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SEMI E106-1104 © SEMI 2000, 2004 9 Type of Product and its Components SEMI M1.15, M8, or M28 (Wafer) SEMI E57 (Kinematic Coupling) SEMI E1.9 (Cassette) SEMI E47.1 (FOUP) SEMI M31 (FOSB) SEMI E103 (Single-Wafer Box System…

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SEMI E106-1104 © SEMI 2000, 2004 8
Type of Product and its
Components
SEMI M1.15, M8, or M28 (Wafer)
SEMI E57 (Kinematic Coupling)
SEMI E1.9 (Cassette)
SEMI E47.1 (FOUP)
SEMI M31 (FOSB)
SEMI E103 (Single-Wafer Box System)
SEMI E62 (FIMS)
SEMI E63 (BOLTS-M) and/or E92 (BOLTS-Light)
SEMI E15.1 (Load Port)
SEMI E64 (Cart Docking Interface)
SEMI E83 (PGV Docking Flange)
SEMI E84 (Carrier Handoff Parallel I/O)
SEMI E99 & E99.1 (Carrier ID Reader/Writer Comm.)
SEMI E85 (Stocker to Interbay Transport System)
SEMI E22.1 (Cluster- Tool End Effector)
SEMI E21.1 (Cluster-Tool Module Interface)
SEMI E25 & E26.1 (Cluster-Tool Access & Footprint)
SEMI E72 (Equipment Footprint, Height, and Weight)
SEMI G74 (Tape Frame)
SEMI G77 (Frame Cassette)
SEMI E110 (Indicator/Switch Placement)
AGV or RGV:
carrier supports D
carrier envelope I I I
carrier handler I I I I
tool load port access I
hand-off I/O D
intrabay OHT vehicle:
carrier envelope I
carrier handler I
tool load ports I
hand-off I/O D
stocker load ports I
height I
carrier stocker:
carrier supports D
carrier envelope I I I
carrier handler I I I
floor based load ports D
PGV interface D
hand-off I/O D
carrier ID reader D
overhead load ports D
height and weight D
carrier ID reader unit:
ID tags on carrier I I I
volume in load port I
box opener/loader
unit:
carrier supports D
carrier envelope I I
FOUP door opener D
interface to rest of tool I
load ports D
PGV interface D
hand-off I/O D
carrier ID reader D
height and weight D
Indicator and switch D
SEMI E106-1104 © SEMI 2000, 2004 9
Type of Product and its
Components
SEMI M1.15, M8, or M28 (Wafer)
SEMI E57 (Kinematic Coupling)
SEMI E1.9 (Cassette)
SEMI E47.1 (FOUP)
SEMI M31 (FOSB)
SEMI E103 (Single-Wafer Box System)
SEMI E62 (FIMS)
SEMI E63 (BOLTS-M) and/or E92 (BOLTS-Light)
SEMI E15.1 (Load Port)
SEMI E64 (Cart Docking Interface)
SEMI E83 (PGV Docking Flange)
SEMI E84 (Carrier Handoff Parallel I/O)
SEMI E99 & E99.1 (Carrier ID Reader/Writer Comm.)
SEMI E85 (Stocker to Interbay Transport System)
SEMI E22.1 (Cluster- Tool End Effector)
SEMI E21.1 (Cluster-Tool Module Interface)
SEMI E25 & E26.1 (Cluster-Tool Access & Footprint)
SEMI E72 (Equipment Footprint, Height, and Weight)
SEMI G74 (Tape Frame)
SEMI G77 (Frame Cassette)
SEMI E110 (Indicator/Switch Placement)
main part of process
or metrology
equipment:
substrate handler I I D
box opener interface D
tool controller D
height and weight D
cluster tool central
handler module:
substrate handler I D
module interface D
footprint and access I
height and weight D
cluster tool process
module:
process chamber I I
module interface D
footprint and access D
height and weight D
wafer tape frame:
wafer contact I
other features D
frame cassette:
wafer/frame contact I I
other features D
back-end tool load
port:
carrier envelope I
8 Related Documents
1
Backend Global Joint Guidance for 300 mm Semiconductor Factories
Global Joint Guidance for 300 mm Semiconductor Factories
I300I Factory Guideline Compliance: Factory Integration Maturity Assessment for 300 mm Production Equipment
I300I Factory Guidelines
1 http://www.sematech.org/public/resources/300mm/guide.htm and http://www.sematech.org/public/resources/300mm/methods.htm
SEMI E106-1104 © SEMI 2000, 2004 10
I300I Guidelines on 300 mm Process Tool Mechanical Interfaces for Wafer Lot Delivery, Buffering, and Loading
Integrated Minienvironment Design Best Practices