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SEMI E134.1-0305 © SEMI 2005 4 Table 84 Translation Table for N oValue ......................................................................................... ............................41 Table 85 NoValueReasonEn um …

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SEMI E134.1-0305 © SEMI 2005 3
Table 28 Translation Table for DCPDefinedType.......................................................................................................21
Table 29 Translation Table for InvalidPlanType.........................................................................................................21
Table 30 Translation Table for InvalidEventRequestType..........................................................................................22
Table 31 Translation Table for InvalidExceptionRequestType...................................................................................23
Table 32 Translation Table for InvalidParameterRequestType...................................................................................23
Table 33 Translation Table for InvalidTraceRequestType..........................................................................................23
Table 34 Translation Table for InvalidTriggerType....................................................................................................24
Table 35 Translation Table for InvalidIntervalType....................................................................................................24
Table 36 Translation Table for InvalidCycleType.......................................................................................................24
Table 37 GetDefinedPlanIds Operation Binding.........................................................................................................25
Table 38 GetDefinedPlanIds PortType Operation.......................................................................................................25
Table 39 DataCollectionManagement Binding ...........................................................................................................25
Table 40 Translation Table for Output Arguments for the GetDefinedPlanIds Operation..........................................26
Table 41 GetPlanDefinition Operation Binding ..........................................................................................................26
Table 42 GetPlanDefinition PortType Operation ........................................................................................................26
Table 43 DataCollectionManagement Binding ...........................................................................................................27
Table 44 Translation Table for Input Arguments for the GetPlanDefinitionOperation...............................................27
Table 45 Translation Table for Output Arguments for the GetPlanDefinitionOperation ............................................28
Table 46 Translation Table for NoSuchPlanType .......................................................................................................28
Table 47 ActivatePlan Operation Binding...................................................................................................................28
Table 48 ActivatePlan PortType Operation.................................................................................................................28
Table 49 DataCollectionManagement Binding ...........................................................................................................29
Table 50 Translation Table for Input Arguments for the ActivatePlanOperation .......................................................29
Table 51 Translation Table for Output Arguments for the GetDefinedPlanIds Operation..........................................30
Table 52 Translation Table for DCPActivatedType....................................................................................................30
Table 53 GetActivePlanIds Operation Binding ...........................................................................................................30
Table 54 GetActivePlanIds PortType Operation.........................................................................................................30
Table 55 DataCollectionManagement Binding ...........................................................................................................31
Table 56 Translation Table for Output Arguments for the ActivatePlan Operation....................................................31
Table 57 DeactivatePlan Operation Binding ...............................................................................................................32
Table 58 DeactivatePlan PortType Operation .............................................................................................................32
Table 59 DataCollectionManagement Binding ...........................................................................................................32
Table 60 Translation Table for Input Arguments for the DeactivatePlan Operation...................................................32
Table 61 Translation Table for Output Arguments for the DeactivatePlan Operation ................................................33
Table 62 Translation Table for DeactivatePlanResponseType....................................................................................33
Table 63 Translation Table for DCPNotActiveType...................................................................................................34
Table 64 DeletePlan Operation Binding......................................................................................................................34
Table 65 DeletePlan PortType Operation....................................................................................................................34
Table 66 DataCollectionManagement Binding ...........................................................................................................34
Table 67 Translation Table for Input Arguments for the DeletePlan Operation..........................................................35
Table 68 Translation Table for Output Arguments for the DeletePlanOperation........................................................35
Table 69 Translation Table for DCPDeletedType.......................................................................................................35
Table 70 GetParameterValues Operation Binding ......................................................................................................36
Table 71 GetParameterValues PortType Operation ....................................................................................................36
Table 72 DataCollectionManagement Binding ...........................................................................................................36
Table 73 Translation Table for Input Arguments for the GetParameterValues Operation ..........................................36
Table 74 Translation Table for Output Arguments for the GetParameterValues Operation .......................................37
Table 75 Translation Table for ParameterValueType..................................................................................................38
Table 76 SEMI E134 and SEMI E125.1 Type Description Mapping Table................................................................39
Table 77 Translation Table for F4 & F8......................................................................................................................39
Table 78 Translation Table for I1, I2, I4 & I8.............................................................................................................40
Table 79 Translation Table for S.................................................................................................................................40
Table 80 Translation Table for B.................................................................................................................................40
Table 81 Translation Table for EI................................................................................................................................40
Table 82 Translation Table for ES...............................................................................................................................40
Table 83 Translation Table for B64.............................................................................................................................40
SEMI E134.1-0305 © SEMI 2005 4
Table 84 Translation Table for NoValue.....................................................................................................................41
Table 85 NoValueReasonEnum Enumerated Values ..................................................................................................41
Table 86 Translation Table for FieldValueType .........................................................................................................41
Table 87 GetObjTypeInstanceIds Operation Binding .................................................................................................44
