semi合集-English.pdf - 第1382页

SEMI E30-1103 © SEMI 1992, 2003 56 Close Data Set Acknowledge S13,F8--> [IF] multi-block request [THEN] <--S15,F1 Recipe Management Recipe Management S15,F2--> Multi-block Inquire Multi-block Grant [END_IF] <…

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Equipment-Initiated Recipe Download:
COMMENTS HOST EQUIPMENT COMMENTS
RCPCMD = Download
[IF] multi-block request
<--S15,F1 [THEN] Recipe Management Multi-
block inquire
Recipe Management Multi-block S15,F2-->
Grant
[END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
[IF]
Recipe is multi-block
[THEN]
Recipe Management Multi-block S15,F1-->
Inquire
<--S15,F2 Recipe Management Multi-block
Grant
[END IF]
Recipe Download Request S15,F27-->
[IF] RCPOWCODE = TRUE
delete any pre-existing recipe
with the same identifier before
storing new recipe
[END_IF]
<--S15,F28 Recipe Download Acknowledge
RCPCMD = Download
[IF] multi-block request
<--S15,F1 [THEN]
Recipe Management S15,F2--> Recipe Management
Multi-block Grant Multi-block Inquire
[END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
Large Recipe Download S15,F49-->
Requests [IF] RCPOWCODE = TRUE
delete any pre-existing recipe
with the same identifier before
storing new recipe
[END_IF]
<--S15,F50 Large Recipe Download
Acknowledge
Open Data Set Data S13,F4-->
<--S13,F3 Open Data Set Request
START] repeat until ACKC13 is
error:
<--S13,F5 Read Data Set Request
Read Data Set Data S13,F6-->
[END]
<--S13,F7 Close Data Set Send
SEMI E30-1103 © SEMI 1992, 2003
56
Close Data Set Acknowledge S13,F8-->
[IF] multi-block request
[THEN]
<--S15,F1 Recipe Management
Recipe Management S15,F2--> Multi-block Inquire
Multi-block Grant [END_IF]
<--S15,F53 Recipe Verification Send
Recipe Verification S15,F54-->
Acknowledge
4.6.6.5 Recipe Verification
Host requests equipment to verify a recipe that it has stored:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Verify Request S15,F29-->
Equipment verifies recipe
<--S15,F30 Recipe Verify Data
4.7 Material Movement — The material movement capability includes the physical transfer of material (WIP, tools,
expendable materials, etc.) between equipment, buffers, and storage facilities. The transfer of material can be per-
formed by operators, AGV robots, tracks, or dedicated fixed material handling equipment.
4.7.1 Purpose — This capability is limited in implementation, serving to notify the host of the appearance or
removal of material at the equipment’s ports.
4.7.2 Definitions
Port — A point or area on the equipment at which a change in equipment ownership of material may occur.
4.7.3 Description — This capability consists of alerting the host whenever material is sent or received from any of
the ports on the equipment. Event-specific information, such as port identification and material identification, also
may be useful, but definition of these and other related DVVAL’s are left to the implementation.
4.7.4 Requirements — The equipment must supply two CEIDs, one to report when material is sent from any port
and the other to report when material is received at any port.
4.7.5 Scenarios
COMMENTS HOST EQUIPMENT COMMENTS
Material is sent or received at
an equipment port.
<--S6,F11 Send collection event to host.
Host acknowledges. S6,F12-->
4.8 Equipment Terminal Services — Equipment Terminal Services allows the host to display information on the
equipment’s display device or the operator of the equipment to send information to the host.
4.8.1 Purpose — Equipment Terminal Services allows the factory operators to exchange information with the host
from their equipment workstations.
4.8.2 Definitions —Message Recognition: a positive action by the equipment operator indicating the operator has
viewed the text of a host initiated message.
4.8.3 Detailed Description — The equipment must be capable of displaying information passed to it by the host for
the operator’s attention. The information, or an indication of a message, must remain on the equipment’s display
until the operator indicates message recognition. Message recognition results in a collection event that informs the
host that the operator has actually viewed the information.
SEMI E30-1103 © SEMI 1992, 2003
57
The equipment must be capable of passing information to the host that has been entered from the operator’s
equipment console. This information is intended for host applications and is not processed by the equipment.
The equipment has no responsibility for interpreting any of the data passed to or from the host using this method.
4.8.4 Requirements
— Any new Terminal Display message sent by the host shall overwrite an unrecognized message at the same
equipment terminal.
— The equipment must provide a display device capable of displaying at least 160 characters to the operator.
— The equipment must provide a mechanism for displaying information sent to it by the host.
— The equipment must provide an indicator to notify
the operator when an unrecognized message is
present.
— The equipment must provide a mechanism for the
operator to indicate message recognition (e.g., push
button, terminal function).
— The equipment must provide a means for alpha
numeric data entry that can be used by the operator.
— The equipment must support operator entry of at
least 160 characters per message.
— The equipment must have a mechanism to send
operator-entered messages to the host.
— The equipment must support single-block messages
as a minimum. Support of multi-block messages is
optional.
— A Terminal Display message received by the
equipment with a zero length TEXT data item shall
be accepted and replace any previous unrecognized
message, but shall not itself be considered an
unrecognized message. This provides a method of
clearing an unrecognized message and turning off
the unrecognized message indicator.
4.8.5 Scenarios
Host sends information to an equipment’s display device:
COMMENTS HOST EQUIPMENT COMMENTS
Host sends textual information S10,F3-->
to equipment for display to the
operator on terminal x.
<--S10,F4 Equipment acknowledges request
to display text. (Equipment
sets unrecognized message
indicator.)
Operator indicates message
recognition.
(Equipment clears unrecognized
message indicator.)
<--S6,F11 Message recognition event.
(See Section 4.2.1, Event Data
Collection, for details.)
Host acknowledges Optional: S6,F12-->
<--S10,F1 Operator responds with text
via terminal x.
Host acknowledges receipt S10,F2-->
of operator text.