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SEMI S17-0701 © SEMI 2001 9 RELATED INFORM A TI ON 1 PROTECTIVE DEVICE O PTION CONSIDERA TION FOR LOAD/UNLOAD OPERATIONS AT SEMICONDUCTOR MANUFACTURING EQUIPM ENT LO AD S T AT I O N S NOTE: This Related Infor mation is n…

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SEMI S17-0701 © SEMI 2001 8
hazardous waste (such as lead, nickel cadmium or
lithium).
NOTE 14: Disposal requirements should comply with
national or local codes, regulations, and laws.
NOTE 15: Per SEMI S2 environmental guidelines, the UTV
system supplier should provide information on the nature,
volume, and risks of potential hazardous waste (such as lead
or lithium).
NOTE 16: Battery charging stations may have to meet
international, national, or local regulations (such as EU
Directives or U. S. Department of Labor, Occupational,
Safety and Health Act Regulations).
14.2 Spill Prevention for Floor-Traveling and Space-
Traveling Vehicles — If the UTV requires the use of
lubricants, the UTV supplier should meet the following
spill and slip hazard provisions.
14.2.1 Any UTV with an internal oil-reservoir (such as
a gearbox) should be structurally designed to prevent
any oil from dripping out of the vehicle.
14.2.2 Space-traveling vehicle track lubricants should
be restricted to those lubricant types and quantities that
will not drip from the vehicle or create a slip hazard.
14.2.3 Rail guided vehicle or track lubricants should
be restricted to those lubricant types and quantities that
will not drip (e.g., onto sub-Fab floors). Neither should
they create a slip hazard on the walking surfaces beside
the rail or on the top of the rail itself.
15 Related Documents
15.1 SEMI Standards
SEMI E33 — Specification for Semiconductor
Manufacturing Facility Electromagnetic Compatibility
SEMI E64 Provisional Specification for 300-mm
Cart to SEMI E15.1 Docking Interface Port
SEMI S1 — Safety Guideline for Visual Hazard Alerts
15.2 ANSI Standard
3
ANSI/ASME B56.5 — Safety Standard for Guided
Industrial Vehicles and Automated Functions of
Manned Industrial Vehicles
15.3 CEN Standards
4
EN 1525 — Safety of Industrial Trucks – Driverless
Trucks and their Systems
3 American National Standards Institute, 11 West 42nd St., 13th
Floor, New York, NY 10036
4 European Committee For Standardization, 36, rue de Stassart, B-
1050 Brussels, Belgium
15.4 U.S. Government Regulations
5
29 CFR 1910 — U. S. Department of Labor,
Occupational, Safety and Health Act Regulations
15.5 JIS Standards
6
JIS D 6801 — Glossary of Terms Relating to
Automatic Guided Vehicle Systems
JIS D 6802 — General Rules on the Safety of
Automatic Guided Vehicle Systems
JIS D 6803 — General Rules on the Design of
Automatic Guided Vehicles
JIS D 6804 — General Rules on the Design of
Automatic Guided Vehicle Systems
JIS D 6805 — Testing Method of Characteristics and
Functions of Automatic Guided Vehicles
15.6 VDI Standards
7
VDI 2510 — Automated Guided Vehicle Systems
(AGVS)
VDI-3643 — Self-Powered Trolley System – Load
500kg
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
5 Code of Federal Regulations, Superintendent of Documents, U.S.
Government Printing Office, Washington, D.C. 20402
6 Japanese Industrial Standards available in Japanese language only
through Japanese Standards Association, 1-24, Akasaka 4-chome,
Minato-ku, Tokyo, Japan 107-8440
7 Verein Deutscher Ingenieure (VDI), Postfach 101139, D-40002
Düsseldorf, Germany
SEMI S17-0701 © SEMI 20019
RELATED INFORMATION 1
PROTECTIVE DEVICE OPTION CONSIDERATION FOR LOAD/UNLOAD
OPERATIONS AT SEMICONDUCTOR MANUFACTURING EQUIPMENT
LOAD STATIONS
NOTE: This Related Information is not an official balloted part of SEMI S17. It is included to assist the user of the
document in making decisions about possible options.
R1-1 Purpose
R1-1.1 This Related Information should act as an
application note for consideration and selection of
safety devices that may be provided to protect
load/unload operations where risks are generated by
space traveling vehicles.
R1-1.2 Space traveling vehicle suppliers are not
required to provide such devices, except as necessary to
comply with local jurisdictional requirements.
