semi合集-English.pdf - 第5614页

SEMI P10-0705 © SEMI 1990, 2005 109 < x s : e l e m e n t n a m e = " Eq u i p S i t e U s e d " t y p e = " x s : s t r i n g " / > < / x s : s e q u e n c e > < / x s : s e q u e n c …

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SEMI P10-0705 © SEMI 1990, 2005 108
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
/ >
< xs: elem ent nam e= "Sever it yCrit er ionReqd"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
< xs: elem ent nam e= "De fect Se t upFile N a m e Reqd"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "De fect EquipUse d" type= " xs:st ring"
/ >
< xs: elem ent nam e= "EquipSit e Use d" type= "
xs:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "De fect I nspM odeUse d"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "De fect I nspPix elSize Use d"
type
= " xs:dou ble" m inOccurs= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "De fect Type" type= "xs:st r in g"
/ >
< xs: elem ent nam e= "De fect I nspSen sit ivit yUse d"
type
= " xs:st r ing" / >
- < xs: sequence m inOccurs= " 0 "
m axOccurs
= "u nbounde d">
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
/ >
< xs: elem ent nam e= "Sever it yCrit e r ionUsed"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
< xs: elem ent nam e= "De fectSe t upFile N a m e Used"
type
= " x s:st r ing" m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< / xs: sequence>
< xs: elem ent nam e= "De fect I nspDa t e " t ype= " x s:da t eTim e"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded
">
< xs: elem ent nam e= "Repa ir Equ ipReqd" type= " x s:st ring"
/ >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "EquipSit e Reqd"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Repa ir Equ ipUsed" t ype= "xs:st ring"
/ >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
SEMI P10-0705 © SEMI 1990, 2005 109
< xs: elem ent nam e= "EquipSit e Use d"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
- < xs: elem ent nam e= "Mea sure dI nspect ionAr ea "
m inOccurs
= " 0 " m axOccurs= " unbounded">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dI nspect ionAr eaExclude"
m inOccurs
= " 0 " m axOccurs= " unbounded">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredD e fect D e nsity"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect Cou nt " type= "xs:int "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect Cou nt Rep"
type
= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sure dDefe ct Count W it hinSpe c"
type
= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sure dDefe ct iveD ie Den sit y"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edDefect iveD ie Count "
type
= " xs:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sur edDefect iveD ie Cou nt Re p"
type
= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sur e dPe r ce nt Defect iveD ie"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect FileN a m e "
type
= " xs:st r ing" m inOccurs= " 0 " m axOccurs= "unbounded"
/ >
< xs: elem ent nam e= "PrePellI nspe ct ionI d" t ype= "x s:st ring"
m inOccurs
= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 110
< xs: elem ent nam e= "PrePellI nspe ct ionDa t e Tim e"
type
= " xs:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Post Pe llI nspect ionI d" type= "xs:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Post Pe llI nspect ion Dat eTim e "
type
= " x s:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt De fe ct M e asur em en t s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dDefect M easur em e nt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Sur faceI nspMe a sur em en t sType">
- < xs: sequence>
< xs: elem ent nam e= "Sur faceQualit yI d" type= "xs:st rin g"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent
nam e= "Sur fI nspEquipReqd"
type
= " x s:st r ing" / >
< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "Sur fI nspModeRe qd"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Su rfI nspPix e lSiz eReqd"
type
= " x s:dou ble" m inOccurs= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "Sur fDe fectType"
type
= " x s:st r ing" / >
< xs: elem ent nam e= " Su rfI nspSensit ivit yRe qd"
type
= " xs:st r ing" / >
- < xs: sequence m inOccurs= " 0 "
m axOccurs
= "u nbounde d">
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
/ >
< xs: elem ent nam e= "Sever it yCrit er ionReqd"
type
= " xs:st r ing" / >
< / xs: sequence>
< / xs: sequence>
< xs: elem ent nam e= "Sur fI nspSe t upFile N a m eReqd"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Su rfI n spEquipUse d"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "EquipSit e Use d" type= "xs:st r in g"
m inOccurs
= " 0 " / >