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SEMI M16-1103 © SEMI 1989, 2003 2 5 Ordering Information 5.1 Purchase o rders for polysilicon furnish ed to this specification shall include the follo wing items: 5.1.1 Form (nu gget, gran ular, or rod) 5.1.2 Sha pe and …

SEMI M16-1103 © SEMI 1989, 2003 1

SEMI M16-1103

SPECIFICATION FOR POLYCRYSTALLINE SILICON

This specification was technically approved by the Global Silicon Wafer Committee and is the direct

responsibility of the North American Silicon Wafer Committee. Current edition approved by the North

American Regional Standards Committee on September 16, 2003. Initially available at www.semi.org

October 2003; to be published November 2003. Originally published in 1989; previously published

December 1996.

NOTICE: This document was rewritten in its entirety

in 2003, and is a replacement for the previous versions

of both SEMI M16 and SEMI M16.1.

1 Purpose

1.1 This specification is intended for use in procure-

ment of polycrystalline silicon for growth of electronic

grade monocrystalline silicon ingots. Such ingots are

sliced into wafers that are subsequently used for the

production of semiconductor devices, integrated cir-

cuits, and other microelectronic components including

microelectromechanical systems (MEMS).

2 Scope

2.1 This specification covers requirements for poly-

crystalline silicon (poly) used to produce single crystal

silicon by either the modified Czochralski (Cz) or float

zone (FZ) crystal growth technique for applications in

the semiconductor device industry.

2.2 Form and dimensional characteristics are the only

standardized properties set forth below. A purchase

specification may include requirements for additional

physical properties as listed in this specification,

together with test methods suitable for determining

their magnitudes.

NOTE 1: JEITA has also established a specification for

polysilicon.

This specification also includes specification

limits and specified measurement methods for purity and

surface metal contamination. Similarities and differences

between this standard and JEITA EM-3601 are discussed in

Related Information 1.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to

use.

1 JEITA EM-3601, Standard specification for high purity

polycrystalline silicon. Available in Japanese and English from Japan

Electronics and Information Technology Industries Association, 3rd

floor, Mitsui Sumitomo Kaijo Bldg. Annex, 11, Kanda-Surugadai 3-

chome, Chiyoda-ku, Tokyo 101-0062, Japan, Web site:

www.jeita.or.jp

3 Referenced Standards

3.1 SEMI Standards

SEMI MF1708 — Practice for Evaluation of Granular

Polysilicon by Melter-Zoner Techniques

SEMI MF1723 — Practice for Evaluation of Poly-

crystalline Silicon Rods by Float-Zone Crystal Growth

and Spectroscopy

SEMI MF1724 — Test Method for Measuring Surface

Metal Contamination of Polycrystalline Silicon by Acid

Extraction-Atomic Absorption Spectroscopy

3.2 ASTM Standards

E 122 — Practice for Choice of Sample Size to

Estimate Average Quality of a Lot or Process

3.3 Other Standard

ANSI/ASQC Z1.4-1993 — Sampling Procedures and

Tables for Inspection by Attributes

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 etched polysilicon — polysilicon that has been

etched with acid to remove surface contamination.

4.1.2 lot — all of the material of nominally identical

purity and characteristics contained in a single

shipment, manufactured with similar processing

conditions, and traceable to the manufacturing

conditions. A lot may be further defined as the

polysilicon produced from one reactor run.

4.1.3 polycrystalline silicon — silicon, formed by

chemical vapor deposition from a silicon source gas,

having a structure that contains large angle grain

boundaries, twin boundaries, or both. Also known as

poly, or polysilicon.

2 Volume 14.02 of the Annual Book of ASTM Standards, ASTM

International, 100 Barr Harbor Drive, West Conshohocken, PA

19428-2959, USA. Telephone: 610.832.9585, Fax: 610.832.9555,

Web site:

www.astm.org

3 American Society for Quality Control, 611 East Wisconsin

Avenue, Milwaukee, WI 53202, USA. Web site: www.asqc.org.

SEMI M16-1103 © SEMI 1989, 2003 2

5 Ordering Information

5.1 Purchase orders for polysilicon furnished to this

specification shall include the following items:

5.1.1 Form (nugget, granular, or rod)

5.1.2 Shape and size distribution (nugget form only)

5.1.3 Purity

5.1.4 Surface texture (nugget form only)

5.1.5 Surface condition

5.1.6 Optionally, surface metal contamination

5.1.7 Appearance

5.1.8 Lot acceptance procedures (see Section 8 )

5.1.9 Certification (if required) (see Section 10 )

5.1.10 Packing and marking (see Section 11 )

6 Materials and Manufacture

6.1 The material shall consist of polysilicon with the

form specified in the purchase order or contract.

