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SEMI F69-0302 © SEMI 2002 5 7.13 The post-tes t report should in clude, at min imum , the follow ing: 1) P re-test exam ination results. 2) Pre-test leak rate. 3) Summ ary and chronolog y of test events, test interruptio…

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SEMI F69-0302 © SEMI 2002 4
NOTE 1: Plane of gas sticks is normal to shock/vibe table and axes of sticks are transverse to test input.
Figure 3
Lateral Orientation
7 Shock Testing
7.1 In general, conduct shock testing according to
MIL-STD-810, Part Two, Laboratory Test Method
516.5, Procedure 1 (Functional Shock). This test will
subject the gas delivery system to a peak acceleration of
40 g’s employing a terminal peak sawtooth shock pulse.
7.2 The test should be conducted in each of the gas
delivery system’s three axes as illustrated in Figures 1–
3.
7.3 Prior to initiating the test, examine the gas delivery
system for physical defects and document the results.
7.4 Prior to initiating the test, thoroughly prepare the
gas delivery system for testing. This includes, but is
not limited to, insuring all fasteners and sealing
mechanisms are tightened to manufacturers’ or design
specifications.
7.5 Prior to initiating the test, make certain that the gas
delivery system is leak tight using inboard test
procedures per SEMI F1. A bag leak test method is
recommended in conjunction with this test.
7.6 Secure the gas delivery system under test to the
shock table in one of its three orientations: horizontal,
vertical, or lateral. The gas delivery system should be
fastened directly to the table with no cushion or other
intermediary between the two. A rigid mounting is
desirable, taking caution not to introduce stress to the
gas delivery system.
7.7 Conduct the shock test.
7.8 At the conclusion of the test, examine the gas panel
for physical defects and document the results.
7.9 If, as a result of the test, an apparent physical
failure occurred that would likely prevent the safe
operation of the gas panel and/or would likely
compromise the leak tightness of the gas panel, the
physical failure should be corrected, the gas panel
retested for leak tightness, and the test repeated.
7.10 At the conclusion of the test, leak test the gas
delivery system using inboard leak procedures per
SEMI F1. A bag leak test method is recommended in
conjunction with this test. Alternatively, by agreement
with the customer, all leak testing may be withheld until
completion of all shock and vibration testing. This
presumes specific failure mode information is not
required.
7.11 Repeat 7.6 through 7.10 for a second orientation.
7.12 Repeat 7.6 through 7.10 for the third and final
orientation.
SEMI F69-0302 © SEMI 2002 5
7.13 The post-test report should include, at minimum,
the following:
1) Pre-test examination results.
2) Pre-test leak rate.
3) Summary and chronology of test events, test
interruptions, and test failures.
4) All shock measurement data, including that of any
accelerometers mounted to the gas delivery system.
5) Post-test examination results for all three axes.
6) Post-test leak rate for all three shock tests.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
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compliance with this standard may require use of
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takes no position respecting the validity of any patent
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item mentioned in this standard. Users of this standard
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content of SEMI.
SEMI F70-0302 © SEMI 2002
1
SEMI F70-0302
TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION
OF GAS DELIVERY SYSTEM
This test method was technically approved by the Global Facilities Committee and is the direct responsibility
of the Japanese Facilities Committee. Current edition approved by the Japanese Regional Standards
Committee on January 11, 2002. Initially available at www.semi.org January 2002; to be published March
2002.
1 Purpose
1.1 The purpose of this document is to provide a
standardized methodology and procedure for measuring
the particle contribution performance of a gas delivery
system in terms of number of particles added to gas
flowing through the system. This standardized
procedure is intended to be used commonly by the
component suppliers, gas suppliers, equipment
suppliers, and users.
2 Scope
2.1 This test method applies to all types of surface
mount and conventional gas delivery systems used in
semiconductor manufacturing facilities and comparable
research and development areas.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 All components must meet quality requirements as
established and controlled by manufacturers prior to
testing (e.g., dimensional, functional, etc.).
3.2 Care should be exercised in handling of
components to maintain manufacturer’s specifications.
4 Referenced Standards
NOTE 1: As listed or revised, all documents cited shall be
the latest publications of adopted standards.
4.1 ISO Standards
1
ISO 14644-1 — Cleanrooms and Associated Controlled
Environments – Part 1: Classification of air cleanliness
1 ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-
1211 Genève 20, Switzerland, website: www.iso.ch
4.2 JIS Standards
2
JIS B 9921 — Light Scattering Automatic Particle
Counter
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CNC — condensation nucleus counter
5.1.2 LPC — laser particle counter
5.1.3 MFC — mass flow controller
5.1.4 MFM — mass flow meter
5.1.5 slm — standard liters per minute, the gas
volumetric flow rate measured in liters per minute at
0°C and 1 atm.
5.2 Definitions
5.2.1 background counts — particle counts contributed
by the test apparatus (including false counts) with the
spool piece in the place of the test object as function of
particle size.
5.2.2 counting efficiency — the ratio of the particle
concentration calculated from the particle counts to the
actual particle concentration in the sampled gas for
particles equal to or larger than a given particle size.
5.2.3 design flow rate — flow rate normally applied to
the gas delivery system.
5.2.4 false counts — particle counts contributed by
electrical noise or by other events and not particles in
the sampled gas.
5.2.5 gas delivery system — a system installed in
semiconductor manufacturing equipment to supply
process and carrier gases to reactors, which typically
consists of tubing, fittings, valves, filters, mass flow
controllers and regulators; can be surface mount or
conventional system.
5.2.6 minimum counting particle diameter — a
predefined minimum diameter of particles to be
counted in this test method.
2 Japanese Standards Association, 1-24, Akasaka, 4-Chome, Minato-
ku, Tokyo 107 Japan