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SEMI E30-1103 © SEMI 1992, 2003 75 7 SECS-II Message Subset This section lists the required set of SECS-II messages as referenced in this docum ent. Definitions for these messages can be found in SEMI E5. All primary mes…

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SEMI E30-1103 © SEMI 1992, 2003
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Table 6.1 GEM-Defined Collection Events
Event Designation Typical Variable Data Reference
Control-Related Events: Section 3.3
Equipment OFF-LINE ControlState, Clock ON-LINE->OFF-LINE
Control State LOCAL ControlState, Clock REMOTE->LOCAL or
OFF-LINE->LOCAL
Control State REMOTE ControlState, Clock LOCAL->REMOTE or
OFF-LINE->REMOTE
Operator Command Issued OperatorCommand Operator Activity while REMOTE state
is active.
Processing-Related Events: Note: Any transition in the implemented
processing state model must have a
corresponding collection event.
Section 3.4
Processing Started Clock, PreviousProcessState Entry into EXECUTING state.
Processing Completed Clock, PreviousProcessState Normal exit of EXECUTING state.
Processing Stopped Clock, PreviousProcessState Result of STOP command from host or
operator.
Processing State Change Clock, ProcessState,
PreviousProcessState
Any processing state transition.
Alarm Management Events: Section 4.3
Alarm
n
Detected Clock, AlarmID, AlarmsSet, Associated
variable data
ALARM
n
CLEAR->ALARM
n
SET
Alarm
n
Cleared Clock, AlarmID, AlarmsSet ALARM
n
SET->ALARM
n
CLEAR
Equipment Constant Events: Section 4.5
Operator Equipment Constant Change ECID Operator activity
Limits Monitoring: Section 4.2.4
Limit Zone Transition
n
(separate CEID
per variable)
Clock, LimitVariable, EventLimit,
Transition Type
Entry into BELOW LIMIT or ABOVE
LIMIT states.
Process Program Management Events: Section 4.6
Process Program Change PPChangeName, PPChangeStatus Operator activity
Process Program(s) Selected PPExecName Operator/Host activity
Material Movement Events: Section 4.7
Material Received Clock
Material Removed Clock
Spooling Events: Section 4.11
Spooling Activated SpoolStartTime SPOOL INACTIVE->SPOOL ACTIVE
Spooling Deactivated SpoolCountTotal SPOOL OUTPUT->SPOOL
INACTIVE
Spool Transmit Failure Clock, SpoolCountActual
SpoolCountTotal
TRANSMIT SPOOL->NO SPOOL
OUTPUT
Terminal Services Events: Section 4.8
Message Recognition Clock Operator
New Execution Recipe Event RcpChangeName, RcpChangeStatus Section 4.6.2.2
Execution Recipe Change Event RcpChangeName, RcpChangeStatus Section 4.6.2.2
Successful Upload DataSetName Sections 4.6.5.3, 4.6.6.3
Bad Upload DataSetName Sections 4.6.5.3, 4.6.6.3
SEMI E30-1103 © SEMI 1992, 2003
75
7 SECS-II Message Subset
This section lists the required set of SECS-II messages as referenced in this document. Definitions for these
messages can be found in SEMI E5. All primary messages (for which SEMI E5 defines replies) should have replies
available. Replies are required or optional as specified in SEMI E5.
