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SEMI E91-0600 © SEMI 1999 , 2000 8 5.3.3.5 JOB ST OPPING — State whe r e at tempts are made to stop Pr ober Job. 5.3.3.6 JOB ABORT ING — St ate whe r e a ttempts are m ade to abort Prober J ob. 5.3.4 Pr ober Job State Tr…

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SEMI E91-0600 © SEMI 1999, 20007
5.2.5 The Process Model Condition Table
5.2.5.1 Undermentioned Table 2 is an explanation of the transition condition of transition No. 10 in PSEM
Processing State Model diagram.
Table 2 The Process Model Condition Table
Conditions Next State
The check approves that the process program is changed. SETTING UP
The check approves that the process program is not changed.
The previous state was SETTING UP. SETTING UP
The previous state was EXECUTING. EXECUTING
5.3 Prober Job State Model
5.3.1 Purpose
5.3.1.1 The Prober Job state model is defined for the purpose of keeping track of its processing state of the material
to be processed by the prober in every material. The host can give instructions on how to process which material by
creating Prober Job to the equipment. Prober Job is created by the JOB CREATE command. Prober Job state exists
in each Prober Job. It occurs upon creation of Prober Job and is deleted upon its completion. The host can control
progress of material processing which is requested to the equipment according to an event report accompanied by
progress of Prober Job.
5.3.2 Prober Job State Model Diagram
JOB CREATED
JOB
STOPPING
JOB SET UP
JOB ACTIVE
JOB PROCESSING
4
Enter Processing
3 JOB Started
JOB
ABORTING
2
JOB
Canceled
8
Start Aborting
End
Aborting
6
Start
Stopping
9
7
End
Stopping
1
JOB Created
5 End Processing
Figure 3
Prober Job State Model Diagram
5.3.3 Description of Prober Job State
5.3.3.1 JOB CREATED — State where Prober Job is created to the equipment Prober Job has not processed yet. It
has nothing to do with whether material reached the equipment or not.
5.3.3.2 JOB ACTIVE — State where normal Prober Job processing operation is performed It consists of two sub-
states.
5.3.3.3 JOB SET UP (JOB ACTIVE Sub-state) — State that waits for condition to be ready for processing such as
Equipment preparation.
5.3.3.4 JOB PROCESSING (JOB ACTIVE Sub-state) — State where this processing is performed.
SEMI E91-0600 © SEMI 1999, 2000 8
5.3.3.5 JOB STOPPING — State where attempts are made to stop Prober Job.
5.3.3.6 JOB ABORTING — State where attempts are made to abort Prober Job.
5.3.4 Prober Job State Transition Table
Table 3 Prober Job State Transition Table
No. Current State Trigger New State Action Comments
1 Undefined JOB_CREATE command
was received from host or
the Job Create operation
was instructed by operator
when Processing State is
neither INIT nor
MAINTENANCE state.
JOB
CREATED
Create Prober Job. None.
2JOB
CREATED
JOB_CANCEL command
from host or operator.
Undefined Cancel Prober Job. None.
3JOB
CREATED
START command from
host or the Start operation
was instructed by operator.
JOB SET UP Prepare for
processing of
Prober Job and
wait for processing
to be possible.
None.
4 JOB SET UP Prober Job processing
conditions were established.
JOB
PROCESSING
Start processing of
the main unit.
None.
5JOB
PROCESSING
Processing of Prober Job
was normally completed.
Undefined Delete Prober Job. None.
6 JOB ACTIVE STOP command was
received from host or the
stop operation was
instructed by operator.
JOB
STOPPING
Start stop
processing.
A trigger may be caused by
error detection of the
equipment itself as well as by
instruction from outside.
7JOB
STOPPING
The stop operation was
completed.
Undefined Delete Prober Job. None.
8 JOB ACTIVE ABORT command was
received from host of the
Abort operation was
instructed by operator.
JOB
ABORTING
Start abort
processing.
A trigger may be caused by
error detection of the
equipment itself as well as by
instruction from outside.
9JOB
ABORTING
Abort processing was
completed.
Undefined Delete Prober Job. None.
6 Collection Event List
6.1 Requirements
6.1.1 All GEM-required Events are required by the PSEM. Since Processing State Model is required by the PSEM,
all state transitions are required Events.
6.1.2 All GEM-required Events asso ciated with the GEM Control, Communications, Alarm, and Spooling State
Models are required. This section of the PSEM lists only those collection events that are not associated with a
change of state or those requiring specific data variables (DVVALs) or Reports defined in the PSEM.
6.2 Collection Event Tables
6.2.1 Table 4 shows events and reports required for the PSEM process state transition. Table 5 shows events and
reports required for the Prober Job state transition. Table 6 shows other collection events.
SEMI E91-0600 © SEMI 1999, 20009
Table 4 Collection Events Required by Process State Transition
Transition Transition No. Current State New State Typical Variable
Data
Start INIT 1 Undefined INIT Previous Process
State
Into IDLE 2 INIT IDLE
5EXECUTING
12 STOPPING
22 ABORTING
24 IDLE with ALARMS
26 MAINTENANCE
Into IDLE with ALARMS 23 IDLE IDLE with ALARMS
Into MAINTENANCE 25 IDLE MAINTENANCE
Start SETTING UP 3 IDLE SETTING UP
11 EXECUTING
10 CHECKING
Start EXECUTING 4 SETTING UP EXECUTING
10 CHECKING
Start PAUSING 9 SETTING UP PAUSING
9EXECUTING
Into PAUSED 13 PAUSING PAUSED
18 PAUSED SETTING UP
14 ALARM PAUSED
Start CHECKING 16 PAUSED CHECKING
Into PAUSED SETTING UP 17 PAUSED PAUSED SETTING UP
Into ALARM PAUSED 8 SETTING UP ALARM PAUSED
8EXECUTING
15 CHECKING
15 PAUSING
15 PAUSED SETTING UP
15 PAUSED
Start STOPPING 6 SETTING UP STOPPING
6EXECUTING
19 CHECKING
19 PAUSING
19 PAUSED SETTING UP
19 PAUSED
19 ALARM PAUSED
Start ABORTING 7 SETTING UP ABORTING
7EXECUTING
20 CHECKING
20 PAUSING
20 PAUSED SETTING UP
20 PAUSED
20 ALARM PAUSED
21 STOPPING