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SEMI E52-0703 © SEMI 1995, 2003 7 Code Gas Name Symbol Formula Synonym Ref 203 Chlorodifluoroethane C2H3ClF2 CH 3 -CF 2 Cl R-142b 4 204 Chlorodifluoroethylene C2HClF2 CF 2 =CHCl R-1122, FREON-1122 4 205 Chlorosilane SiH3…

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SEMI E52-0703 © SEMI 1995, 2003 6
Code Gas Name Symbol Formula Synonym Ref
159 Tritium T2 H
3
2
T2 2
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
163 Triethylborate C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane 2
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
167 Nitric Acid HNO3 HNO
3
2
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene orEthylene,
Perchloro
2
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
171 Sulfuric Acid H2SO4 H
2
SO
4
2
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
173 Acetonitrile C2H3N CH
3
CN 2
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
175 Intentionally Left Blank
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
180 Phenol C6H6O C
6
H
5
OH 2
181 Toluene C7H8 C
6
H
5
CH
3
Methylbenzene 2
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
184 Acetone C3H6O CH
3
COCH
3
2
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
186 2,2 Dichloro 1,1,1 Trifluoroethane C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
192 Hexafluorobenzene C6F6 C
6
F
6
2
193 Phosphorus Trichloride PCL3 PCl
3
2
194 Titanium Tetraisopropoxide C12H28OTi Ti(OC
3
H
7
)
4
1
195 Arsenic Trifluoride AsF3 AsF
3
2
196 Arsenic Triiodine AsI3 AsI
3
2
197 Benzene C6H6 C
6
H
6
2
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
200 Carbon Tetrabromide CBr4 CBr
4
2
201 Chlorine Dioxide ClO2 ClO
2
2
202 Chlorine Pentafluoride ClF5 ClF
5
2
SEMI E52-0703 © SEMI 1995, 2003 7
Code Gas Name Symbol Formula Synonym Ref
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
217 Digermane Ge2H6 Ge
2
H
6
2
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
223 Fluoroacetylene C2HF FC=CH 2
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
226 Aluminum Trifluoride AlF3 AlF
3
2
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
229 Hydrogen telluride H2Te H
2
Te 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
232 Difluoroamidogen NF2 NF
2
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
235 Nitromethane CH3NO2 CH
3
NO
2
2
236 Octafluorobutane C4F8 C
4
F
8
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
238 Oxygen Dichloride OCl2 OCl
2
2
239 Pentaborane(11) B5H11 B
5
H
11
2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
241 Perfluorobutane C4F10 C
4
F
10
3
242 Arsenic Tribromide AsBr3 AsBr
3
2
243 Rhenium Hexafluoride ReF6 ReF
6
2
244 Deuteriumsilane SiD4 SiH
2
4
2
245 Stibine SbH3 SbH
3
2
246 Sulfur Trioxide SO3 SO
3
2
247 Tellurium Hexafluoride TeF6 TeF
6
2
SEMI E52-0703 © SEMI 1995, 2003 8
Code Gas Name Symbol Formula Synonym Ref
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
249 Tetrafluorodiborane B2F4 B
2
F
4
2
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
253 Tetrasilane Si4H10 Si
4
H
10
2
254 Titanium Tetraiodide TiI4 TiI
4
2
255 Tribromostibine SbBr3 SbBr
3
2
256 Trichlorostibine SbCl3 SbCl
3
2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
261 Trifluorosilane SiHF3 SiHF
3
2
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
265 Dichloromethane CH2Cl2 CH
2
Cl
2
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
269 Hydrazoic Acid HN3 HN
3
1
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
277 Trimethylborane C3H9B (CH
3
)
3
B 2
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
282 Tetrakis( diethylamino )titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789; 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2