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SEMI E127-0705 © SEMI 2003, 2005 39 1...* 0 ...* 1...* Data R o w R ow N um : uns i gne d int e ger Ta b le ID : t e x t T ableT ypeL: text Da t a It e m 1 : varian t . Da t a It e m n : var i ant Da t a Ro w T em p l a …

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Table 19 IMM Calibration Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text string assigned by the IMM.
ObjType Type of Object. RO Y Text = “TableIMM_CalibData”.
CalibrationDuration Expected or mean duration of
calibration procedure, in seconds.
RW Y Integer.
CalibrationStatus Indicates whether or not the last
substrate calibration was good.
RO Y Enumerated:
Successful
Failed
CalibrationTimeStamp Date/time when the last calibration
was completed.
RO Y Depends on TimeStampFormat.
RefSubstID Identifier of substrate used for
calibration.
RO Y Text. Null string if no reference substrate
used for calibration.
14.6 IMM Data Table Object Services
14.6.1 Services related to IMM Data Table Objects are provided by the IMM object and are listed in Table 5, ¶11.5.
14.6.2 Scenarios involving IMM Data Table Objects are illustrated in Related Information 1.
15 Data Table Objects
15.1 Data Table Object Model
15.1.1 As shown in Figure 11, a Data Table Object has an associated Data Row Template and a set of Data Rows.
When a table is transferred, it transfers an ordered set of column headers (Data Information ObjIDs) and a set of one
or more rows, where each row consists of one or more individual entries following the order specified by the column
headers. The information in a Data Row Template corresponds to the set of column headers. The ith column
header identifies the type of data in the ith position within a row. The column headers are available both as a list of
headers and as one of the attributes in a DataEntryTemplate.
15.1.2 Individual measurement data themselves have attributes, such as units and data type. These are provided in
the Data Information object. The Data Information provides this additional information about the specified type of
data entry (that is, for a specific column or position within a row). Each Data Row Template uses as many Data
Information objects as there are columns in the table. Any given Data Information may be used by multiple Data
Row Templates, since the specific Data Row Template produced may vary by recipe.
15.1.3 A master Data Row Template provides all available Data Information objects, while a Data Row Template
for a specific measurement table provides only those Data Information objects that are available for a specific table.
For example, one table may provide CD linewidth, while a different table provides film thickness. Specific data
depends on the recipe used.
SEMI E127-0705 © SEMI 2003, 2005 39
1...*
0...*
1...*
Data Row
Row Num: uns igned int eger
TableID: tex t
TableTypeL: text
Data It e m 1: variant
.
Dat aItem n: variant
Data Row Template
DataInfoList: list of text
Data Information
Assurance: list of structures
DataType: text
Description: text
InterdependencyRule: enumer ation
Units: enumeration
Us e: text
ValidityRule: text
1
0...*
describes data
order within
row s
1
Table
DataLength: unsigned integer
NumCols: unsigned integer
NumRow s : unsigned integer
TableRequest
TableSend
Data Table
DataRow TemplateID: text
contains
shows order
within row
Figure 11
Data Table Object Model
15.1.4 Data Table Object Attributes
15.1.5 The attributes of the Data Table Object are defined in Table 20.
Table 20 Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restriction of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “TableData”.
RowTemplateID ObjID of the associated Data Row
Template.
RO Y Text.
15.1.6 The attributes of the Data Row object are defined in Table 21.
Table 21 Data Row Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Numeric text for the row number. Complies
with restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow”.
DataItem
i
The ith entry within the row. RO Y Any data type except structures (lists of mixed
data types).
RowNum Identifies the row position within its
table.
RO Y Unsigned integer.
RowOwner Identifies the ObjType and ObjID of
the table to which the row belongs.
RO Y Text. Conforms to the format of ObjSpec in
SEMI E39.
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15.2 Data Row Template Object
15.2.1 The Data Row Template provides the organization of data within any Data Row of a given Data Table
Object.
15.2.2 Data Row Template Attributes are defined in Table 22.
Table 22 Data Row Template Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restrictions of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow_Template”.
DataInfoIDList Identifies the names of the individual
data in the order in which the data will
be transferred within a row when
exported.
RO Y Ordered list of 1+ text.
NumEntries Number of columns in table. RO Y Unsigned integer.
15.2.2.1 Data Information Object
15.2.2.1.1 A Data Information object describes the properties available for an individual DataItem
i
in a Data Row
for a table. The attributes of this object provide information about a kind of data item that can be reused for multiple
tables, so that the information does not need to be duplicated.
15.2.2.1.2 All DataItems in a specific position within a row (that is, all that fall in the same column of a table) have
the same set of properties. For example, a Data Information object for any cell in the column named “Xcoord” have
the same description, the same data type, the same units, and so forth.
15.2.2.1.3 Assurance data is designated to be a container for information known by the IMM that describes the
trustworthiness of the data itself. Since it is expected that the IMM Data will be used for decision making on the
process tool, it is important that the client has access to not only the data but any other information to tell the client
that the data is reliable. For Raw Data, examples of this might include actual voltages or laser power that is
delivered to a measurement sensor (different from the setpoint), signal-to-noise ratios, or other parameters. For
Result Data, examples might include goodness of fit for a model, confidence limit in a specific model parameter, or
other information that is generated by the IMM.
15.2.2.1.4 The attributes of the Data Information object are defined in Table 23.
Table 23 Data Information Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Corresponds to the name of the item of
data (the column header). Complies with
restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataInformation”.
Assurance Information that describes the
trustworthiness or believability in data
generated.
RO N List of 0+ structures consisting of
AssuranceName
AssuranceDataType
AssuranceValue
AssuranceUnits