semi合集-English.pdf - 第2294页

SEMI E81-0600 © 1999, 2 000 31 Cont rol / Request or Spec Resourc e M ateri al Requestor Job Subj ob Spec Resource Materi al Cont rol Subj ob Spec Resource M at eri al Cont r ol Figure 17 Hierarchical Job Control Pattern…

configured to be limited to specific factory resources

that it can call on to perform work.

7.3.4.7.4 The job requestor has an interface so the

Job/Job Supervisor can report overall job progress. The

Job Requestor interface includes the methods

requesting that it be notified that a job has started,

completed, or been terminated. The requestor or other

components can subscribe to job state change events

and other events for a more detailed job status.

7.3.4.7.5 The Job Supervisor interface provides high

level information about the jobs it is currently

managing. The details of any specific job are provided

by the Job itself, not the Job Supervisor. From the Job

Supervisor, the Job Requestor is able to

• request activity,

• locate jobs that meet certain criteria,

• request lists of all jobs being performed, and

• control all the jobs as a group (e.g. “abort all

jobs”), but not individually (not “abort job X”—

this would be a responsibility of the Job interface).

NOTE 13: Much thought should be given to the use of these

“all jobs” commands since they can cause a great deal of harm

if not designed and used properly.

7.3.4.7.6 The Job interface is the sole source of all

public information about a job. It also provides all

specific control of the job (pause, abort, etc.).

7.3.4.8 Hierarchical Job Structure

7.3.4.8.1 The factory and task hierarchy of Figure 11

and Figure 12 results in a multi-level (hierarchical) job

control structure, with a given Job/Job Supervisor

requesting work through other (sub)Jobs. As Figure 16

illustrates, higher level job controllers specify and

request work from any number of lower level job

controllers and monitor job progress through status and

external feedback. At the lowest level, job control

results in directly manipulating equipment actuators

based on real-time sensor feedback. (Note, this lowest

level of job control is outside the MES scope of the

CIM Frameworkit is within the scope of the

equipment control.) The job request, status, and

feedback information are all candidates for storage in

job history.

Job

Control

Job

Control

Job

Status

Job

Request

External Feedback

(e.g. sensor data

or operator input)

Actuation

Sensor Feedback

Job

Status

Job

Request

Job

Control

External Feedback

(e.g. sensor data

or operator input)

Job

Control

Job

Control

Job

Status

Actuation

Job

Request

Job

Request

Job

Status

Feedback

Physical Processes

Figure 16

Hierarchical Job Control

Control/

Requestor

Spec

Resource Material

Requestor

Job

Subjob

Spec

Resource Material

Control

Subjob

Spec

Resource Material

Control

Figure 17

Hierarchical Job Control Pattern

7.3.4.8.2 Placing the job structure template of Figure

13 into the job control hierarchy of Figure 16 results in

the hierarchical job control pattern of Figure 17.

7.3.4.8.3 At each level, the job control

• Receives job requests with associated job

specifications,

• Decomposes the job into subjobs,

• Defines resource relations between the job and

subjob (e.g., selects and schedules resources for

subjobs within the scope of the job supervisor, such

as machines assigned to an area or process

chambers in a production machine),

• Defines material relations between the job and

subjob (e.g. how lots are assigned to transport

groups and process groups, including decisions on

batching, splits, joins, etc.),

• Requests the subjobs and provides associated

subjob specifications,

• Monitors subjob progress,

• Reports job progress to the job requestor and other

interested functions,

• Records job history.

7.3.4.9 CIM Framework Job Structure Summary

7.3.4.9.1 Figure 18 shows the job hierarchy pattern

applied to the material movement resources of Figure 7.

Figure 19 shows the pattern of Figure 17 applied to the

material processing resources of Figure 7 (branching to

multiple lower-level resources is not shown). Figure 20

summarizes how the CIM Framework components

come together into an integrated manufacturing

execution system.

• The product material hierarchy and genealogy is

modeled in the Product Management components

of the CIM Framework Specification.

• The task specification hierarchy is modeled in the

Specification Definition and Recipe Management

components.

• The resource hierarchy is modeled in the Factory

Operations (for Factory and Area levels),

Equipment Tracking and Maintenance, Durables

and Consumables Management, and Factory Labor

components.

• The control hierarchy is modeled in the Factory

Operations (Factory Jobs), Production Machine

(Production Machine Jobs), Material Transport and

Storage (Transport Jobs), and the maintenance job

supervision aspects of the various Resource

Tracking and Maintenance specializations

(Maintenance Jobs).

Resource Control

Task

Specification

Material

MES Factory,

Area

Transport

and Storage

Resources

Factory Job,

Area Job

Transport

Job

Transport

and

Storage

Jobs

Product Group,

Lot,

Process Group

Transport

Group

Container

Destination

Transport

Machine

Equipment

Manufacturing

Execution

Figure 18

Hierarchical Job Control - Material Transport Aspects

Equipment

Enterprise

Manufacturing

Execution

Resource Control

Task

Specification Material

MESFactory

Area

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Process

Resource

Job

ProductGroup,

Lot, LotFamily,

Inventory Region

Inventory Region,

Process Group

Process

Group

Product Request,

ProductSpec.,

ProcessDefinition

Process Operation

Sequence

Process Operation

Sequence

Process Operation

Spec,

Process Operation

Enterprise Job

Enterprise

Order,

OrderItem

Process

Resource

Group

Figure 19

Hierarchical Job Control - Material Processing Aspects