semi合集-English.pdf - 第324页
SEMI E49.2-1104 © SEMI 1995, 2004 6 Assembly is repressurized t o 40 psig. During the nex t 15 minutes the Assem bly pressure is monitored to ensu re that no visible leakage or pressure loss in excess of 2 psi (5%) i…
SEMI E49.2-1104 © SEMI 1995, 2004 5
such that the tests are representative of the Assembly
performance.
9.1.6 For optimum results, the distance between a
sample port and an instrument should be minimized.
It
is recommended that components comply with SEMI
F57 and the assembly and design should be in
accordance with SEMI E49.7.
9.1.7 Operate valves to ensure there is no entrapment
and to displace any air prior to beginning a test.
9.1.8 Filter elements contained within the Assembly
under test should not be included during a test as they
may mask results and will need to be replaced
following the test.
9.1.9 Assemblies
should be dried with Nitrogen and
capped following any testing with ultrapure water and
prior to shipment.
9.2 Hydrostatic Pressure Test – This test is required
for every Assembly shipped directly to an end user.
This test may also be required periodically at other
points in the supply chain.
9.2.1 The intent of this test is to eliminate Assembly
leaks when an assembly is initially exposed to pressure
and temperature (up to and including the
manufacturer’s maximum recommended operating
pressure and temperature) at the end user’s facility.
The user of this test is encouraged to review
“Hydrostatic Pressure and Leak Testing of Polymer
Piping Systems Used in High-purity Water
Applications” (Mayer, Burkhart, Rydzewski) for a
thorough discussion of standards, and how the physical
properties of polymers impact testing practices.
9.2.2 The Hydrostatic Pressure Test conditions are the
manufacturer’s maximum recommended pressure at
ambient temperature. However, it is incumbent upon
the manufacturer to ensure that the assembly will be
leak free when exposed to maximum pressure and
maximum temperature at the end user’s facility. If the
test conditions recommended here do not result in
initial leak free operation for the end user, it is
incumbent upon the end user and manufacturer to agree
on appropriate corrective action(s) to comply with the
intent of this Hydrostatic Pressure Test. This may
include testing at elevated media temperatures.
9.2.3 Test Method
9.2.3.1 Test Media — Ultrapure Water at ambient
temperature.
9.2.3.2 Test Pressure — Manufacturer’s maximum
recommended operating pressure.
9.2.3.3 Test Procedure
Flush system at maximum rated flow to remove
entrapped air.
Keep assembly at constant temperature during test.
Pressurize to the Manufacturer’s maximum
recommended operating pressure and wait 15
minutes.
Repressurize to Manufacturer’s maximum
recommended operating pressure and wait 15
minutes.
Repressurize to Manufacturer’s maximum
recommended operating pressure and wait 30
minutes.
Repressurize to Manufacturer’s maximum
recommended operating pressure.
Monitor the pressure for 15 minutes to ensure
compliance with Table 1 requirement of <
5%
decay in pressure.
Record pressure readings at the beginning and end
of each waiting period.
9.2.4 Hydrostatic Pressure Test Example
Hydrostatic Pressure Test Example
0
5
10
15
20
25
30
35
40
45
0 1530456075
Time (minutes)
Pressure (psig)
Figure 1
Hydrostatic Pressure Test Example
Test Media: Ultrapure Water
Test Media Temperature: 20C
Manufacturer’s maximum recommended operating
pressure: 40 psig.
Assembly is pressurized to 40 psig for 15 minutes.
Assembly is repressurized to 40 psig for 15
minutes.
Assembly is repressurized to 40 psig for 30
minutes.
SEMI E49.2-1104 © SEMI 1995, 2004 6
Assembly is repressurized to 40 psig.
During the next 15 minutes the Assembly pressure
is monitored to ensure that no visible leakage or
pressure loss in excess of 2 psi (5%) is observed.
9.2.5 As noted in Table 1, the requirement to pass this
test is no visible leakage and pressure decay of less than
5% of maximum recommended operating pressure.