Table 88 GetObjTypeInstanceIds PortType Operation ...............................................................................................44
Table 89 DataCollectionManagement Binding ...........................................................................................................44
Table 90 Translation Table for Input Arguments for the GetObjTypeInstanceIds Operation.....................................44
Table 91 Translation Table for ObjTypeRequestType ................................................................................................45
Table 92 Translation Table for Output Arguments for the GetObjTypeInstanceIds Operation ..................................45
Table 93 Translation Table for ObjTypeResultType...................................................................................................45
Table 94 Translation Table for ObjTypeInstanceType................................................................................................46
Table 95 Translation Table for ObjTypeRequestErrorType........................................................................................46
Table 96 GetCurrentPerformanceStatus Operation Binding .......................................................................................46
Table 97 GetCurrentPerformanceStatus PortType Operation......................................................................................46
Table 98 DataCollectionManagement Binding ...........................................................................................................46
Table 99 Translation Table for Output Arguments for the GetCurrentPerformanceStatus Operation ........................47
Table 100 Translation Table for PerformanceStatusType ...........................................................................................48
Table 101 Translation Table for ActiveJobType.........................................................................................................48
Table 102 Supported Job Type Table for JobTypeEnumType....................................................................................48
Table 103 Translation Table for AffectedSystemType................................................................................................48
Table 104 XML Schema..............................................................................................................................................49
Table 105 DCPConsumer PortType Definitions .........................................................................................................49
Table 106 DCPConsumer Binding Definitions ...........................................................................................................49
Table 107 NewData Operation Binding ......................................................................................................................50
Table 108 NewData PortType Operation ....................................................................................................................50
Table 109 DCPConsumer Binding.............................................................................................................................50
Table 110 Translation Table for Input Arguments for the NewDataNotification Operation.......................................51
Table 111 Translation Table for DataCollectionReportType ......................................................................................51
Table 112 Translation Table for ReportSelectorType .................................................................................................52
Table 113 Translation Table for EventReportType.....................................................................................................53
Table 114 Translation Table for ExceptionReportType ..............................................................................................54
Table 115 Translation Table for TraceReportType .....................................................................................................54
Table 116 Translation Table for CollectedDataType ..................................................................................................55
Table 117 PerformanceWarning Operation Binding ...................................................................................................56
Table 118 PerformanceWarning PortType Operation .................................................................................................56
Table 119 DCPConsumer Binding.............................................................................................................................56
Table 120 Translation Table for Input Arguments for the PerformanceWarning Operation.......................................57
Table 121 PerformanceRestored Operation Binding...................................................................................................57
Table 122 PerformanceRestored PortType Operation.................................................................................................57
Table 123 DCPConsumer Binding.............................................................................................................................57
Table 124 Translation Table for Input Arguments for the PerformanceRestored Operation.......................................58
Table 125 DCPDeactivation Operation Binding .........................................................................................................58
Table 126 DCPDeactivation PortType Operation .......................................................................................................58
Table 127 DCPConsumer Binding.............................................................................................................................58
Table 128 Translation Table for Input Arguments for the DCPDeactivation Operation.............................................59
Table 129 DCPHibernation Operation Binding...........................................................................................................59
Table 130 DCPHibernation PortType Operation.........................................................................................................59
Table 131 DCPConsumer Binding.............................................................................................................................59
Table 132 Translation Table for Input Arguments for the DCPHibernation Operation ..............................................60
Table 133 Translation Table for DCPHibernatedType................................................................................................60
SEMI E134.1-0305 © SEMI 2005 5
1 Purpose
1.1 SOAP Implementation Mapping
1.1.1 The purpose of this specification is to provide an implementation mapping of the SEMI E134 specification for
Data Collection Management to the SOAP 1.1 protocol. This document provides a description of the XML Schema
data types used to support the UML classes defined in SEMI E134, and also describes the WSDL port type and
binding definitions used to support the operations defined by the interfaces specified in SEMI E134.
2 Scope
2.1 Specification Scope
2.1.1 The scope of this specification is the faithful representation of the DCM model in an XML Schema and
corresponding WSDL port types and bindings. It will not add new domain information or concepts to the SEMI
E134 model. The only additions made are those needed to render useful WSDL or XML Schema.
2.1.2 This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI
E132 concepts to the SEMI E134 specification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Provisional Specification
3.1.1 This specification is provisional pending the approval of the SEMI specifications Common Components
(SEMI E138), SEMI E120.1, SEMI E125.1, and SEMI E132.1. This specification relies on XML Schema types
defined by these specifications, and cannot be fully implemented without these types. Finalization of these
specifications is a condition for the removal of the provisional status of this document.
3.1.2 This specification is provisional pending approval of the SEMI specification for Units for the Semiconductor
Industry. This specification relies on the unit of measure symbols defined in that specification. Finalization of this
specification is a condition for the removal of the provisional status of this document.
4 Referenced Standards
4.1 SEMI Standards
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E138 — XML Semiconductor Common Components
SEMI Specification for the Representation of Measurement Units in XML
4.2 OMG Standards
1
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,
(
http://www.omg.org/technology/documents/modeling_spec_catalog.htm).
4.3 W3C Standards
2
1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, U.S.A., Phone: 781.444.0404, Fax:781.444.0320, website:
www.omg.org.
2 World Wide Web Consortium, Massachusetts Institute of Technology (MIT), Computer Science and Artificial Intelligence Laboratory
(CSAIL), 32 Vassar Street Room 32-G515, Cambridge, MA 02139, USA, Telephone: 617.253.2613, Fax: 617.258.5999, website: www.w3.org.