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SEMI S13-0305 © SEMI 1998, 2005 18 RELATED INFORMATION 7 DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE REVISION OF SEMI S8 NOTICE : This relat ed information is not an offi cial part of SEMI S1 3 and was deri ved …

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SEMI S13-0305 © SEMI 1998, 2005 17
RELATED INFORMATION 6
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S6
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This related information was approved for publication by a letter ballot on November 24, 2004.
R6-1 Purpose of this Related Information
R6-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S6.
R6-1.2 The criteria in this related information are not included in SEMI S6 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R6-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S6.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S6 and that this related information be removed from SEMI S13 by revising SEMI S13
with the same effective date as the effective date of the addition of these criteria to SEMI S6.
R6-2 Equipment Parameter Change
R6-2.1 Documents provided to the equipment user should describe changing any parameter of the systems in the
equipment (e.g., changing exhaust monitoring set points, working with portions of the enclosure removed) may
cause an unexpected condition.
SEMI S13-0305 © SEMI 1998, 2005 18
RELATED INFORMATION 7
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S8
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This related information was approved for publication by a letter ballot on November 24, 2004.
R7-1 Purpose of this Related Information
R7-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S8.
R7-1.2 The criteria in this related information are not included in SEMI S8 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R7-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S8.
R7-1.3.1 It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S8 and that this related information be removed from SEMI S13 by
revising SEMI S13 with the same effective date as the effective date of the addition of these criteria to SEMI S8.
R7-2 Supporting Device
R7-2.1 When supporting device provided by the equipment supplier is to be used by the equipment users as a
measure of ergonomic risk mitigation, the documentation should describe how to use it. For example, supporting
devices are appliances that support the user’s body (e.g., a platform to step on), the user’s hands (e.g., palm rest for a
keyboard), or a heavy object (e.g., hoist).
SEMI S13-0305 © SEMI 1998, 2005 19
RELATED INFORMATION 8
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S12
NOTICE: This related information is not an official part of SEMI 13 and was derived from the work of the SEMI
S13 Revision Task Force. This related information was approved for publication by a letter ballot on November 24,
2004.
R8-1 Purpose of this Related Information
R8-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S12.
R8-1.2 The criteria in this related information are not included in SEMI S12 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R8-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S12.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S12 and that this related information be removed from SEMI S13 by revising SEMI
S13 with the same effective date as the effective date of the addition of these criteria to SEMI S12.
R8-2 Decontamination and Decommissioning Information
R8-2.1 Documents provided to the equipment user should provide recommended decontamination procedure based
on the equipment supplier’s baseline process including the following information:
decontamination methods in accordance with SEMI S12;
equipment modules or components requiring decontamination and contaminants, including by-products;
procedures required to decontaminate equipment effectively;
components and equipment that require special handling and disposal procedures, including contaminated parts;
parts containing lead, mercury, cadmium, chromium, arsenic, beryllium, barium, vanadium, selenium, organic
solvents, PCB’s, PPB’s, CFCs and other regulated wastes; and
residual hazardous materials that may remain despite decontamination efforts prior to decommissioning.
R8-2.2 Decommissioning Procedure
R8-2.2.1 Documents provided to the equipment user should provide a recommended decommissioning procedure to
facilitate decontamination and material separation.
R8-2.2.2 The decommissioning procedure should include removal of all hazardous energies (such as chemical,
pneumatic, electrical, pressure, and elevated loads).
R8-2.2.3 The decommissioning procedure should be documented to prevent the mixture of incompatible chemicals.
If it is not feasible, administrative control procedures in order to minimize various risks such as fire, explosion, air
or water pollution and toxicity should be included.
R8-2.2.4 If the chemicals/materials are hazardous, the decommissioning procedure should address how to prevent
their release to the environment. The chemicals include:
Chemicals used to operate or maintain the equipment (e.g., lubricant and coolant),
Other potentially hazardous items which are parts of the equipment, such as capacitors, batteries, lamps or
mercury, which require special disposal procedures, and
Chemicals used in the baseline process of the equipment supplier for which the decontamination and
decommissioning procedures have been provided and their anticipated by-products.