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SEMI E132.1-0305 © SEMI 2005 3 Table 23 Translation Ta ble for RoleAssign ment Class ............................................................................ ................... 23 Table 24 Translation Ta ble for Sub…

SEMI E132.1-0305 © SEMI 2005 2
Figure 14 GetDefinedPrivilegesErrorType XML Schema Type .................................................................................20
Figure 15 GetACLRequest XML Schema Element.....................................................................................................21
Figure 16 GetACLResponse XML Schema Element ..................................................................................................21
Figure 17 ACLEntrySelectorType XML Schema Type ..............................................................................................22
Figure 18 PrivilegeAssignment XML Schema Type...................................................................................................22
Figure 19 RoleAssignment XML Schema Type..........................................................................................................23
Figure 20 AddACLEntryRequest XML Schema Element...........................................................................................24
Figure 21 AddACLEntryResponse XML Schema Element ........................................................................................25
Figure 22 UnrecognizedPrivilegeType XML Schema Type .......................................................................................25
Figure 23 DeleteACLEntryRequest XML Schema Element .......................................................................................26
Figure 24 DeleteACLEntryResponse XML Schema Element.....................................................................................27
Figure 25 GetActiveSessionsRequest XML Schema Element ....................................................................................28
Figure 26 GetActiveSessionsResponse XML Schema Element..................................................................................28
Figure 27 ActiveSession XML Schema Type .............................................................................................................29
Figure 28 SetMaxSessionsRequest XML Schema Element ........................................................................................30
Figure 29 SetMaxSessionsResponse XML Schema Element......................................................................................31
Figure 30 GetMaxSessionsRequest XML Schema Element........................................................................................32
Figure 31 GetMaxSessionsResponse XML Schema Element.....................................................................................32
Figure 32 Sample SessionManager WSDL Service Definition...................................................................................35
Figure 33 EstablishSessionRequest XML Schema Element........................................................................................35
Figure 34 EstablishSessionResponse XML Schema Element .....................................................................................36
Figure 35 PersistSessionRequest XML Schema Element............................................................................................37
Figure 36 PersistSessionResponse XML Schema Element .........................................................................................37
Figure 37 SessionPingRequest XML Schema Element...............................................................................................38
Figure 38 SessionPingResponse XML Schema Element ............................................................................................39
Figure 39 CloseSessionRequest XML Schema Type ..................................................................................................40
Figure 40 CloseSessionResponse XML Schema Element...........................................................................................40
Figure 41 E132HashHeader Schema Element.............................................................................................................41
Figure 42 Sample SessionClient WSDL Service definition ........................................................................................43
Figure 43 SessionFrozenNotification XML Schema Element.....................................................................................45
Figure 44 SessionClosedNotification XML Schema Element.....................................................................................46
List of Tables
Table 1 Example Translation Table...............................................................................................................................6
Table 2 Example Translation Table for Operation Input/Output Arguments ................................................................7
Table 3 Example Schema/WSDL Document Description Table...................................................................................7
Table 4 Altova XMLSPY Schema Diagram Symbols...................................................................................................7
Table 5 Example Interface WSDL Port Type Table......................................................................................................9
Table 6 Example Interface WSDL Binding Table.........................................................................................................9
Table 7 Example Operation Binding Table .................................................................................................................10
Table 8 Example PortType Operation Table ...............................................................................................................10
Table 9 XML Schema..................................................................................................................................................14
Table 10 SecurityAdmin PortType Definitions...........................................................................................................15
Table 11 SecurityAdmin Binding Definitions.............................................................................................................15
Table 12 SecurityAdmin Port Type.............................................................................................................................16
Table 13 SecurityAdmin Binding................................................................................................................................16
Table 14 SEMI E132 Error Codes...............................................................................................................................17
Table 15 Translation Table for UnauthorizedOperationError Class............................................................................17
Table 16 Translation Table for GetDefinedPrivileges Output Parameters ..................................................................19
Table 17 Translation Table for DefinedPrivilege Class...............................................................................................19
Table 18 GetDefinedPrivileges Messages ...................................................................................................................20
Table 19 GetDefinedPrivileges PortType Operation...................................................................................................20
Table 20 GetDefinedPrivileges Operation Binding.....................................................................................................20
Table 21 Translation Table for GetACL Output Parameters.......................................................................................21
Table 22 Translation Table for PrivilegeAssignment Class ........................................................................................22

