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SEMI E123-0703 © SEMI 2003 17 Table 11 Remote Comman ds vs. Process States (cont.) COMMAND RESET-TOOL-COUNTS BREAK-CONTACT MAKE-CONTACT P U R G E RECONTACT ENABLE-SITE / DISABLE-SITE PRELOAD-UNITS PROCESSING STATE IDLE X…
SEMI E123-0703 © SEMI 2003 16
10.3.15 PURGE — Purge flush or clean the equipment of process material.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESET-TOOL-COUNTS”
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.4 Remote Commands and HSEM Process Model Mapping — Tables 10 and 11 illustrates the relationship
between remote commands and states of the HSEM processing state model. An “X” indicates that a command is
valid for use in this state. If a remote command is attempted during a non-valid state, the equipment would reject
the remote command.
Table 10 Remote Commands vs. Process States
COMMAND
ABORT
BIN-UNITS
PAUSE
PP-SELECT
RESUME
START
STOP
PROCESSING STATE
IDLE X
PROCESSING ACTIVE
PROCESS
SETTING UP X X
READY X X X X
PRELOADING X X X
EXECUTING
LOADING X X
WORKING
AWAITING COMMAND X X X X
CONTACTOR OPEN X X X
PROCESS PAUSE
PAUSING X
PAUSED X X X
CHECKING X X
ALARM PAUSED X X
ABORTED
SEMI E123-0703 © SEMI 2003 17
Table 11 Remote Commands vs. Process States (cont.)
COMMAND
RESET-TOOL-COUNTS
BREAK-CONTACT
MAKE-CONTACT
PURGE
RECONTACT
ENABLE-SITE / DISABLE-SITE
PRELOAD-UNITS
PROCESSING STATE
IDLE X X
PROCESSING ACTIVE
PROCESS
SETTING UP
READY X X X X
PRELOADING
EXECUTING
LOADING
WORKING
AWAITING COMMAND X X
CONTACTOR OPEN X
PROCESS PAUSE
PAUSING
PAUSED X X X
CHECKING
ALARM PAUSED X
ABORTED X
11 Additional SEMI E30 Requirements
11.1 The purpose of this section is to specify any GEM
additional capabilities that are required to be supported
by this class of equipment.
11.2 Requirements — The following GEM additional
capabilities required by HSEM are:
• Establish Communications,
• Dynamic Event Report Configuration,
• Variable Data Collection,
• Status Data Collection,
• Alarm Management,
• Remote Control,
• Equipment Constants,
• Process Program Management,
• Equipment Terminal Services,
• Clock,
• Spooling, and
• Control (Host-Initiated).
12 Alarm Definition
12.1 SEMI E30 has a very restrictive definition of
alarms. This standard requires a broader definition.
12.2 Exceptions are classified into two categories:
errors and alarms. Alarms may be divided into
categories as follows:
1. Personal Safety — Condition may be dangerous to
people.
2. Equipment Safety — Condition may harm
equipment.
3. Parameter Control Warning — Parameter
variation outside of preset limits — may harm
product.
SEMI E123-0703 © SEMI 2003 18
4. Parameter Control Error — Parameter variation
outside of reasonable control limits — may
indicate an equipment malfunction.
5. Irrecoverable Error — Intervention required
before normal use of equipment can resume.
6. Equipment Status Warning — An unexpected
condition has occurred, but operation can continue.
7. Attention Flags — A signal from a process
program indicating that a particular step has been
reached.
8. Data Integrity — A condition which may cause
loss of data; usually related to Stream 6.
12.3 Some alarm conditions may cause more than one
type of alarm to be issued. For example, a parameter
control error on over temperature may also trip a
protective device that makes the alarm irrecoverable
without some intervention. SEMI E30 constrains the
definition of an alarm to be only categories 1–3.
However this definition does not account for the
modular and parallel nature of modern processing
equipment.
12.4 Relationship to ALARM_PAUSED Process State
12.4.1 The equipment manufacturer should define the
relationship between an exception condition and the
ALARM_PAUSED process state on a case-by-case
basis along these guidelines.
1. An exception is not always an alarm.
2. An exception does not necessarily require a process
state change to ALARM_PAUSED even though it
may ultimately prove to be the root cause of that
transition at a later time.
3. Exceptions that force immediate processing
stoppage for the primary function of the tool
should trigger a transition to ALARM_PAUSED.
4. Exceptions reported with an alarm code with a
category of 1–3 and 5 as defined above should
cause a transition to ALARM_PAUSED.
5. A machine with currently set alarms may PAUSE
instead of transitioning to ALARM_PAUSED if
none of the currently set exception conditions were
the immediate trigger for the transition.
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