The actual pressure decay and results of a visible
inspection should be noted on the test report.
9.3 Ultrapure Water Flush Test — This test consists of
resitivity and TOC tests and is required for every
Assembly shipped directly to an end user. These tests
may also be required periodically at other points in the
supply chain.
9.3.1 Resistivity Testing Recommendations
9.3.1.1 The test flow rate should be no less than the
manufacturer’s recommended minimum flow rate for
the instrument(s) being used. The test flow rate should
be no more than the maximum recommended flow for
the Assembly under test or the instrument(s) being
used.
9.3.1.2 Following recommended manufacturer
procedures, measure resistivity just prior to the
Assembly and at the Assembly outflow.
9.3.1.3 Allow the reading just prior to the Assembly to
stabilize until no change outside the precision of the
device is observed for at least 5 minutes and the
resistivity meets or exceeds the specification in section
7.2. Repeat the procedure at the Assembly outflow.
9.3.1.4 Temperature just prior to the Assembly must
not differ more than +/- 0.5 C when compared to the
temperature at the Assembly outflow. Otherwise, a
correction may need to be performed
9.3.1.5 Ensure that instrument connections are leak
tight to avoid positive bias from atmospheric CO
2
.
9.3.1.6 The inflow and outflow may be measured
simultaneously using a 2-channel/2-cell resistivity
meter.
9.3.1.7 As noted in Table 1, the requirement to pass
this test is a resistivity >
18 Mohm-cm @ 25°C (77°F)
and both inlet and outlet. The test report should include
inlet at outlet resistivity measurements.
9.3.2 TOC Testing Recommendations
9.3.2.1 The test flow rate should be no less than the
manufacturers recommended minimum flow rate for the
instrument(s) being used. The test flow rate should be
no more than the maximum recommended flow for the
Assembly under test or the instrument(s) being used.
9.3.2.2 Refer to ASTM Method D5997-96
(Reapproved 2000) when including UV persulfate
oxidation or ASTM 5173-97 when using UV without
persulfate. It should be noted which method is
incorporated.
9.3.2.3 Ensure that the instrument connections are leak
tight to avoid interference from atmospheric CO
2
.
Because TOC is determined by the difference of Total
Carbon (TC) and Total Inorganic Carbon (TIC), the
TOC detection limit can be no lower than 10% of the
TIC reading.
9.3.2.4 Allow the readings to stabilize until at least two
successive readings agree within +/- 5% and the TOC
adders are <
the value specified in Table 1.
9.3.2.5 The procedure should be performed just prior
to the Assembly and at the Assembly outflow.
9.3.2.6 As noted in Table 1, the requirement to pass
this test is TOC adders (ppb) of <
7.5. Both the inlet
and outlet TOC measurements should be included in the
test report.
9.4 Particle Testing Recommendations —
These tests
are required periodically to establish that the Assembly
design is typically capable of meeting the performance
criteria in Table 1.
9.4.1 The test flow rate should be no less than the
manufacturers recommended minimum flow rate for the
instrument(s) being used. The test flow rate should be
no more than the maximum recommended flow for the
Assembly under test or the instrument(s) being used.
9.4.2 Particle contribution will be determined without
valves being actuated. Active components such as
valves should be evaluated for particle performance at
the component level to supplement this test.
9.4.3 The water supplied to the Assembly under test
should be filtered with a maximum 0.05 micron filter
with a retention value such that filtered particle
concentration is <
10 particle/liter > 0.1 µm.
9.4.4 Particle contribution testing will measure the
Assembly outlet particle concentration and assumes all
particles are generated within the Assembly under test.
Periodic verification of the inlet particle concentration
specified in Section 9.4.3 should be performed and
reported in accordance with Section 9.1.1. Allowable
particle adders are outlined in Table 1.
9.4.5 Follow the manufacturer’s recommended
procedures for the optical particle counter.
