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SEMI E54.16-0705 © SEMI 2005 33 Table 49 A ssembly-MFC Object Insta nce Net w ork Services Assembly-MFC Profile ID = 180.83, Instance ID = 00 through r Service Request Code Service Name SDM Tag Request Parameters Result …

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SEMI E54.16-0705 © SEMI 2005 32
SISO
Profile ID = 180.71, Instance ID = 00 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
130 Data Type CP A3 SCPTnvType
#1
: (*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 45 SISO Object Instance Network Services
SISO
Profile ID = 180.71, Instance ID = 00 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined --
9.2.12 SISO-Setpoint – The presentation of the Single Input Single Output Setpoint (SISO-Setpoint) object instance
attributes are as indicated in Table 46. The presentation of SISO-Setpoint object services are indicated in Table 47.
Table 46 SISO-Setpoint Object Instance Network Variables
SISO - Setpoint
Profile ID = 180.72, Instance ID = 00 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Ramp Type CP A1 Typedef usint SCPTramptType (*)
#1
129 Ramp Rate CP A2 Typedef (*)
#1
SNVT_xxx
130 Ratio CP A3 Typedef SCPTratio (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 47 SISO Object Instance Network Services
SISO - Setpoint
Profile ID = 180.72, Instance ID = 00 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined --
9.2.13 Assembly-MFC — The presentation of the Assembly Mass Flow Controller (Assembly-MFC) object
instance attributes are as indicated in Table 48. The presentation of Assembly-MFC object services are indicated in
Table 49.
Table 48 Assembly-MFC Object Instance Network Variables
Assembly-MFC
Profile ID = 180.83, Instance ID = 00 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface
SEMI E54.16-0705 © SEMI 2005 33
Table 49 Assembly-MFC Object Instance Network Services
Assembly-MFC
Profile ID = 180.83, Instance ID = 00 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined --
9.3 Specific Device Model For In-Situ Particular Monitor Device — These sections detail the network mapping
required to support the Specific Device Model for In-Situ Particle Monitor Devices (see reference SEMI E54.10 of
§4.1). Table 50 summarizes the In-Situ Particle Monitor Device object types. Subsequent Table 51 to Table 82
details the attributes and services associated with each In-Situ Particle Monitor Device object type.
Table 50 In-Situ Particle Monitor Device Object Types
SEMI SDM Object
Identifier
Object Name
LONMARK Profile
ID
LONMARK Functional Profile Name
ISPMD1 (DM) Device Manager 0
Node Object
ISPMD2 (SAC) Sensor/Actuator/Controller 0
Node Object
ISPMD3 Sensor-AI-LCS 180.16
SFPTsemiSensorAILCS
ISPMD4 Sensor-AI-SLS 180.17
SFPTsemiSensorAISLS
ISPMD5 Sensor-AI-MNS 180.21
SFPTsemiSensorAIMNS
ISPMD16 Sensor-AI-Counter 180.15
SFPTsemiSensorAICounter
ISPMD17 Assembly-ISPM#1 180.84 SFPTsemiAssemblyISPM1
ISPMD18 Assembly-ISPM#2 180.85 SFPTsemiAssemblyISPM2
ISPMD19 Assembly-ISPM#3 180.86 SFPTsemiAssemblyISPM3
ISPMD20 Assembly-ISPM#4 180.87 SFPTsemiAssemblyISPM4
ISPMD21 Assembly-ISPM#5 180.88 SFPTsemiAssemblyISPM5
ISPMD22 Assembly-ISPM#6 180.89 SFPTsemiAssemblyISPM6
ISPMD23 Assembly-ISPM#7 180.90 SFPTsemiAssemblyISPM7
ISPMD24 Assembly-ISPM#8 180.91 SFPTsemiAssemblyISPM8
ISPMD25 Assembly-ISPM#9 180.92 SFPTsemiAssemblyISPM9
ISPMD64 Assembly-ISPM#48 180.93 SFPTsemiAssemblyISPM48
9.3.1 Device Manager — The presentation of the extended ISPM Device manager (DM) object instance attributes
are as indicated in Table 51. The presentation of the extended ISPM DM object services are indicated in Table 52.
Table 51 Extended Device Manager Object Instance Network Variables
Device Manager (DM)
Profile ID = 00, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
129 Gain CP A33 SCPTgain
130 Filter Bandwidth CP A34 SCPTfilterBandwidth (*)
#1
1
131 Tool State NVO A35 Typedef unsigned byte SNVT_tool_state
(*)
#1
SEMI E54.16-0705 © SEMI 2005 34
Device Manager (DM)
Profile ID = 00, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
132 Laser Status NVO A36 Typedef unsigned byte SNVT_laser_status
(*)
#1
133 Flow Path CP A37 Typedef unsigned int SCPTflowPath (*)
#1
134 Volume NVO A38 SNVT_vol_f
135 Volume Units CP A39 SCPTnvType
136 Leak Status NVO A40 Typedef unsigned byte SNVT_leak_status
(*)
#1
137 Time Stamp NVO A41 SNVT_time_stamp
138 LaserSwitch NVI A42 Typedef unsigned int SNVT_switch (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 52 Extended Device Manager Object Instance Network Services
Device Manager (DM)
Profile ID = 00, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
33 Laser On S1 LaserSwitch: state=1
34 Laser Off S2 LaserSwitch: state=0
9.3.2 Service Requests Code — The service request is implemented as a network variable update containing a file
request to an nviSemiReq input to the Extended Device Manager Object functional block of a device. This input is
defined by the SNVT_semi_req type as follows:
typedef enum {
struct {
CMD_LASER_ON = 33,
CMD_LASER_OFF = 34,
} semi_request_t;
typedef struct {
unsigned int flblock_index;
semi_request_t service_code;
unsigned int parameter; // Optional parameter
} SNVT_semi_req;
9.3.3 Sensor Actuator Controller — The presentation of the extended ISPM Sensor Actuator Controller (SAC)
object instance attributes are as indicated in Table 53. The presentation of SAC object services are indicated in Table
54.