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SEMI E102-0600 © SEMI 2000 46 AMHS Equ ipment Controllers Factory Operations MTSC Durable Management Machine Object Eq6 63: Transfer Command to stk9 (carrier bbb, src. shelf, dest stk9/Bay _Out) (Stocker SEM) 64: Transfe…

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SEMI E102-0600 © SEMI 200045
40: Transfer Command Completed (Stocker SEM)
41: Transfer Command to Stk9 (carrier bbb, src stk9/Bay_in, dest shelf) (Stocker SEM)
42: Transfer Command Updates (Stocker SEM)
43: Transfer Command Completed (Stocker SEM)
46: Transfer Command to stk9 (carrier aaa, src. shelf, dest stk9/Bay_Out) (Stocker SEM)
47: Transfer Command updates (Stocker SEM)
48: Transfer Command Complete (Stocker SEM)
49: Transfer Command to Oht1 (aaa, stk9/Bay_Out, eq6/port1) (IBSEM)
50: Transfer Command Updates (IBSEM)
53: Transfer Command Complete (IBSEM)
60: InformJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
35: Transfer Completed (IBSEM)
38: Transfer Command to Stk9 (carrier aaa, src stk9/Bay_in, dest shelf)(Stocker SEM)
39: Transfer Command Updates (Stocker SEM)
33: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
34: DurableLocationChangedEvent
36: setMaterialTrackingLocation(MaterialTrackingLocation Stk9)
37: DurableLocationChangedEvent
51: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
52: DurableLocationChangedEvent
55: setMaterialTrackingLocation(MaterialTrackingLocation Eq6)
57: makeProcessing()
58: MaterialContainerStateChangedEvent
56: DurableLocationChangedEvent
Once all carriers of batch have
reached the stocker, the MTSC
will begin reserving ports for
delivery to the
Equipment (implementation specific).
As soon as either aaa or bbb has
been deliverd to the equip., the
reserve and following messages
would happen for ccc and then
ddd.
44: reservePortForTransferTo(MaterialContainer aaa, Port 1)
45: reservePortForTransferTo(MaterialContainer bbb, Port 2)
59: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
61: removeFinishedJob(Job TrJob1)
62: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
54: transferComplete(MaterialContainer aaa, Port 1)
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
Figure R1-16
Scenario Case 7 (continued)
SEMI E102-0600 © SEMI 2000 46
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
63: Transfer Command to stk9 (carrier bbb, src. shelf, dest stk9/Bay_Out) (Stocker SEM)
64: Transfer Command Updates (Stocker SEM)
65: Transfer Command Complete (Stocker SEM)
77: InformJobStateChange(Job TrJob2, previousState JobExecuting, newState JobCompleted)
66: Transfer Command to Oht1 (bbb, stk9/Bay_Out, eq6/port2) (IBSEM)
67: Transfer Command Updates (IBSEM)
68: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
69: DurableLocationChangedEvent
70: Transfer Command Complete (IBSEM)
72: setMaterialTrackingLocation(MaterialTrackingLocation Eq6)
73: DurableLocationChangedEvent
74: makeProcessing
75: MaterialContainerStateChangedEvent
76: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
78: removeFinishedJob(Job TrJob2)
79: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
71: transferComplete(MaterialContainer bbb, Port 1)
Figure R1-17
Scenario Case 7 (continued)
SEMI E102-0600 © SEMI 200047
R1-2.8 Scenario Eight — Abort Job Handling
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route, selects stk10 from sgr1 (Internal Service)
Preferable for Supervisor to makestopped() job. In
this case the carrier remains on a port.
8: MaterialContainerStateChangedEvent
16: DurableLocationChangedEvent
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine Eq5, DestinationPort Eq5/port1)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
15: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
17: makeAborted()
10: Transfer Command to Stk5 (carrier aaa, dest stk5/Bay_Out) (Stocker SEM)
11: Transfer Command Updates (Stocker SEM)
12: Transfer Command Completed (Stocker SEM)
13: Transfer Command to ohs2 (src stk5/Bay_Out, dest stk10/Bay_In) (IBSEM)
14: Transfer Command Updates (IBSEM)
19: TransferAbortInitiated (IBSEM)
20: TransferAbortCompleted (IBSEM)
18: JobStateChangedEvent(Job TrJob1, previousState JobExecuting, newState JobAborting)
22: informJobStateChange(Job TrJob1, previousState JobAborting, newState JobAborted)
3: Returns Job Handle TrJob1
1: setUnit(unitvalue)
4: JobStateChangedEvent(..PreviousState JobUndefined, NewState JobQueued)
5: JobStateChangedEvent(..PreviousState JobQueued, NewStateJobExecuting)
9: getUnit()
21: JobStateChangedEvent(..previousState JobExecuting, newState JobAborted)
23: removeFinishedJob()
24: JobStateChangedEvent(..previousState JobAborted, newStateJobUndefined)
Figure R1-18
Scenario Case 8