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SEMI S4-0304 © 1992, 2004 6 Table R1-2 Classifications, sorted by Classifications Classifications Chemicals CA Hydrogen Chloride CA-F-UR Trichlorosilane CA-HT-OHH-WR Arsenic Pentafluoride CA-O-T Chlorine CA-P-T-WR Dichlo…

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SEMI S4-0304 © SEMI 1992, 2004 5
RELATED INFORMATION 1
CLASSIFICATIONS OF CHEMICALS
NOTICE: This related information is not an official part of SEMI S4 and was derived from task force members'
knowledge, S4-92, and various references. This related information was approved for publication by letter ballot on
December 4, 2003.
R1-1 Classifications of chemicals
R1-1.1 Table R1-1 provides the classifications of some
chemicals in common use in the semiconductor and flat
panel industries. This table is sorted alphabetically by
name of the chemical. (See Table 1 for the definitions
of the symbols.)
NOTE 1: The classifications are presented in alphabetical
order for each chemical so that classifications can be
compared, and the second table could be created, more easily.
There is no technical significance to the order in which the
classifications are listed.
R1-1.2 Table R1-2 contains the same information as
Table R1-1, but it is sorted by classification to be a
more convenient way to identify chemicals that may be
contained in the same gas cabinet.
Table R1-1 Classifications, sorted by chemical
name
Chemicals Classifications
Ammonia (NH
3
) CB-F
Argon (Ar) I
Arsenic Pentafluoride (AsF
5
) CA-HT-OHH-
WR
Arsine (AsH
3
) F-HT-OHH
Boron Trichloride (BCl
3
) CA-WR
Boron Trifluoride (BF
3
) CA-T-WR
Carbon Dioxide (CO
2
) I
Carbon Tetrachloride (CCl
4
) OHH
Chlorine (Cl
2
) CA-O-T
Diborane (B
2
H
6
) HT-IRR-P-WR
Dichlorosilane (SiCl
2
H
2
) CA-P-T-WR
Diethyl Telluride ((C
2
H
5
)
2
Te) P-IRR
Diethyl Zinc ((C
2
H
5
)
2
Zn) CA-P-UR-WR
Dimethyl Zinc ((CH
3
)
2
Zn) CA-P-UR-WR
Germane (GeH
4
) F-IRR-T-UR
Halocarbon 11 (trichlorofluoromethane,
CCl
3
F)
I
Halocarbon 115 (chloropentafluoroethane,
C
2
ClF
5
)
I
Halocarbon 116 (hexafluoroethane, C
2
F
6
) I
Halocarbon 12 (dichlorodifluoromethane,
CCl
2
F
2
)
I
Halocarbon 13 (chlorotrifluoromethane,
CClF
3
)
I
Chemicals Classifications
Halocarbon 13B1
(bromotrifluoromethane, CBrF
3
)
I
Halocarbon 14 (tetrafluoromethane, CF
4
) I
Halocarbon 23 (fluoroform, CHF
3
) I
Helium (He) I
Hydrogen (H
2
) F
Hydrogen Chloride (HCl) CA
Hydrogen Fluoride (HF) CA-T
Hydrogen Sulfide (H
2
S) T-F-IRR
Methyl Chloride (CH
3
Cl) F-IRR
Methyl Fluoride (CH
3
F) F-IRR
Nitric Oxide (NO) IRR-O-T
Nitrogen (N
2
) I
Nitrogen Trifluoride (NF
3
) IRR-O
Nitrous Oxide (N
2
O) O
Oxygen (O
2
) O
Perfluoropropane (C
3
F
8
) I
Phosphine (PH
3
) HT-P
Phosphorous Pentafluoride (PF
5
) CA-T-WR
Silane (SiH
4
) P
Silicon Tetrachloride (SiCl
4
) CA-WR
Silicon Tetrafluoride (SiF
4
) CA-T-WR
Sulfur Hexafluoride (SF
6
) I
Trichlorosilane (SiCl
3
H) CA-F-UR
Triethyl Aluminum ((C
2
H
5
)
3
Al) P
Trimethyl Aluminum ((CH
3
)
3
Al) P
Trimethyl Antimony ((CH
3
)
3
Sb) F-T
Trimethyl Arsine ((CH
3
)
3
As) F-T
Trimethyl Gallium ((CH
3
)
3
Ga) P
Trimethyl Indium ((CH
3
)
3
In) P
Trimethyl Phosphine ((CH
3
)
3
P) F-T
Tungsten Hexafluoride (WF
6
) CA-T-WR
Note 1: Additional chemicals may be used at the present time or may
be suggested in the future. Any new chemical should be categorized
in a way that chemicals of similar chemical characteristics are treated.
