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SEMI F97-0305 © SEMI 2005 21 R1-2 Complex FPU – Makeup Air Uni t (MAU) Table R1-3 Status Response of a M AU in Run, Locked and Automatic Mode Status Field Name Meaning Bit-value Watchdog-Toggle Toggle value 0/1 OP-Mode A…
SEMI F97-0305 © SEMI 2005 20
RELATED INFORMATION 1
APPLICATION EXAMPLES
NOTICE: This related information is not an official part of SEMI F97 and was derived from work of the originating
task force. This related information was approved for publication by full letter ballot on November 10, 2004.
R1-1 Application Examples
R1-1.1 In order to help with understanding of FPU states specified in this standard, this Related Information
provides examples of their use. Examples of simple and more complex FPUs are given. The status of the FPU
retrieved by the FMCS is depicted in a table. In addition, a picture is given that might visualize the FPU status by
the FMCS.
R1-2 Simple FPU – Pump
Table R1-1 Status Response of a Pump in Operation
Status Field Name Meaning Value FMCS- Visualization
Watchdog-Toggle Toggle value (not supported) 0
OP-Mode Automatic 1
Control-Mode Local 0
Run-Mode Run 3
Alarm-Mode No_Alarm 0
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode No_Maintenance 0
Simulation-Mode No_Simulation 0
Lock-Mode Not_Locked 0
Table R1-2 Status Response of a Pump That is Not Operating Because of an Alarm, e.g. Motor-Overheat
Status Field Name Meaning Value FMCS- Visualization
Watchdog-Toggle Toggle value (not supported) 0
OP-Mode Automatic 1
Control-Mode Local 0
Run-Mode Down (unscheduled) 0
Alarm-Mode Alarm 1
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode No_Maintenance 0
Simulation-Mode No_Simulation 0
Lock Not_Locked 0
SEMI F97-0305 © SEMI 2005 21
R1-2 Complex FPU – Makeup Air Unit (MAU)
Table R1-3 Status Response of a MAU in Run, Locked and Automatic Mode
Status Field Name Meaning Bit-value
Watchdog-Toggle Toggle value 0/1
OP-Mode Automatic 1
Control-Mode Remote 1
Run-Mode Run 3
Alarm-Mode Alarm 0
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode No_Maintenance 0
Simulation-Mode No_Simulation 0
Lock Locked 1
Makeup Air Unit
MAU007
L
A
Table R1-4 Status Response of a MAU in Maintenance Mode
Status Field Name Meaning Bit-value
Watchdog-Toggle Toggle value 0/1
OP-Mode Automatic 1
Control-Mode Local 0
Run-Mode Stand-by 2
Alarm-Mode Alarm 0
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode Maintenance 1
Simulation-Mode No_Simulation 0
Lock Not_Locked 0
Makeup Air Unit
MAU007
M
L
SEMI F97-0305 © SEMI 2005 22
RELATED INFORMATION 2
CHECKLIST FOR SUPPLIERS AND PURCHASERS
NOTICE: This related information is not an official part of SEMI F97 and was derived from work of the originating
task force. This related information was approved for publication by full letter ballot on November 10, 2004.
R2-1 Checklist of Information Exchanged
R2-1.1 Table R2-1 lists the information that needs to be agreed upon by purchasers, system integrators and
suppliers for a particular application within the focus of this standard.
Table R2-1 Template for the Information Exchanged Between FMCS and FPU
Project:
FPU:
Supplier FPU:
FPU Model:
Supplier FMCS:
FMCS Model:
Protocol FPU/FMCS:
NOTE 1: Table R2-1 is comprised of three sections – General Information, Status Information, and Data Information
General Information
Status Information
Tag:
Field Bit Meaning Issue Comment/Value
Watchdog-toggle 0 0/1 Supported? Yes / No
Frequency?
OP-Mode 1 0: Manual
1: Automatic
Variable supported? Yes / No
Initial state when started?
Manual
Automatic
State-Transitions supported? Yes / No
Restrictions to switch between states?
Control-Mode 2 0: Local
1: Remote
Variable supported? Yes / No
Initial state when started?
Local
Remote
State-Transitions supported? Yes / No
Run-Mode 3-4 0: Down (unscheduled)
1: Down (scheduled)
2: Stand-by
3: Run
Variable supported? Yes / No
Initial state when started?
Down (unscheduled)
Down (scheduled)
Stand-by
Run
State-Transitions supported? Yes / No
Restrictions to switch between states?