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SEMI E133-0705 © SEMI 2004, 2005 24 # Description Req’d Comments SPC.I.7 Basic Model Management The SPC Analysis Engine shal l provide the capability to create/add models, edit configur ation of models, and delete models…

SEMI E133-0705 © SEMI 2004, 2005 23

# Description Req’d Comments

FP.A.2

Ability to perform advanced statistical/prediction algorithms

on data to enable fault prediction after a specific number of

runs, tool time or products

What is the probability that a specific fault will happen, when,

what are action plans that can be taken, which tools, what is the

predictive classification of a specific fault.

FP.A.3

Ability to build a prediction model from historical data

Based on the historical data, a learning-based model may be

developed. A specific pattern of historical data may give

information about a future fault possibility.

FP.A.4

Ability to predict preventive maintenance scheduling based

on tool/substrate information

This will reduce tool downtime.

9.7 Statistical Process Control Functional Group

9.7.1 This section defines the common capabilities of the SPC functional group.

9.7.2 Table 17 below describes the specialization for SPC of each inherited general capability described in Table 5

above.

9.7.3 Table 18 describes the additional capabilities unique to the SPC functional group.

Table 20 SPC Functional Group Inherited Capabilities

# Description Req’d Comments

SPC.I.1

Provide a Statistical Process Control capability as described

in §5

The Statistical Process Control system shall analyze provided

input data with the purpose of determining if statistically

significant deviations from normal have occurred.

Y Detailed inputs and outputs to be defined

in a future version of the standard.

However, it is expected that the SPC

output will provide enough information

to determine why the engine determined

a deviation occurred.

SPC.I.2

Provide the required PCS Analysis Engine methods

The SPC Analysis Engine shall provide the required interface

methods as defined in this standard.

Y Execute and Update.

SPC.I.3

Provide the required PCS Analysis Engine method

capabilities

The SPC Analysis Engine shall provide the required interface

method capabilities as defined in this standard. .

Y Log Data, Exception Handling, Get

Topic List, Subscribe to Topic, Get

Topic Data

SPC.I.4

Maintain models of selected process control system

environment(s)

SPC Analysis Engine shall maintain explicit or implicit models of

the selected process control environment. These models shall be

used to determine if statistically significant deviations have

occurred.

Y The specific form and behavior of these

models is beyond the scope of this

standard.

SPC.I.5

Provide a mechanism to uniquely instruct the Analysis Engine

to perform an action.

The SPC Analysis Engine shall support an input mechanism

whereby the analysis engine can be instructed to take a specific

unique action.

Y The mechanism could be a single key

variable, e.g., model name or a complex

set of context data utilized internally to

perform context matching, etc. The

action could include application of a

specific model (SPC rule) and generation

of a SPC result.

SPC.I.6

Interface with multiple external systems

SPC Analysis Engine shall be capable of accepting inputs from,

or generating outputs to multiple external systems.

Y The definition of these systems will be a

function of the application environment;

these could include process tool or

metrology systems, or user interfaces.

SEMI E133-0705 © SEMI 2004, 2005 24

# Description Req’d Comments

SPC.I.7

Basic Model Management

The SPC Analysis Engine shall provide the capability to

create/add models, edit configuration of models, and delete

models.

Y This capability will be supported through

the FD Analysis Engine interface.

SPC.I.8

Interface with other Analysis Engines

The SPC Analysis Engine shall be capable of either accepting

outputs from other Analysis Engines as inputs, or producing

outputs that are utilized by other Analysis Engines.

SPC.I.9

Advanced Model Management

The SPC Analysis Engine may provide advanced model

management capabilities including but not limited to: secure

access to models, and automatic updating of models based on

process control environment changes.

SPC.I.10

Provide the optional PCS Analysis Engine method capabilities

The PCS Analysis Engine shall provide all or a subset of the

optional interface method capabilities as defined in this standard.

Table 21 Additional SPC Functional Group Capabilities

# Description Req’d Comments

SPC.A.1

Ability to perform trend analysis

Automated analysis of data for the identification of undesired trends

using industry standard run rules such as (for example) Western

Electric. One result of these calculations and comparisons should be

a decision of whether or not the new data caused the “chart” to go out

of control. The mathematics available must include those items

listed in #SPC.A.4 below.

