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SEMI S4-0304 © SEMI 1992, 2004 3 b) It is designated as an irritant according to European Directive 67/5 48/EEC, on the appr oximati on of the laws, regulations and administrative provisio ns relating to the classificati…

4.3 Compressed Gas Association

P20 — Standard for the Classification of Toxic Gas

Mixtures

P23 — Standard for Categorizing Gas Mixtures

Containing Flammable and Nonflammable Components

4.4 International Organization for Standardization

(ISO)

10156:1996 — Gases and gas mixtures - Determination

of fire potential and oxidizing ability for the selection

of cylinder valve outlets

4.5 European Directives

67/548/EEC — On The Approximation Of The Laws,

Regulations And Administrative Provisions Relating To

The Classification, Packaging And Labeling Of

Dangerous Substances Including Its Amendments And

Adaptations To Technical Progress

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CGA — Compressed Gas Association

5.1.2 CFR — Code of Federal Regulations (United

States)

5.1.3 HPM— Hazardous Production Material

5.1.4 ISO — International Organization for

Standardization

5.1.5 LC

— median lethal concentration in air

5.1.6 NFPA — National Fire Protection Association

5.2 Definitions

5.2.1 acid — a corrosive chemical whose chemical

reaction characteristic is that of an electron acceptor.

5.2.2 base — a corrosive chemical whose chemical

reaction characteristic is that of an electron donor.

5.2.3 chemical — a liquid or gas used in a process for

its ability to react with or displace other substances.

4 Compressed Gas Association, 4221 Walney Road, 5th Floor,

Chantilly VA 20151-2923., Phone: 703-788-2700, Fax: 703-961-

1831, Email:

cga@cganet.com , www.cganet.com

5 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: /www.iso.ch

6 http://europa.eu.int/comm/environment/dansub/main67_548/index-

_en.htm

5.2.4 combustible material — a material that, in the

form in which it is used and under the conditions

anticipated, may ignite, burn, or release flammable

vapors when subjected to fire or heat.

5.2.5 corrosive — a chemical that causes visible

destruction of, or irreversible alterations in, living tissue

by chemical action at the site of contact. A chemical is

considered to be corrosive if, when tested on the intact

skin of albino rabbits by the method described in the U.

S. Department of Transportation in Appendix A to 49

CFR 173, it destroys or changes irreversibly the

structure of the tissue at the site of contact following an

exposure period of four hours. This term shall not refer

to action on inanimate surfaces.

5.2.6 cylinder — a pressure vessel designed for

containing chemicals at positive gauge pressure and

having a circular cross section. The definition of

“cylinder” does not include a portable tank, multiunit

tank car tank, cargo tank, or tank car.

5.2.7 flammable gas — any gas that forms an ignitable

mixture with air at 20 ° C (68 ° F) and 101.3 kPa (14.7

psia). [SEMI S2, S18]

5.2.8 gas — the fluid form of a substance in which it

can expand indefinitely and completely fill its

container; form that is neither liquid or solid. [SEMI

F78]

5.2.9 gas cabinet — a metal enclosure which is

intended to provide local exhaust ventilation, protection

for the gas cylinder from fire from outside the cabinet,

and protection for the surroundings from fire from

inside the cabinet.

5.2.10 hazardous production material (HPM) — a

solid, liquid, or gas that has a degree of hazard rating in

health, flammability, or reactivity of Class 3 or 4 as

ranked by NFPA 704 and which is used directly in

research, laboratory, or production processes which

have as their end product materials which are not

hazardous. [SEMI S2]

5.2.11 highly toxic chemical — a chemical that has a

median lethal concentration (LC

) in air of 200 parts

per million by volume or less of gas or vapor, or 2

milligrams per liter or less of mist, fume, or dust, when

administered by continuous inhalation for one hour (or

less if death occurs within one hour) to albino rats

weighing between 200 and 300 grams each.

5.2.12 inert gas — a gas which at ambient conditions

does not react chemically with other chemicals.

5.2.13 irritant — A chemical is considered to be an

irritant if:

a) It is classified as a “primary skin irritant” per 16 CFR

1500, or

SEMI S4-0304 © SEMI 1992, 2004 3

b) It is designated as an irritant according to European

Directive 67/548/EEC, on the approximation of the

laws, regulations and administrative provisions relating

to the classification, packaging and labeling of

dangerous substances including its amendments and

adaptations to technical progress.

5.2.14 liquid — having its molecules moving freely

with respect to each other so as to flow readily, unlike a

solid, but because of cohesive forces not expanding

infinitely like a gas. [SEMI F78]

5.2.15 other health hazard —A chemical for which

there is statistically significant evidence based on at

least one study conducted in accordance with

established scientific principles that acute or chronic

health effects may occur in exposed employees, other

than those for which a separate classification is defined.

The term “other health hazard” includes chemicals

which are carcinogens, reproductive toxins, sensitizers,

hepatotoxins, nephrotoxins, neurotoxins, mutagens,

agents which act on the hematopoietic system, and

agents which damage the lungs, skin, eyes, or mucous

membranes.

5.2.16 oxidizer chemical — a chemical which will

support combustion or increase the burning rate of a

combustible or flammable material with which it may

come in contact.

5.2.17 pyrophoric chemical — a chemical which upon

contact with air will ignite spontaneously at or below a

temperature of 54°C (130°F).

