semi合集-English.pdf - 第1221页

SEMI E5-1104 © SEMI 1982, 2004 163 Stream,Function Name (Mnemonic) Direction S12,F19 Map Error Report Send (MERS) S,H<->E Description Used to transmit map related errors. Structure L,2 1. <MAPER> 2. <DATLC…

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SEMI E5-1104 © SEMI 1982, 2004 162
Stream,Function Name (Mnemonic) Direction
S12,F16 Map Data Type 2 (MD2) M,H->E
Description
Used to send map data from the host to the equipment in array format.
Structure
L,4
1. <MID>
2. <IDTYP>
3. <STRP
x
STRP
y
>
4. <BINLT...>
Exception
A zero-length list returned means no such MID.
Stream,Function Name (Mnemonic) Direction
S12,F17 Map Data Request Type 3 (MDR3) S,H<-E,reply
Description
Used to request map data for product at an equipment process station in cartesian coordinate format.
Structure
L,3
1. <MID>
2. <IDTYP>
3. <SDBIN>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F18 Map Data Type 3 (MD3) M,H->E
Description
Used to send map data from the host to the equipment in cartesian coordinate format. Bin values may or may not be included.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <XYPOS
x1
XYPOS
y1
>
2. <BINLT
1
...>
2. L,2
.
.
n. L,2
1. <XYPOS
n
>
2. <BINLT
n
>
Exception
A zero-length list returned means no such MID.
SEMI E5-1104 © SEMI 1982, 2004 163
Stream,Function Name (Mnemonic) Direction
S12,F19 Map Error Report Send (MERS) S,H<->E
Description
Used to transmit map related errors.
Structure
L,2
1. <MAPER>
2. <DATLC>
Exception
None
S12,F20 Not Used
SEMI E5-1104 © SEMI 1982, 2004 164
Figure 6
Wafer Rotation Position in Degrees