7 Physical Requirements

7.1 The material shall conform to the properties

specified in the purchase order or contract, as follows

(see Table 1):

7.1.1 Shape and size distribution (nugget form only)

7.1.2 Purity

7.1.3 Surface texture (nugget form only)

7.1.4 Surface condition

7.1.5 Surface metal contamination, if specified

7.1.6 Appearance

8 Sampling

8.1 Unless otherwise specified, ASTM Practice E 122

shall be used. When so specified, appropriate sample

sizes shall be selected from each lot in accordance with

ANSI/ASQC Z1.4-1993. Inspection levels shall be

agreed upon between the supplier and the purchaser.

9 Test Methods

9.1 Shape and Size Distribution (Nugget Form Only)

— Determine by methods agreed upon by the purchaser

and the supplier.

9.2 Purity — For nugget and rod forms, determine in

accordance with SEMI MF1723. For granular form,

determine in accordance with SEMI MF1708.

9.3 Surface Texture (Nugget Form Only) — Determine

by a method agreed upon by the purchaser and the

supplier. Visual limit standards shall be used to

describe acceptable limits.

9.4 Surface Metal Contamination, if Specified —

Determine in accordance with SEMI MF1724.

9.5 Surface Condition — Identify as to whether or not

the surface has been etched.

9.6 Appearance — Inspect visually for stains, discolo-

ration, and visible contamination.

10 Certification

10.1 Upon request of the purchaser in the contract or

order, a manufacturer’s or supplier’s certification that

the material was manufactured and tested in accordance

with the specification shall be furnished at the time of

shipment (Certificate of Compliance). Upon request, a

report of the test results may also be required

(Certificate of Analysis).

10.2 In the interest of controlling inspection costs, the

supplier and the purchaser may agree that the material

shall be certified as “capable of meeting” certain

requirements. In this context, “capable of meeting”

shall signify that the supplier is not required to perform

the appropriate test in Section 9. However, if the

purchaser performs the test and the material fails to

meet the requirement, the material may be subject to

rejection.

11 Packing and Marking

11.1 Special packing requirements shall be subject to

agreement between the supplier and purchaser.

Otherwise all poly shall be handled, inspected, and

packed in bags and boxes in such a manner as to

minimize abrasion, chipping, and contamination, and in

accordance with the best industry practices to provide

ample protection against damage during shipment.

11.2 The poly supplied under the specification shall be

identified by appropriately labeling the outside of each

box and each bag therein. Identification shall include,

as a minimum, the weight and lot number of the

polysilicon. The lot number shall provide traceability

to information concerning the manufacturing history of

the particular poly in that lot. Such information shall be

kept on file at the manufacturer’s facility for at least

three years after that particular lot has been accepted by

the purchaser.

12 Related Documents

12.1 The following SEMI standards, cited in SEMI

MF1708 and MF1723 are required to perform the tests

described in those practices:

SEMI MF1389 — Test Methods for Photoluminescence

Analysis of Single Crystal Silicon for III-V Impurities

SEMI MF1391 — Test Method for Substitutional

Carbon Content of Silicon by Infrared Absorption

SEMI MF1630 — Test Method for Low Temperature

FT-IR Analysis of Single Crystal Silicon for III-V

Impurities

SEMI MF1725 — Guide for Analysis of

Crystallographic Perfection of Silicon Ingots

Table 1 Requirements for Polysilicon

Property Nugget Form

(previously SEMI M16.1)

Granular Form Rod Form

Shape Irregular chunks, crushed from

polysilicon rods, with

maximum linear dimension of

150 mm.

As supplied;

Polysilicon granules are nearly

spherical in shape and range in

size from 200 to 2500 µm with

a mean size of about 900 µm.

Approximately cylindrical

polycrystalline rods, with

length equal to or greater than

the diameter of the rod.

Size Distribution As specified by customer. Not applicable. Not applicable.

Purity

Acceptor concentration, max in

parts per billion, atomic (ppba)

As specified by customer. As specified by customer. As specified by customer.

Donor concentration, max in

parts per billion, atomic (ppba)

As specified by customer. As specified by customer. As specified by customer.

Carbon concentration, max in

parts per million, atomic (ppma)

As specified by customer. As specified by customer. As specified by customer.

Evaluate in accordance with SEMI MF1723 SEMI MF1708 SEMI MF1723

Surface Texture Visual limit standards as

agreed upon between supplier

and purchaser.

Not applicable. Not applicable.

Surface Condition Identified as to whether or not

the nuggets have been etched.

As agreed upon between

supplier and purchaser.

Identified as to whether or not

the rods have been etched.

Surface Metal Contamination, if

specified

Sodium, Aluminum, Iron, Chromium, Copper, Nickel, Potassium, and Zinc, as specified, from

thin surface layer on the sample, determined in parts per billion by weight (ppbw) in

accordance with SEMI MF1724.

Appearance Clean with no stains,

discoloration, or visible

contamination.

As agreed upon between

supplier and purchaser.

Clean with no stains,

discoloration, or visible

contamination.