SPC.A.2

Ability to support standard control charts

Provide ability to plot data as well as display traditional variables

charts, and attributes charts. The system should also provide access

to the data to enable a third party system to display control charts.

SPC.A.3

Ability to perform statistical analysis

These tools may include the ability to calculate statistical metrics,

normal analysis, and non-normal analysis.

SPC.A.4

Ability to calculate control limits

The calculation of control limits for control charts from historical

data using industry standard techniques for calculating upper and

lower control limits for variables and attributes charts based on sub-

group size, sample size, etc.

SPC.A.5

Provide an interface for automatic notification of processing

anomalies

The system must provide an interface to automatically notify an

external system when an assignable cause statistical anomaly is

detected. The interface must provide enough information about the

detected problem for the external system to make decisions about

notification.

Y The external system may for example:

page or e-mail an engineer, or take the

tool in question off-line. Information

provided in the interface should

include: context, severity, and any

fault details.

SPC.A.6

Ability to provide a reference to an Out-of-Control Action Plan

The system should store the action plan that is to be put into effect in

the case of the trend analysis determining that an out of control

condition exists. Ideally this would have at least a full page of

storage and an optional URL linking capability (reference being web

link).

# Description Req’d Comments

SPC.A.7

Ability to store user problem resolution comments

Provide a place for users to put in comments on how the problem

was corrected. This may also be used by the statistical analysis

system to store information related to the OOC point to speed

diagnosis and problem resolution.

10 Method Capabilities and Behavior

10.1 All PCS functional groups inherit certain capabilities, methods, and behavior from the general PCS Interface.

This interface provides support primarily for general execution and publish/subscribe communications.

Publish/subscribe is a type of communications where data produced by an application process can be consumed by a

number of application processes that belong or “subscribe to” the communication environment. Additional

information on the publish/subscribe communications approach can be found in reference §4.

10.2 This standard specifies both required ‘methods’ as well as ‘capabilities’, which must be supported by any PCS

Analysis Engine. Support for the required methods must use the defined method names, as well as the specified

argument and return data types. Most Arguments and Returns must be of the type AnalysisEngineDataSet. The

AnalysisEngineDataSet type is a set of aggregate data structures as defined in §9. Support for the stated “methods”

must be provided as specified. Support for “method capabilities” must be provided by any PCS-conformant

functional group, but how these capabilities are supplied – including specific arguments and returns, method,

argument and return names, and argument and return data types - are either beyond the scope of this standard or

specified elsewhere in this standard, e.g., in specification of the interface data structure. The data types used as the

Arguments and Returns for each capability are general data types, and are guidelines only.

10.3 The general PCS Interface required methods and capabilities are summarized in the table below and described

more fully in the accompanying sections.

10.4 Common Analysis Engine Method Capabilities and Behavior

10.4.1 Common Analysis Engine Method Capabilities

10.4.1.1 The capabilities described in the following section and Table XYZ are required in any PCS-compliant

Analysis Engine. However, the form of their implementation is not a part of this standard. The approach by which

the method capability is accessed by a client, be it via method invocation, database queries and triggers, etc, is

subject to the decisions of the implementer. Also, the exact data types used for the Arguments and Returns are up to

the developer. Additional arguments or return types may also be required depending on the implementation

technology.

10.4.1.2 These method capabilities are generalizations of “Publish/Subscribe” interfaces. Note that there is not

necessarily a one-to-one correspondence between method capabilities as defined herein and methods in an

implementation of these capabilities.

Table 22 Common PCS Analysis Engine Method Capabilities

# Capability Req’d Behavior/Comment

1 Produce Log

Data

Y Allows a client to have access to logging information conveyed through the log messages of

the PCS compliant analysis engine. Arguments passed with a log data request could relate

the date range and context associated with the request, while information returned could

include the status along with the requested log data.

2 Produce

Exception Data

Y Allows a client to access or be informed of exceptions raised by the PCS system. The

exception information would be returned by the AE to the requestor, and could include a

date range, similar to log data.

10.4.2 Common Analysis Engine behavior

10.4.2.1 No additional common AE behavior is specified.

10.5 R2R Control AE Method Capabilities and Behavior