semi合集-English.pdf - 第6554页

SEMI G84-0303 © SEMI 2001, 2003 4 Attribute Name Definiti on Access Required Format OriginLocation Coordinate sy stem on substrate to address devices. Location of th e datum point or the origin of the coordinates shall b…

100%1 / 7923
SEMI G84-0303 © SEMI 2001, 2003 3
Data Item Description / Settings Format
OBJSPEC A text string that has an internal format and that is used to point to a specific object instance.
The string is formed out of a sequence of formatted substrings, each specifying an object’s type
and identifier. The substring format has the following four fields: object type, colon character
“:”, object identifier, greater than symbol “>”, where the “:” is used to terminate an object type
and the “>” is used to terminate an identifier field. The object type may be omitted where it
may be otherwise determined. The final “>” is optional.
The OBJSPEC for the StripMap Object is a zero-length item. No specifier required.
A
OBJTYPE Identifier for a group or class of objects. All objects of this type must have the same set of
attributes.
Available object types: “StripMap”
A
OBJID Object Identifier A
Table 2 Strip Map Data Item/Object Description and Settings
Attribute Name Definition Access Required Format
ObjType The object type, “StripMap” RO Y A =
“StripMap”
ObjID The object. This is the StripID, FrameID or
equivalent.
RO Y A
CellStatus Cell Status is an array of values indicating the
value of each unit/package/device on a strip.
0 = Functional Good Cell; Good die placed on
Good cell.
1 = Unknown Cell Status.
2 = Defect/Non-functional Cell; the cell is
marked as defect by previous steps.
CellStatus shall be sent in an array of size
Rows × Columns in row major format with
respect to the OriginLocation.
CellStatus may be provided by the host to the
equipment as well as from the equipment to
the host.
Used in: Strip Map Upload and Strip Map
Download
RW Y’
Either CellStatus or
CellGrade or both are
required if mapping is
to be used.
U1
CellGrade CellGrade is an array of values indicating the
classification of each unit/package/device/cell
on a strip. The process and equipment using a
‘grading’ scheme determine this classification
and the associated values. Examples of a
CellGrade are test bins, sort grades, package
grade, marking grades etc.
CellGrade shall be sent in an array of size
Rows × Columns in row major format with
respect to the OriginLocation.
RW Y’
Either CellStatus or
CellGrade or both are
required if mapping is
to be used.
U1
Columns The number of columns of (measured) device
matrix on substrate, that is the number of
devices on the X-axis of the map data. It is
required if the type of the map data is simple
array structure.
RO Y U4
SEMI G84-0303 © SEMI 2001, 2003 4
Attribute Name Definition Access Required Format
OriginLocation Coordinate system on substrate to address
devices. Location of the datum point or the
origin of the coordinates shall be one of the
following:
0 = Not currently supported
1 = Upper right – top side
2 = Upper left – top side
3 = Lower left – top side*
4 = Lower right – top side
5 = Not currently supported
6 = Upper right – bottom side
7 = Upper left – bottom side
8 = Lower left – bottom side
9 = Lower right – bottom side
* Default value is 3 (=Lower left – top side) if
this item is not present.
Typically Used in: Strip Map Upload and
Strip Map Download
RO Y U1
Rows The number of rows of (measured) device
matrix on substrate, that is the number of
devices on the Y-axis of the map data. It is
required if the type of the map data is simple
array structure.
RO Y U4
SubstrateID A character code that may be printed or
encoded on the substrate, which uniquely
identifies the substrate, and can be used to
correlate the map with physical substrate.
SubstrateID is either StripID or FrameID.
RW Y A
BinGrade A BinCode (see SEMI G81) is a value
describing the grading of a die. BinGrade is
an array of bin codes used to describe each die
on the wafer.
BinCodeList shall be sent in an array size
Rows x Columns in row major format with
respect to the OriginLocation.
Typically used in: Strip Map Upload
RW N U1
DefectCode DefectCodes are a set of codes representing
defects that are detected at each process step
by equipment or a human.
DefectCodes shall be sent in an array of size
Rows × Columns in row major format with
respect to the OriginLocation.
If there is no defect, the DefectCode is 0
(Zero)
Typically Used in: Strip Map Upload and
Strip Map Download
RW N U1 or A
LotID Production lot identifier for this data. RW N A
SEMI G84-0303 © SEMI 2001, 2003 5
Attribute Name Definition Access Required Format
ContainerID A character code that may be printed or
encoded on the substrate carrier, which
uniquely identifies the substrate carrier.
ContainerID can be MagazineID, CarrierID or
CassetteID.
RW N A
WaferID A character code that may be printed or
encoded on the wafer, which uniquely
identifies the wafer. Used when equipment
reports wafer id with or in parallel with strip
map data.
RW N A
XYPosition XYPosition represents the X and Y coordinate
position of the die on the wafer. XYPosition
must be in (X,Y) order multi-item and shall be
made up of data items DieX and DieY (See
SEMI G81).
For each XYPosition a WaferID is given.
This information is used when wafer id and
die location on the wafer is to be associated
with the strip id and location of the
unit/package/device/cell on a strip.
XYPosition is set to 32767, 32767 when a
strip is removed from the equipment. This
represents no wafer die information.
Valid range for X and Y is −32768 .. 32767
RW N I2
9.3 Map Data Protocol
9.3.1 The strip mapping standard implementation shall
use the SECS/GEM standard Object Services
(S14,F1/F2) and standard Collection Event S6,F11/F12
Streams and Functions for the transfer of Strip Maps to
and from equipment (see SEMI E5).
9.3.2 The use of object services will allow the
equipment to request the type of information from the
host with predefined attributes. The host will then reply
with the list of attributes requested. This will enable
application specific behavior of the mapping process by
equipment types.
9.3.3 The use of the Collection Event Streams and
Functions will allow event-based communication from
the equipment to the host on the status of the strip
mapping process.
9.3.4 Strip Map Download
9.3.4.1 The equipment shall request a strip map
download from the host using the Standard Object
Services (OSS) command, S14,F1 GetAttribute Request
(GAR). Please refer to Section 9.2.1.
9.3.4.2 The equipment shall include all mandatory data
attributes in GAR request as well as any optional
information required by the particular equipment to
implement the strip mapping capability.
9.3.4.3 The host will respond to the GetAttribute
Request with an S14,F2, Get Attribute Data (GAD).
9.3.5 Strip Map Upload
9.3.5.1 The equipment will provide updates to the strip
map via the S6,F11 event.
9.3.5.2 All mandatory data items are required to be
included in the upload event along with any optional
equipment specific data items. Please refer to Section
9.2.2 for examples.