If detailed chemical data are not available, the chemical should be
considered to present unkown hazards and should be stored with only
inert chemicals.
SEMI S4-0304 © 1992, 2004 6
Table R1-2 Classifications, sorted by
Classifications
Classifications Chemicals
CA Hydrogen Chloride
CA-F-UR Trichlorosilane
CA-HT-OHH-WR Arsenic Pentafluoride
CA-O-T Chlorine
CA-P-T-WR Dichlorosilane
CA-P-UR-WR Diethyl Zinc
CA-P-UR-WR Dimethyl Zinc
CA-T Hydrogen Fluoride
CA-T-WR Boron Trifluoride
CA-T-WR Phosphorous Pentafluoride
CA-T-WR Silicon Tetrafluoride
CA-T-WR Tungsten Hexafluoride
CA-WR Boron Trichloride
CA-WR Silicon Tetrachloride
CB-F Ammonia
F Hydrogen
F-HT-OHH Arsine
F-IRR Methyl Chloride
F-IRR Methyl Fluoride
F-IRR-T-UR Germane
F-T Trimethyl Antimony
F-T Trimethyl Arsine
F-T Trimethyl Phosphine
HT-IRR-P-WR Diborane
HT-P Phosphine
I Argon
I Carbon Dioxide
I Halocarbon 14 (tetrafluoromethane)
Classifications Chemicals
I Halocarbon 116 (hexafluoroethane)
I Helium
I Nitrogen
I Perfluoropropane
I Sulfur Hexafluoride
I Halocarbon 11
(trichlorofluoromethane)
I Halocarbon 12
(dichlorodifluoromethane)
I Halocarbon 13
(chlorotrifluoromethane)
I Halocarbon 13B1
(bromotrifluoromethane)
I Halocarbon 23 (fluoroform)
I Halocarbon 115
(chloropentafluoroethane)
IRR-O Nitrogen Trifluoride
IRR-O-T Nitric Oxide
O Nitrous Oxide
O Oxygen
OHH Carbon Tetrachloride
P Silane
P Triethyl Aluminum
P Trimethyl Aluminum
P Trimethyl Gallium
P Trimethyl Indium
P-IRR Diethyl Telluride
T-F-IRR Hydrogen Sulfide
SEMI S4-0304 © SEMI 1992, 2004 7
RELATED INFORMATION 2
REGIONAL INFORMATION
NOTICE: This related information is not an official part of SEMI S4 and was derived from task force members'
knowledge and various references. This related information was approved for publication by letter ballot on
December 4, 2003.
R2-1 Purpose of this Related Information
R2-1.1 This Related Information was intended, at the
time of original publication, by the EHS Committee to
provide additional information and references on the
separation of chemicals, as practiced or regulated in
specific geographical regions.
R2-1.2 It is envisioned that the EHS Committee in
each Region of the SEMI Standards Program will
provide the appropriate text for its geographical region.
R2-2 North America
R2-2.1 Requirements for the separation of chemicals
can be found, for example, in both the International
Building Code (IBC) and the International Fire Code
(IFC). These requirements deal with the segregation of
incompatible chemicals in separate cabinets and
separation by barriers/distance in storage rooms. These
requirements can be found in the 2000 IBC section
415.9.5.9 and Table 415.9.5.9 and in the 2000 IFC
sections 2703.8.5 and 2703.9.8.
R2-3 Japan
R2-3.1 In Japan, requirements for the separation of
incompatible gases can be found in the High Pressure
Gas Safety law and related notifications from Ministry
of Economy and Industry, such as in section 11 of
“Notification regarding technical standards for
Location, Construction, and Facility of Manufacturing
Plant”.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the safety
guidelines set forth herein for any particular
application. The determination of the suitability of the
safety guidelines is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s
instructions, product labels, product data sheets, and
other relevant literature, respecting any materials or
equipment mentioned herein. These safety guidelines
are subject to change without notice.
By publication of this safety guideline, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any item
mentioned in this safety guideline. Users of this
guideline are expressly advised that determination of
any such patent rights or copyrights, and the risk of
infringement of such rights are entirely their own
responsibility.
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