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SEMI E30-1103 © SEMI 1992, 2003 16 3.4 Equipment Processing States — The behavior of the equipment in the performance of its inten ded function must be docum ented. This processing state model is highly dependent on the …

SEMI E30-1103 © SEMI 1992, 2003

Table 3.3 CONTROL State Transition Table

# Current State Trigger New State Action Comments

1 (Undefined) Entry into

CONTROL state

(system

initialization).

CONTROL

(Substate

conditional on

configuration).

None Equipment may be configured to

default to ON-LINE or OFF-LINE .

(See NOTE 1.)

2 (Undefined) Entry into OFF-

LINE state.

OFF-LINE

(Substate

conditional on

configuration.)

None Equipment may be configured to

default to any substate of OFF-LINE.

3 EQUIPMENT

OFF-LINE

Operator actuates

ON-LINE switch.

ATTEMPT ON-

LINE

None Note that an S1,F1 is sent whenever

ATTEMPT ON-LINE is activated.

4 ATTEMPT ON-

LINE

S1,F0. New state

conditional on

configuration.

None This may be due to a communication

failure (See NOTE 2), reply timeout, or

receipt of S1,F0. Configuration may be

set to EQUIPMENT OFF-LINE or

HOST OFF-LINE.

5 ATTEMPT ON-

LINE

Equipment

receives expected

S1,F2 message

from the host.

ON-LINE None Host is notified of transition to ON-

LINE at transition 7.

6 ON-LINE Operator actuates

OFF-LINE switch.

EQUIPMENT

OFF-LINE

None “Equipment OFF-LINE” event occurs.

(See NOTE 3.) Event reply will be

discarded while OFF-LINE is active.

7 (Undefined) Entry to ON-LINE

state.

ON-LINE

(Substate

conditional on

REMOTE/LOCAL

switch setting.)

None “Control State LOCAL” or “Control

State REMOTE” event occurs. Event

reported based on actual ON-LINE

substate activated.

8 LOCAL Operator sets front

panel switch to

REMOTE.

REMOTE None “Control State REMOTE” event

occurs.

9 REMOTE Operator sets front

panel switch to

LOCAL.

LOCAL None “Control State LOCAL” event occurs.

10 ON-LINE Equipment accepts

“Set OFF-LINE”

message from host

(S1,F15).

HOST OFF-LINE None “Equipment OFF-LINE” event occurs.

11 HOST OFF-LINE Equipment accepts

host request to go

ON-LINE

(S1,F17).

ON-LINE None Host is notified to transition to ON-

LINE at transition 7.

12 HOST OFF-LINE Operator actuates

OFF-LINE switch.

EQUIPMENT

OFF-LINE

None “Equipment OFF-LINE” event occurs.

NOTE 1: The configuration mentioned for transitions 1 and 2 should be a single setting. This would provide the user with a choice of entering the

EQUIPMENT OFF-LINE, ATTEMPT ON-LINE, HOST OFF-LINE, or ON-LINE states.

NOTE 2: Communication failures are protocol specific. Refer to the appropriate protocol standard (e.g., SEMI E4 or SEMI E37) for a protocol-

specific definition of communication failure.

NOTE 3: Any host initiated transaction open at the equipment must be completed. This may happen either by sending the appropriate reply to the

host prior to sending the event message or by sending an Sx,F0 message following the event message (i.e., after the transaction).

SEMI E30-1103 © SEMI 1992, 2003

3.4 Equipment Processing States — The behavior of

the equipment in the performance of its intended

function must be documented. This processing state

model is highly dependent on the equipment process,

technology, and style. However, there are expected to

be common aspects to these models.

The Processing State Diagram, Figure 3.4, is provided

as an example of an implementation model. This model

demonstrates the expected nature of the processing state

model documentation. There is no requirement that

these specific states be implemented.

The equipment must generate collection events for each

processing state transition, as well as provide status

variables (ProcessState, PreviousProcessState) whose

values are the current processing state and the previous

processing state.

In referring to the Processing State Diagram, note that

the initialization state INIT is not an actual processing

state. It is shown here simply to indicate that the IDLE

processing state is entered upon completion of

equipment system initialization. On the following pages

detailed descriptions are provided for the equipment

processing states and state transitions (numbered) as

shown in the diagram.

3.4.1 Description of Equipment Processing States

IDLE

In this state the equipment is awaiting instructions.

PROCESSING ACTIVE

This state is the parent of all substates where the

context of process program execution exists.

PROCESS

This state is the parent of those substates that refer to

the active preparation and execution of a process

program.

SETUP

In this state all external conditions necessary for

process execution are satisfied, such as ensuring

material is present at the equipment, input/output ports

are in the proper state, parameters such as temperature

and pressure values are within limits, etc. If all setup

operations are already complete, then this becomes a

fall through state and a transition to the next state takes

place.

READY

In this state the equipment is ready for process

execution and is awaiting a START command from the

operator or the host.

EXECUTING

Executing is the state in which the equipment is

executing a process program automatically and can

continue to do so without external intervention.

PAUSE

In this state processing is suspended and the equipment

is awaiting a command.

Each state transition is defined in the following table.

Note that all transitions in this table should be

considered collection events.

Figure 3.4

Processing State Diagram

SEMI E30-1103 © SEMI 1992, 2003

Table 3.4 Processing State Transition Table

# Current State Trigger New State Action Comments

1 INIT Equipment initialization

complete.

IDLE None None

2 IDLE Commit has been made to set

up.

SETUP None None

3 SETUP All setup activity has

completed and the equipment

is ready to receive a START

command.

READY This activity is

equipment-

specific.

None

4 READY Equipment has received a

START command from the

host or operator console.

EXECUTING This activity is

equipment-

specific.

None

5 EXECUTING The processing task has been

completed.

IDLE None None

6 PROCESSING

ACTIVE

Equipment has received a

STOP command from host or

operator console.

IDLE None None

7 PROCESSING

ACTIVE

Equipment has received an

ABORT command from host

or operator console.

IDLE This activity is

equipment-

specific.

None

8 PROCESS The equipment decides to

PAUSE due to a condition

such as alarm.

PAUSE This activity is

equipment-

specific.

For this type of

problem, an

operator assist is

usually required.

9 PROCESS Equipment has received a

PAUSE command from host

or operator console.

PAUSE This activity is

equipment-

specific.

None

10 PAUSE Equipment has received a

RESUME command from

host or operator console.

PROCESS

substate

This activity is

equipment-

specific.

None

4 Equipment Capabilities and Scenarios

This section describes the details of the capabilities

required by GEM and provides scenarios for their use.

Capabilities are operations performed by semiconductor

manufacturing equipment. These operations are

initiated through the communications interface using

SECS-II messages. A scenario is a group of SECS-II

messages arranged in a sequence to perform a

capability. Other information may be included with the

scenario for clarity. For each capability, the reader is

provided with a statement of purpose, pertinent

definitions, a detailed description, requirements, and

scenarios.

The following capabilities are discussed:

Establish Communications

Event Notification

Dynamic Event Report Configuration

Variable Data Collection

Trace Data Collection

Limits Monitoring

Status Data Collection

On-line Identification

Alarm Management

Remote Control

Equipment Constants

Process Program Management

Material Movement

Equipment Terminal Services

Error Messages