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SEMI T3-0302 © SEMI 1995, 2002 13 Figure 6 Labels with B ar Code, Human-Readable and M atrix Code Data Fields
SEMI T3-0302 © SEMI 1995, 2002 12
Figure 5
Examples of Box Label Layout Types
SEMI T3-0302 © SEMI 1995, 2002 13
Figure 6
Labels with Bar Code, Human-Readable and Matrix Code Data Fields
SEMI T3-0302 © SEMI 1995, 2002 14
Figure 7
Recommended and Alternative Locations for Labels on Wafer Boxes for
Use with Wafers of 100 to 200 mm Diameter
Bilateral Datum Plane
Bottom Rail
Human Handle
(
o
p
tional
)
Horizontal Datum Plane of
Box Nest or Load Port
Rear Surface
Label Area
Preferred Label Location
Figure 8a
300 mm FOSB Rear Surface Label Locations