STREAM 1: Equipment Status
S1,F1 Are You There Request (R) S,H<->E
S1,F2 On-Line Data (D) S,H<->E
S1,F3 Selected Equipment Status Request (SSR) S,H->E
S1,F4 Selected Equipment Status Data (SSD) M,H<-E
S1,F11 Status Variable Namelist Request (SVNR) S,H->E
S1,F12 Status Variable Namelist Reply (SVNRR) M,H<-E
S1,F13 Establish Communications Request (CR) S,H<->E
S1,F14 Establish Communications Request Acknowledge (CRA) S,H<->E
S1,F15 Request OFF-LINE (ROFL) S,H->E,reply
S1,F16 OFF-LINE Acknowledge (OFLA) S,H<-E
S1,F17 Request ON-LINE (RONL) S,H->E,reply
S1,F18 ON-LINE Acknowledge (ONLA) S,H<-E
STREAM 2: Equipment Control and Diagnostics
S2,F13 Equipment Constant Request (ECR) S,H->E
S2,F14 Equipment Constant Data (ECD) M,H<-E
S2,F15 New Equipment Constant Send (ECS) S,H->E
S2,F16 New Equipment Constant Acknowledge (ECA) S,H<-E
S2,F17 Date and Time Request (DTR) S,H<->E
S2,F18 Date and Time Data (DTD) S,H<->E
S2,F23 Trace Initialize Send (TIS) S,H->E
S2,F24 Trace Initialize Acknowledge (TIA) S,H<-E
S2,F29 Equipment Constant Namelist Request (ECNR) S,H->E
S2,F30 Equipment Constant Namelist (ECN) M,H<-E
S2,F31 Date and Time Send (DTS) S,H->E
S2,F32 Date and Time Acknowledge (DTA) S,H<-E
S2,F33 Define Report (DR) M,H->E
S2,F34 Define-Report Acknowledge (DRA) S,H<-E
S2,F35 Link Event Report (LER) M,H->E
S2,F36 Link Event Report Acknowledge (LERA) S,H<-E
SEMI E30-1103 © SEMI 1992, 2003
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S2,F37 Enable/Disable Event Report (EDER) S,H->E,reply
S2,F38 Enable/Disable Event Report Acknowledge (EDEA) S,H<-E
S2,F39 Multi-Block Inquire (DMBI) S,H->E
S2,F40 Multi-Block Grant (DMBG) S,H<-E
S2,F41 Host Command Send (HCS) S,H->E
S2,F42 Host Command Acknowledge (HCA) S,H<-E
S2,F43 Reset Spooling Streams and Functions (RSSF) S,H->E
S2,F44 Reset Spooling Acknowledge (RSA) M,H<-E
S2,F45 Define Variable Limit Attributes (DVLA) M,H->E
S2,F46 Variable Limit Attribute Acknowledge (VLAA) M,H<-E
S2,F47 Variable Limit Attribute Request (VLAR) S,H->E
S2,F48 Variable Limit Attributes Send (VLAS) M,H<-E
S2,F49 Enhanced Remote Command M,H->E
S2,F50 Enhanced Remote Command Acknowledge M,H<-E
STREAM 5: Exception (Alarm) Reporting
S5,F1 Alarm Report Send (ARS) S,H<-E
S5,F2 Alarm Report Acknowledge (ARA) S,H->E
S5,F3 Enable/Disable Alarm Send (EAS) S,H->E
S5,F4 Enable/Disable Alarm Acknowledge (EAA) S,H<-E
S5,F5 List Alarms Request (LAR) S,H->E
S5,F6 List Alarm Data (LAD) M,H<-E
STREAM 6: Data Collection
S6,F1 Trace Data Send (TDS) S,H<-E
S6,F2 Trace Data Acknowledge (TDA) S,H->E
S6,F5 Multi-block Data Send Inquire (MBI) S,H<-E
S6,F6 Multi-block Grant (MBG) S,H->E
S6,F11 Event Report Send (ERS) M,H<-E
S6,F12 Event Report Acknowledge (ERA) S,H->E
S6,F15 Event Report Request (ERR) S,H->E
S6,F16 Event Report Data (ERD) M,H<-E
S6,F19 Individual Report Request (IRR) S,H->E
S6,F20 Individual Report Data (IRD) M,H<-E
S6,F23 Request Spooled Data (RSD) S,H->E
S6,F24 Request Spooled Data Acknowledgement Send (RSDAS) S,H<-E