5.2.18 separation — the condition of having the risks

of mixing of chemicals and of exposure of cylinders to

chemicals other than those they contain managed by the

cylinders being in different gas cabinets.

5.2.19 toxic chemical — A chemical is considered to

be toxic if:

a) It that has a median lethal concentration (LC

) in air

of more than 200 parts per million but not more than

2,000 parts per million by volume of gas or vapor, or

more than 20 milligrams per liter of mist, fume, or dust,

when administered by continuous inhalation for one

hour (or less if death occurs within one hour) to albino

rats weighing between 200 and 300 grams each, or

b) It is designated as “Toxic” according to European

Directive 67/548/EEC on the approximation of the

laws, regulations and administrative provisions relating

to the classification, packaging and labeling of

dangerous substances including its amendments and

adaptations to technical progress.

5.2.20 unstable (reactive) — a chemical which in the

pure state, or as produced or transported, will

vigorously polymerize, decompose, condense, or will

become self-reactive under conditions of shock,

pressure, or temperature.

5.2.21 water reactive — a chemical that reacts with

water to release a chemical that is either flammable or

presents a health hazard.

6 Classification

6.1 Chemicals should be classified according to the

categories and associated symbols as shown in Table 1.

6.2 Information on the properties of chemicals (other

than mixtures) should be obtained through

measurement or from literature, such as MSDSs.

Table 1 Classifications and Symbols

Classification Symbol

Flammable F

Pyrophoric P

Corrosive Acid CA

Corrosive Base CB

Toxic T

Highly Toxic HT

Oxidizer O

Inert I

Irritant IRR

Water Reactive WR

Unstable (Reactive) UR

Other Health Hazard OHH

6.3 A chemical should be assigned more than one

classification if it possesses more than one of the

characteristics listed in the table.

6.4 The properties of mixtures of two or more

chemicals should be determined experimentally or

estimated using accepted principles, such as those in

ISO 10156, CGA P20 and P23.

NOTE 3: The experimentation or estimation may be

performed by the user, or the user may rely on experimental

results or estimations by accepted principles performed by

others and reported in a document, such as an MSDS.

NOTE 4: A list of some chemicals used in the semiconductor

industry and their classification symbols appears in Related

Information 1.

7 Separation

7.1 Where practical, each chemical (except for inert

gases) should be contained in a separate cabinet.

7.2 Containing Different Chemicals in a Cabinet

7.2.1 Except as described below, chemicals should be

contained in different gas cabinets if they do not

possess exactly the same classification symbols.

7.2.2 An inert (I) gas does not have to be separated

from any other chemical.

7.2.3 An irritant (IRR) chemical may be contained in a

gas cabinet with a chemical that is not an irritant, if the

remaining classification symbols are exactly the same.

7.2.4 A toxic (T) chemical may be contained in a gas

cabinet with a highly toxic (HT) chemical, if the

remaining classification symbols are exactly the same.

NOTE 5: Related Information 2 contains additional

information and references on the separation of chemicals, as

practiced or regulated in specific geographical regions.

8 Related Documents

8.1 SEMI Standards

F13 — Guide for Gas Source Control Equipment

F14 — Guide for the Design of Gas Source Equipment

Enclosures

S14 — Safety Guidelines for Fire Risk Assessment and

Mitigation for Semiconductor Manufacturing

Equipment

S18 — Environmental, Health, and Safety Guideline

for Silane Family Gases Handling

8.2 Building Officials and Code Administrators

BOCA National Fire Prevention Code

8.3 Compressed Gas Association

P-1 — Safe Handling of Compressed Gas in Containers

8.4 International Conference of Building Officials and

Western Fire Chiefs Association

Uniform Fire Code

8.5 Southern Building Code Conference International,

Inc

SBCCI Standard Fire Prevention Code

8.6 United States Code of Federal Regulations

7 Building Officials & Code Administrators International, Inc. , 4051

West Flossmor Road, Country Club Hills, IL 60477

8 Compressed Gas Association, 4221 Walney Road, 5th Floor,

Chantilly VA 20151-2923., Phone: 703-788-2700, Fax: 703-961-

1831, Email:

cga@cganet.com , www.cganet.com

9 International Fire Code Institute, 5360 Workman Mill Road,

Whittier, California 90601-2298, USA, www.ifci.org

10 Southern Building Code Congress International (SBCCI), 900

Montclair Road, Birmingham, AL 35213

29 CFR 1910.1200 — Hazard Communication

49 CFR 172.101 — Hazardous Materials Regulations

and Procedures

8.7 Dangerous Properties of Industrial Materials — N.

Irving Sax, Seventh Edition, 1988.

8.8 Matheson Gas Data Book — 7th Edition

NOTICE: SEMI makes no warranties or

representations as to the suitability of the Safety

Guidelines set forth herein for any particular

application. The determination of the suitability of the

Safety Guidelines is solely the responsibility of the

user. Users are cautioned to refer to manufacturer' s

instructions, product labels, product data sheets, and

other relevant literature, respecting any materials or

equipment mentioned herein. These Safety Guidelines

are subject to change without notice.

By publication of this Safety Guideline, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this Safety Guideline. Users of this

guideline are expressly advised that determination of

any such patent rights or copyrights, and the risk of

infringement of such rights are entirely their own

responsibility.

11 The Office of the Federal Register, Washington, D.C. 20037

12 Available from www.mathesontrigas.com