NOTE R1-1: Refer to the main document for devices
recommended for protecting equipment.
R1-2 Scope
R1-2.1 Protective Devices As related to UTV
equipment, devices designed to protect personnel or
equipment from injury or damage during raising or
lowering of loads into position.
R1-2.2 Protective devices should be considered when
space-traveling vehicles with hoisting mechanisms are
present.
R1-2.3 Protective devices function to warn of, or
prevent transfer of, loads when personnel or equipment
are at risk.
R1-2.3.1 This application note covers the following
types of devices:
• Sensors
• Shields
• Alarms
• Signs and visual alerts
• Communication protocol
NOTE R1-2: This should not be considered a complete list
there could be many other solutions.
R1-3 Limitations
R1-3.1 This Related Information is not intended to
apply to situations where load ports are installed only
in locations inaccessible to personnel walking on the
factory floor (such as SEMI E15.1 Option 2 load ports).
R1-3.2 This Related Information does not apply to
factories using only floor-traveling vehicles or PGVs.
R1-4 Considerations
R1-4.1 Protective devices should be considered for
preventing transfer of loads when personnel or
equipment are at risk.
R1-4.2 Protective device integration should be
considered a coordinated effort between UTV supplier,
manufacturing equipment supplier and the end user
customer.
R1-5 Lookdown Sensors
R1-5.1 Lookdown Sensors Such sensors surround
the hoisting mechanism and look down to the loadport
to determine if anything is within the path of descent.
R1-5.2 Lookdown sensors are one type of protective
device that allows for the overhead vehicle to “see” if
there is anything in the expected path of descent.
R1-5.3 Lookdown sensors can serve the function of
protecting equipment from impact.
R1-5.4 Lookdown sensors should be capable of
communicating the need for operator intervention back
to a location that can notify the proper personnel.
R1-6 Shield Options
R1-6.1 Shield Device Shield devices are physical
shielding which is placed to block access to a hazard
area.
R1-6.2 Shield devices, when selected, should be
capable of fitting within the dimensional limitations of
the load ports. (See SEMI E15.1 for dimensional
requirements and exclusion zones for 300 mm load
ports.)
R1-6.3 Shield device types include:
• Curtain Sensor
• Safety Guard
• Automatic Doors
SEMI S17-0701 © SEMI 2001 10
R1-6.4 Shield devices, when chosen, should prevent
simultaneous load/unload operation by a floor-traveling
vehicle or person and a space-traveling vehicle.
R1-6.5 Protective Device Interlocks — These
confirmation signals from shield devices are used to
interrupt the transfer process if a shield is breached.
R1-6.5.1 In the case of UTV systems, protective device
interlocks should communicate to the UTV equipment
either directly or through the manufacturing equipment.
R1-6.5.2 Communication should be via a protected-
path communications protocol that is fail safe.
R1-7 Alarms
R1-7.1 Alarms Alarms consist of audible and visual
notices of hazards that may be approaching.
R1-7.2 Alarms may also be selected as protective
devices.
R1-7.3 Alarms may be field configurable to allow for
selection of type of audible or visual allowed, or to
allow for selection of either audible or visual and
elimination of the other type.
R1-8 Signs and Visual Alerts
R1-8.1 Signs such as “Caution”, “Warning”, or other
sign appropriate to the potential hazard may be selected
as a method of protection.
R1-8.2 Signs should be compatible with SEMI S1, or
should be approved by the local jurisdictional authority.
R1-8.3 Visual Alerts an indicator applied to floors
or vertical surfaces surrounding a potential are of
delivery, which indicates to persons present that a
potential hazard exists in the area.
R1-8.4 Visual alerts may include:
• Striped tape on the floor
• Warning barriers
• Railings
NOTE R1-3: This should not be considered a complete list
there could be many other solutions.
R1-9 Communication Protocol
R1-9.1 Communication Protocol A method of
communicating the status of the equipment to a
centrally monitored location. This may be direct or
through the equipment communication path.
R1-9.2 Protective devices offered should be capable of
communicating with floor-traveling and space-traveling
UTVs through some type of interface.
R1-10 Providing Information
R1-10.1 If protective devices are offered, the UTV
supplier should provide documentation to the end user
customer about protective devices available.
R1-10.2 Information should be provided to the user to
explain the function of any protective devices that may
be offered.
R1-10.3 Information may also be needed by suppliers
of other equipment to insure adequate communication
between equipment types.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.