SEMI E132.1-0305 © SEMI 2005 3
Table 23 Translation Table for RoleAssignment Class ...............................................................................................23
Table 24 Translation Table for Subject Class..............................................................................................................23
Table 25 Translation Table for Privilege Class ...........................................................................................................23
Table 26 GetACL Messages........................................................................................................................................24
Table 27 GetACL PortType Operation........................................................................................................................24
Table 28 GetACL Operation Binding..........................................................................................................................24
Table 29 Translation Table for AddACLEntry Input Parameters................................................................................24
Table 30 Translation Table for AddACLEntry Output Parameters.............................................................................25
Table 31 Translation Table for UnrecognizedPrivilegeError Class.............................................................................25
Table 32 AddACLEntry Messages..............................................................................................................................26
Table 33 AddACLEntry PortType Operation..............................................................................................................26
Table 34 AddACLEntry Operation Binding................................................................................................................26
Table 35 Translation Table for DeleteACLEntry Input Parameters ............................................................................26
Table 36 Translation Table for DeleteACLEntry Output Parameters..........................................................................27
Table 37 DeleteACLEntry Messages ..........................................................................................................................27
Table 38 DeleteACLEntry PortType Operation ..........................................................................................................27
Table 39 DeleteACLEntry Operation Binding ............................................................................................................27
Table 40 Translation Table for GetActiveSessions Output Parameters.......................................................................28
Table 41 Translation Table for Subject Class..............................................................................................................29
Table 42 Translation Table for HTTPEndPoint Class.................................................................................................29
Table 43 GetActiveSessions Messages........................................................................................................................29
Table 44 GetActiveSessions PortType Operation .......................................................................................................30
Table 45 GetActiveSessions Operation Binding .........................................................................................................30
Table 46 Translation Table for SetMaxSessions Input Parameters .............................................................................30
Table 47 Translation Table for SetMaxSessions Output Parameters...........................................................................30
Table 48 SetMaxSessions Messages............................................................................................................................31
Table 49 SetMaxSessions PortType Operation ...........................................................................................................31
Table 50 SetMaxSessions Operation Binding .............................................................................................................31
Table 51 Translation Table for GetMaxSessions Output Parameters..........................................................................32
Table 52 GetMaxSessions Messages...........................................................................................................................32
Table 53 GetMaxSessions PortType Operation...........................................................................................................33
Table 54 GetMaxSessions Operation Binding.............................................................................................................33
Table 55 XML Schema................................................................................................................................................33
Table 56 SessionManager PortType Definitions.........................................................................................................33
Table 57 SessionManager Binding Definitions ...........................................................................................................34
Table 58 SessionManager Port Type...........................................................................................................................34
Table 59 SessionManager Binding..............................................................................................................................34
Table 60 Translation Table for EstablishSession Input Parameters.............................................................................35
Table 61 Translation Table for EstablishSession Output Parameters..........................................................................36
Table 62 EstablishSession Messages...........................................................................................................................36
Table 63 EstablishSession PortType Operation...........................................................................................................36
Table 64 EstablishSession Operation Binding.............................................................................................................36
Table 65 Translation Table for PersistSession Input Parameters.................................................................................37
Table 66 Translation Table for PersistSession Output Parameters..............................................................................37
Table 67 PersistSession Messages...............................................................................................................................38
Table 68 PersistSession PortType Operation...............................................................................................................38
Table 69 PersistSession Operation Binding.................................................................................................................38
Table 70 Translation Table for SessionPing Output Parameters .................................................................................39
Table 71 SessionPing Messages..................................................................................................................................39
Table 72 SessionPing PortType Operation..................................................................................................................39
Table 73 SessionPing Operation Binding....................................................................................................................39
Table 74 Translation Table for CloseSession Input Parameters ..................................................................................40
Table 75 Translation Table for CloseSession Output Parameters ...............................................................................40
Table 76 CloseSession Messages ................................................................................................................................40
Table 77 CloseSession PortType Operation................................................................................................................41
Table 78 CloseSession Operation Binding ..................................................................................................................41

SEMI E132.1-0305 © SEMI 2005 4
Table 79 XML Schema................................................................................................................................................41
Table 80 SessionClient PortType Definitions..............................................................................................................42
Table 81 SessionClient Binding Definitions................................................................................................................42
Table 82 SessionClient Port Type ...............................................................................................................................42
Table 83 SessionClient Binding ..................................................................................................................................43
Table 84 Translation Table for SessionPing Output Parameters .................................................................................43
Table 85 SessionPing Messages..................................................................................................................................44
Table 86 SessionPing PortType Operation..................................................................................................................44
Table 87 SessionPing Operation Binding....................................................................................................................44
Table 88 SessionFrozen Messages ..............................................................................................................................45
Table 89 SessionFrozen PortType Operation ..............................................................................................................45
Table 90 SessionFrozen Operation Binding ................................................................................................................45
Table 91 Translation Table for SessionClosed Input Parameters ................................................................................46
Table 92 SessionClosed Messages ..............................................................................................................................46
Table 93 SessionClosed PortType Operation ..............................................................................................................46
Table 94 SessionClosed Operation Binding ................................................................................................................46
1 Purpose
1.1 Specification Purpose
1.1.1 The purpose of this specification is to provide an authentication implementation using SSL and a
WSDL/SOAP implementation and XML Schema that corresponds to the UML model for Equipment Client
Authentication and Authorization as defined by SEMI E132.
2 Scope
2.1 Specification Scope
2.1.1 The scope of this document is the faithful representation of the ECA model in an XML schema and
corresponding WSDL services. It will not add new domain information or concepts to the model. The only
additions made are those needed to render useful WSDL or XML Schema.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Provisional Specification
3.1.1 This specification is provisional pending the approval of SEMI E138. This specification relies on XML
Schema types defined in Core Components, and cannot be fully implemented without these types. Finalization of
that specification is a condition for the removal of the provisional status of this document.
4 Referenced Standards
4.1 SEMI Standards
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E132 — Specification for Equipment Client Authentication and Authorization
4.2 OMG Standards
1
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,
(http://www.omg.org/technology/documents/modeling_spec_catalog.htm).
1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, U.S.A., Phone: 781.444.0404, Fax:781.444.0320, website:
www.omg.org.