semi合集-English.pdf - 第5081页
SEMI M23-0703 © SEMI 1993, 2003 10 Figure 5 Diagram Shows an InP Wafer with the Same Orientation as Figure 3, but wit h a Few Degrees of Orthogonal Misorientation from the Intended Of f-Orientation. The α angle is als o …
SEMI M23-0703 © SEMI 1993, 2003 9
Figures 4A and 4B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option V-Groove
SEMI M23-0703 © SEMI 1993, 2003 10
Figure 5
Diagram Shows an InP Wafer with the Same Orientation as Figure 3, but with a Few Degrees of Orthogonal
Misorientation from the Intended Off-Orientation. The
α angle is also shown.
SEMI M23-0703 © SEMI 1993, 2003 11
Figure 6
SEMI Wafer Edge Profile Template
Table 3 Edge Profile — Dimension and Tolerance Requirements
Property Dimensions Units
Edge Profile Coordinate: x-coordinate y-coordinate
Point A 75 0
µm
Point B 510 0
µm
Point C 50 (See NOTE 1.)
µm
Point D 0 75
µm
NOTE 1: The y-coordinate of point C is 1/3 the nominal wafer thickness.
Figure 7
Example of Acceptable and Unacceptable Wafer Edge Profiles