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SEMI E109-0305 © SEMI 2001, 2005 38 Verification Method Desired Host Actions before Load Equipment Action When Reticle Pod Is Loaded Equipment Action when Ret icle is removed from cass ette Host Actions after Load Verifi…

SEMI E109-0305 © SEMI 2001, 2005 37

Verification

Method

Desired

Host Actions before

Load

Equipment Action When

Reticle Pod Is Loaded

Equipment Action when Reticle is

removed from cassette

Host Actions after Load

Verification Failed: The

equipment initiates Transition

12, then Transition 22 of the

reticle state model the reticle

object created via the service is

destroyed. For the reticle object

created via the reticle ID read

(the “unexpected reticle”) the

reticle is instantiated via

transition 7 into the RETICLE

WAITING FOR HOST state.

Verification Failed: The

host uses either the

RejectReticle service to

indicate that the equipment

should not use the reticle for

processing, or indicates to

the production equipment

that it may proceed with the

unexpected reticle, by

sending the

ProceedWithReticle service.

In both cases the ReticleID

specified in the service is

equal to the one determined

by the ReticleID read.

MoveReticle Service

after Pod Arrival

prior to reticle

instantiation: The

host executes a

MoveReticle

service.

Transition 4 of the

Reticle State Model

Occurs (from no state to

WAITING

QUALIFICATION).

Transition 9 of the Reticle State

Model occurs. The ReticleID is

read.

Verification Passed: The

equipment may proceed with

reticle qualification.

Verification Passed: None.

Verification Failed: The

equipment initiates Transition

12, then Transition 22 of the

reticle state model the reticle

object created via the service is

destroyed. For the reticle object

created via the reticle ID read

(the “unexpected reticle”) the

reticle is instantiated via

Transition 7 into the RETICLE

WAITING FOR HOST state.

Verification Failed: The

host uses either the

RejectReticle service to

indicate that the equipment

should not use the reticle for

processing, or indicates to

the production equipment

that it may proceed with the

unexpected reticle, by

sending the

ProceedWithReticle service.

In both cases the ReticleID

specified in the service is

equal to the one determined

by the ReticleID read.

MoveReticle after

pod arrival and

reticle instantiation

via pod tag read:

None

Equipment reads the pod

tag and instantiates the

reticle object via

Transition 4.

Transition 9 of the Reticle State

Model occurs. The ReticleID is

read.

Verification Passed: The

equipment may proceed with

reticle qualification.

Verification Passed: None.

SEMI E109-0305 © SEMI 2001, 2005 38

Verification

Method

Desired

Host Actions before

Load

Equipment Action When

Reticle Pod Is Loaded

Equipment Action when Reticle is

removed from cassette

Host Actions after Load

Verification Failed: The

equipment initiates Transition

12, the Transition 22 of the

reticle state model the reticle

object created via the service is

destroyed. For the reticle object

created via the reticle ID read

(the “unexpected reticle”) the

reticle is instantiated via

Transition 7 into the RETICLE

WAITING FOR HOST state.

Verification Failed: The

host uses either the

RejectReticle service to

indicate that the equipment

should not use the reticle for

processing, or indicates to

the production equipment

that it may proceed with the

unexpected reticle, by

sending the

ProceedWithReticle service.

In both cases the ReticleID

specified in the service is

equal to the one determined

by the ReticleID read.

Host Based None required, the

host may issue a

ReserveAtPort

service.

The production

equipment reads the

PodID and reports it to

the host in an event

report. Following PodID

read the equipment

initiates Transition 3 of

the Reticle Pod State

Model and a reticle pod

object with the PodID

equal to the one

determined by the PodID

read is instantiated. The

reticle

pod shall not be

opened by the equipment

until and unless the

ProceedWithPod service

is received from the host.

The production equipment reads

the ReticleID and reports it to

the host in an event report.

Following the ReticleID read the

equipment initiates Transition 5

(if a particle inspection is

required, but reticle ID

verification is not) or Transition

6 (if neither a reticle ID

verification nor a particle

inspection is required), or

Transition 7 (if an ID

verification is required) of the

Reticle State Model and a reticle

object determined by the

ReticleID read is instantiated.

Verification Passed: The

host sends a

ProceedWithReticle service

indicating the verification

passed. The equipment may

proceed with reticle

qualification.

Verification Failed: The

host uses the RejectReticle

service to indicate that the

equipment should not use

the reticle for processing.

ProceedWithPod

after Pod arrival,

includes Content

Map:

None

Equipment Reads the

Pod, reports ID. After

receiving

ProceedWithPod with a

ContentMap, the Reticle

is instantiated via

Transition 4.

Transition 9 of the Reticle State

model occurs. The Reticle ID is

read.

Verification Passed:

The equipment may proceed

with reticle verification.

Verification Passed:

None

SEMI E109-0305 © SEMI 2001, 2005 39

Verification

Method

Desired

Host Actions before

Load

Equipment Action When

Reticle Pod Is Loaded

Equipment Action when Reticle is

removed from cassette

Host Actions after Load

Verification Failed:

The Equipment initiates

Transition 12, then Transition 22

of the reticle state model; the

reticle created via the service is

destroyed. For the reticle

created via the ID Read (the

“unexpected reticle”), the reticle

is created via Transition 7 into

the RETICLE WAITING FOR

HOST state.

Verification Failed:

The host uses either the

RejectReticle service to

indicate that the equipment

should not use the reticle for

processing or indicates to

the equipment that it may

proceed with the unexpected

reticle, by sending the

ProceedWithReticle service.

In both cases the ReticleID

specified in the service is

equal to the one determined

by the ReticleID read.

15.5 Table 18 clarifies the relation of the reservation and verification to the related services.

Table 18 Reservation and Verification Relation to Service

Information Provided with Service Reser-

vation

PodID

Verification

Cassette

SlotMap

Verification

ReticleID

Verification

Service Used

Port ID PodI

SlotMa

Content

Map and

ReticleID

1 Yes Equipment

based

Equipment

based

Equipment

based

Bind, or

ReticleTransferJob

Yes Yes Yes Yes

2 Yes Equipment

based

Host based Host based Bind Yes Yes No No

3 Yes Host based Host based Host based ReserveAtPort Yes No No No

ProceedWithPod

(following ID read and

host verification)

No Yes No No

4 Yes Host based Equipment

based

Host based ReserveAtPort Yes No No No

ProceedWithPod to

provide slotmap

(following ID read and

host verification)

No Yes Yes No

5 No Equipment

based

Equipment

based

Equipment

based

PodNotification No Yes Yes Yes

6 No Equipment

based

Host based Host based PodNotification No Yes No No

7 No Host based Equipment

based

Host based ProceedWithPod to

provide slotmap

(following ID read and

host verification)

No Yes Yes No

8 No Host based Host based ProceedWithPod

(following ID read and

host verification)

No Yes No