert gas such as nitrogen into a safe location to

prevent reaction with silane family gases.

6.5.3.2 To enable purging without venting into unsafe

locations, a purge port should be installed at locations

where sealed systems require purging. Purge ports

should have a stop valve and, if not connected to the

purge gas, should be sealed with a cap or plug.