9.4.6 Allow the reading to stabilize from rinse down
until there is no change within the expected noise for 2
or more intervals (i.e. no change in slope). An
appropriate sample interval should be chosen such that
SEMI E49.2-1104 © SEMI 1995, 2004 7
intervals with very small counts are not taken. In
addition, the user should remain cognizant of the
requirement in Table 1 for allowable particle adders.
9.4.7 As noted in Table 1, the requirement to pass this
test is <
120 allowable Particle adders (particles/L > 0.1
µm). The outlet particle concentration and date and
concentration of most recent inlet particle concentration
verification should be noted on the test report.
9.5 Anions and Metals Testing Recommendations —
These tests are required periodically to establish that the
Assembly design is typically capable of meeting the
performance criteria in Table 1.
9.5.1 The test flow rate should be no more than the
maximum recommended flow for the Assembly under
test or the instrument(s) being used.
9.5.2 Grab Sample Methodology for Assembly supply:
Step 1: Open and close sampling valve 5 times.
Step 2: Open valve full throttle and allow UPW to flow
for at least 2 minutes.
Step 3: Adjust to approximately 1liter/minute and
allow to flow at least 5 minutes.
Step 4: Use precleaned and qualified bottles one each
for anions and metals.
Step 5: Fill to overflowing and empty the contents.
Repeat 4 times. Avoid contact with the neck or inside
of the cap with hands or sample port.
Step 6: Minimizing the distance between the port and
bottle, fill the container to the bottom of the neck.
Step 7: Carefully rinse the cap and immediately secure
it tightly to the bottle.
9.5.3 Grab Sample Methodology for Assembly
Outflow:
Step 1: Under standard assembly operation, allow
outflow to run at least 5 minutes.
Step 2: Use precleaned and qualified bottles one each
for anions and metals. Note that for convenience,
outflow bottles may be prerinsed using inflow UPW.
Step 3: Minimizing the distance between the outflow
and bottle, fill the container to the bottom of the neck.
Step 4: Carefully rinse the cap and immediately secure
it to the bottle.
9.5.4 Use ASTM D4327 with preconcentration to
analyze anions. Use an industry standard method with
ICP-MS to analyze metals.
9.5.5 Required precision for each analyte is such that
the difference of the incoming and outgoing reading has
an error of no more than +/- 20%.
9.5.6 As noted in Table 1, the requirements to pass this
test are dependent on the ionic or metallic adder. The
inlet and outlet concentrations for each analyte (or
copies of laboratory reports) should be maintained and
available upon request.
10 Certification
10.1 The supplier of an Assembly shipped to an end
user is responsible for defining, establishing, executing,
and maintaining a certification program based on the
tests in Section 6.
10.2 By default all of the requirements within this
document apply unless another agreement is made
between supplier of an Assembly shipped to an end
user and an end user.
10.3 Qualification tests and certification documents
shall reflect current production practices.
10.4 The certification program will specify any
necessary corrective action plan in the event that an
Assembly fails to meet these requirements during
testing.
10.5 Upon request, the supplier of an Assembly
shipped to an end user is responsible for supplying
documentation that proves the Assembly consistently
meets the requirements of this document.
10.6 As stated in the purpose, this document is a
“guideline by which the purity and mechanical integrity
of all ultrapure water and liquid chemical Assemblies
shipped to end users may be qualified”. To ensure the
purity and mechanical integrity of Assemblies shipped
to end users is maintained, these guidelines must also
be implemented throughout the supply chain. Section
10.7 provides recommendations for Assemblies shipped
directly to an end user and Section 10.8 provides
recommendations for the remainder of the supply chain.
10.7 The certification program for an Assembly
delivered directly to an end user will specify the
frequency of testing and the test Assembly(s).
10.7.1 Each individual Assembly delivered directly to
an end user shall have the following tests performed:
Hydrostatic test (See Table 1 and Sections 9.1 and
9.2)
Ultrapure Water Flush test (see Table 1 and
Sections 9.1, 9.3.1, and 9.3.2)